JPH02133401U - - Google Patents

Info

Publication number
JPH02133401U
JPH02133401U JP4117489U JP4117489U JPH02133401U JP H02133401 U JPH02133401 U JP H02133401U JP 4117489 U JP4117489 U JP 4117489U JP 4117489 U JP4117489 U JP 4117489U JP H02133401 U JPH02133401 U JP H02133401U
Authority
JP
Japan
Prior art keywords
cold trap
processing chamber
suction port
vacuum pump
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4117489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4117489U priority Critical patent/JPH02133401U/ja
Publication of JPH02133401U publication Critical patent/JPH02133401U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
JP4117489U 1989-04-07 1989-04-07 Pending JPH02133401U (US20100012521A1-20100121-C00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4117489U JPH02133401U (US20100012521A1-20100121-C00001.png) 1989-04-07 1989-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4117489U JPH02133401U (US20100012521A1-20100121-C00001.png) 1989-04-07 1989-04-07

Publications (1)

Publication Number Publication Date
JPH02133401U true JPH02133401U (US20100012521A1-20100121-C00001.png) 1990-11-06

Family

ID=31551615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4117489U Pending JPH02133401U (US20100012521A1-20100121-C00001.png) 1989-04-07 1989-04-07

Country Status (1)

Country Link
JP (1) JPH02133401U (US20100012521A1-20100121-C00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0518602U (ja) * 1991-08-23 1993-03-09 岩谷産業株式会社 真空発生装置のコールドトラツプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253590A (ja) * 1988-03-31 1989-10-09 Aisin Seiki Co Ltd 高真空ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01253590A (ja) * 1988-03-31 1989-10-09 Aisin Seiki Co Ltd 高真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0518602U (ja) * 1991-08-23 1993-03-09 岩谷産業株式会社 真空発生装置のコールドトラツプ

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