JPH02134372U - - Google Patents

Info

Publication number
JPH02134372U
JPH02134372U JP4269489U JP4269489U JPH02134372U JP H02134372 U JPH02134372 U JP H02134372U JP 4269489 U JP4269489 U JP 4269489U JP 4269489 U JP4269489 U JP 4269489U JP H02134372 U JPH02134372 U JP H02134372U
Authority
JP
Japan
Prior art keywords
valve body
main
inlet
outlet parts
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4269489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4269489U priority Critical patent/JPH02134372U/ja
Publication of JPH02134372U publication Critical patent/JPH02134372U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
  • Details Of Valves (AREA)
JP4269489U 1989-04-11 1989-04-11 Pending JPH02134372U (US08087162-20120103-C00010.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4269489U JPH02134372U (US08087162-20120103-C00010.png) 1989-04-11 1989-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4269489U JPH02134372U (US08087162-20120103-C00010.png) 1989-04-11 1989-04-11

Publications (1)

Publication Number Publication Date
JPH02134372U true JPH02134372U (US08087162-20120103-C00010.png) 1990-11-07

Family

ID=31554460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4269489U Pending JPH02134372U (US08087162-20120103-C00010.png) 1989-04-11 1989-04-11

Country Status (1)

Country Link
JP (1) JPH02134372U (US08087162-20120103-C00010.png)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104318U (ja) * 1991-02-19 1992-09-08 トキコ株式会社 切換弁
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置
KR100889665B1 (ko) * 2003-10-13 2009-03-19 도쿄엘렉트론가부시키가이샤 열처리 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04104318U (ja) * 1991-02-19 1992-09-08 トキコ株式会社 切換弁
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置
CN100397577C (zh) * 2001-05-14 2008-06-25 东京毅力科创株式会社 阀装置和热处理装置
KR100889665B1 (ko) * 2003-10-13 2009-03-19 도쿄엘렉트론가부시키가이샤 열처리 장치

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