JPH02131257U - - Google Patents
Info
- Publication number
- JPH02131257U JPH02131257U JP4123989U JP4123989U JPH02131257U JP H02131257 U JPH02131257 U JP H02131257U JP 4123989 U JP4123989 U JP 4123989U JP 4123989 U JP4123989 U JP 4123989U JP H02131257 U JPH02131257 U JP H02131257U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerant
- vacuum processing
- sample stage
- discharge port
- introduction space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 10
- 238000001816 cooling Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4123989U JPH02131257U (cs) | 1989-04-06 | 1989-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4123989U JPH02131257U (cs) | 1989-04-06 | 1989-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02131257U true JPH02131257U (cs) | 1990-10-31 |
Family
ID=31551738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4123989U Pending JPH02131257U (cs) | 1989-04-06 | 1989-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02131257U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006302524A (ja) * | 2005-04-15 | 2006-11-02 | Jeol Ltd | 試料ホルダ冷却部材 |
-
1989
- 1989-04-06 JP JP4123989U patent/JPH02131257U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006302524A (ja) * | 2005-04-15 | 2006-11-02 | Jeol Ltd | 試料ホルダ冷却部材 |