JPH02131337U - - Google Patents
Info
- Publication number
- JPH02131337U JPH02131337U JP4082089U JP4082089U JPH02131337U JP H02131337 U JPH02131337 U JP H02131337U JP 4082089 U JP4082089 U JP 4082089U JP 4082089 U JP4082089 U JP 4082089U JP H02131337 U JPH02131337 U JP H02131337U
- Authority
- JP
- Japan
- Prior art keywords
- rod
- shaped bodies
- reaction tube
- support
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4082089U JPH02131337U (no) | 1989-04-05 | 1989-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4082089U JPH02131337U (no) | 1989-04-05 | 1989-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131337U true JPH02131337U (no) | 1990-10-31 |
Family
ID=31550941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4082089U Pending JPH02131337U (no) | 1989-04-05 | 1989-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131337U (no) |
-
1989
- 1989-04-05 JP JP4082089U patent/JPH02131337U/ja active Pending