JPH02131333U - - Google Patents

Info

Publication number
JPH02131333U
JPH02131333U JP3972089U JP3972089U JPH02131333U JP H02131333 U JPH02131333 U JP H02131333U JP 3972089 U JP3972089 U JP 3972089U JP 3972089 U JP3972089 U JP 3972089U JP H02131333 U JPH02131333 U JP H02131333U
Authority
JP
Japan
Prior art keywords
identification number
optical sensor
wafer carrier
wafers
display means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3972089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3972089U priority Critical patent/JPH02131333U/ja
Publication of JPH02131333U publication Critical patent/JPH02131333U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP3972089U 1989-04-03 1989-04-03 Pending JPH02131333U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3972089U JPH02131333U (enrdf_load_stackoverflow) 1989-04-03 1989-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3972089U JPH02131333U (enrdf_load_stackoverflow) 1989-04-03 1989-04-03

Publications (1)

Publication Number Publication Date
JPH02131333U true JPH02131333U (enrdf_load_stackoverflow) 1990-10-31

Family

ID=31548880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3972089U Pending JPH02131333U (enrdf_load_stackoverflow) 1989-04-03 1989-04-03

Country Status (1)

Country Link
JP (1) JPH02131333U (enrdf_load_stackoverflow)

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