JPH02131343U - - Google Patents
Info
- Publication number
- JPH02131343U JPH02131343U JP3998789U JP3998789U JPH02131343U JP H02131343 U JPH02131343 U JP H02131343U JP 3998789 U JP3998789 U JP 3998789U JP 3998789 U JP3998789 U JP 3998789U JP H02131343 U JPH02131343 U JP H02131343U
- Authority
- JP
- Japan
- Prior art keywords
- dust
- storage case
- bottom plate
- free mask
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000428 dust Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
Description
第１図と第２図は従来の無塵マスク収納ケース
の構造例を示す斜視図、第３図は本考案による無
塵マスク収納ケースの底板の構造例を示す斜視図
、第４図ａ，ｂは本考案による無塵マスク収納ケ
ースの底板に用いられるすのこ材の形状例を示す
斜視図、第５図ａ，ｂ，ｃは本考案による無塵マ
スク収納ケースの底板に用いられるすのこ材の他
の形状例を示す斜視図である。
１……空気中を浮遊する塵類、２……無塵マス
ク投入用開口端、３……無塵マスク取出し口、４
……無塵マスク収納ケース底板、５……無塵マス
ク収納ケース底部に堆積した塵類、６……無塵マ
スク収納ケースの底部に用いるすのこ状底板、７
……すのこ材。
1 and 2 are perspective views showing an example of the structure of a conventional dust-free mask storage case, FIG. 3 is a perspective view showing an example of the structure of the bottom plate of the dust-free mask storage case according to the present invention, and FIGS. FIG. 5b is a perspective view showing an example of the shape of the slatted material used for the bottom plate of the dust-free mask storage case according to the present invention, and FIGS. It is a perspective view which shows another example of a shape. 1... Dust floating in the air, 2... Opening end for inserting a dust-free mask, 3... Dust-free mask removal port, 4
...Bottom plate of the dust-free mask storage case, 5...Dust accumulated on the bottom of the dust-free mask storage case, 6...Slatted bottom plate used at the bottom of the dust-free mask storage case, 7
...Slatted wood.
Claims (1)
スにおいて、当該収納ケースの底部の底板の形状
がすのこ状に形成されていることを特徴とする半
導体製造用無塵マスク収納ケース。 A case for storing a plurality of dust-free masks for semiconductor manufacturing, characterized in that a bottom plate at the bottom of the storage case is formed into a slatted shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3998789U JPH0711471Y2 (en) | 1989-04-06 | 1989-04-06 | Dust-free mask storage case for semiconductor manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3998789U JPH0711471Y2 (en) | 1989-04-06 | 1989-04-06 | Dust-free mask storage case for semiconductor manufacturing |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131343U true JPH02131343U (en) | 1990-10-31 |
| JPH0711471Y2 JPH0711471Y2 (en) | 1995-03-15 |
Family
ID=31549381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3998789U Expired - Lifetime JPH0711471Y2 (en) | 1989-04-06 | 1989-04-06 | Dust-free mask storage case for semiconductor manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711471Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020040275A1 (en) * | 2018-08-24 | 2020-02-27 | ニプロ株式会社 | Dust entry prevention mechanism and entrance preparation room |
-
1989
- 1989-04-06 JP JP3998789U patent/JPH0711471Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0711471Y2 (en) | 1995-03-15 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |