JPH02131142U - - Google Patents
Info
- Publication number
- JPH02131142U JPH02131142U JP3891089U JP3891089U JPH02131142U JP H02131142 U JPH02131142 U JP H02131142U JP 3891089 U JP3891089 U JP 3891089U JP 3891089 U JP3891089 U JP 3891089U JP H02131142 U JPH02131142 U JP H02131142U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- piping
- air flow
- ceiling
- visualization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012800 visualization Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3891089U JPH02131142U (hu) | 1989-03-31 | 1989-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3891089U JPH02131142U (hu) | 1989-03-31 | 1989-03-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02131142U true JPH02131142U (hu) | 1990-10-31 |
Family
ID=31547340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3891089U Pending JPH02131142U (hu) | 1989-03-31 | 1989-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02131142U (hu) |
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1989
- 1989-03-31 JP JP3891089U patent/JPH02131142U/ja active Pending