JPH01146522U - - Google Patents
Info
- Publication number
- JPH01146522U JPH01146522U JP4398088U JP4398088U JPH01146522U JP H01146522 U JPH01146522 U JP H01146522U JP 4398088 U JP4398088 U JP 4398088U JP 4398088 U JP4398088 U JP 4398088U JP H01146522 U JPH01146522 U JP H01146522U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- reaction tube
- growth
- substrate
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4398088U JPH01146522U (no) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4398088U JPH01146522U (no) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146522U true JPH01146522U (no) | 1989-10-09 |
Family
ID=31270360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4398088U Pending JPH01146522U (no) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146522U (no) |
-
1988
- 1988-03-31 JP JP4398088U patent/JPH01146522U/ja active Pending