JPH02132943U - - Google Patents

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Publication number
JPH02132943U
JPH02132943U JP4114989U JP4114989U JPH02132943U JP H02132943 U JPH02132943 U JP H02132943U JP 4114989 U JP4114989 U JP 4114989U JP 4114989 U JP4114989 U JP 4114989U JP H02132943 U JPH02132943 U JP H02132943U
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JP
Japan
Prior art keywords
rotor
shaft
cradle
cradles
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4114989U
Other languages
English (en)
Japanese (ja)
Other versions
JP2530285Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989041149U priority Critical patent/JP2530285Y2/ja
Publication of JPH02132943U publication Critical patent/JPH02132943U/ja
Application granted granted Critical
Publication of JP2530285Y2 publication Critical patent/JP2530285Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Drying Of Solid Materials (AREA)
JP1989041149U 1989-04-07 1989-04-07 ウエハーの水切乾燥装置 Expired - Fee Related JP2530285Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989041149U JP2530285Y2 (ja) 1989-04-07 1989-04-07 ウエハーの水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989041149U JP2530285Y2 (ja) 1989-04-07 1989-04-07 ウエハーの水切乾燥装置

Publications (2)

Publication Number Publication Date
JPH02132943U true JPH02132943U (enrdf_load_stackoverflow) 1990-11-05
JP2530285Y2 JP2530285Y2 (ja) 1997-03-26

Family

ID=31551568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989041149U Expired - Fee Related JP2530285Y2 (ja) 1989-04-07 1989-04-07 ウエハーの水切乾燥装置

Country Status (1)

Country Link
JP (1) JP2530285Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617028U (ja) * 1984-06-15 1986-01-16 黒谷 巌 半導体材料の水切乾燥装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS617028U (ja) * 1984-06-15 1986-01-16 黒谷 巌 半導体材料の水切乾燥装置

Also Published As

Publication number Publication date
JP2530285Y2 (ja) 1997-03-26

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