JPH02131341U - - Google Patents
Info
- Publication number
- JPH02131341U JPH02131341U JP3990689U JP3990689U JPH02131341U JP H02131341 U JPH02131341 U JP H02131341U JP 3990689 U JP3990689 U JP 3990689U JP 3990689 U JP3990689 U JP 3990689U JP H02131341 U JPH02131341 U JP H02131341U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cavity
- holding
- gas
- gas inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3990689U JPH02131341U (fr) | 1989-04-03 | 1989-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3990689U JPH02131341U (fr) | 1989-04-03 | 1989-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131341U true JPH02131341U (fr) | 1990-10-31 |
Family
ID=31549225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3990689U Pending JPH02131341U (fr) | 1989-04-03 | 1989-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131341U (fr) |
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1989
- 1989-04-03 JP JP3990689U patent/JPH02131341U/ja active Pending