JPH02130507A - Photodetecting element component - Google Patents
Photodetecting element componentInfo
- Publication number
- JPH02130507A JPH02130507A JP63283816A JP28381688A JPH02130507A JP H02130507 A JPH02130507 A JP H02130507A JP 63283816 A JP63283816 A JP 63283816A JP 28381688 A JP28381688 A JP 28381688A JP H02130507 A JPH02130507 A JP H02130507A
- Authority
- JP
- Japan
- Prior art keywords
- light
- receiving element
- element chip
- optical axis
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 230000005540 biological transmission Effects 0.000 abstract description 9
- 230000004907 flux Effects 0.000 abstract 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
- Optical Communication System (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
【発明の詳細な説明】
概 要
光信号を電気信号に変換するために使用する受光素子部
品に関し、
送信側への反射帰還光が生じるおそれがなく、光軸に垂
直な方向への位置ずれを容易に確認することができる受
光素子部品の提供を目的とし、受光すべき光をレンズに
より集束して受光素子チップの受光面に入射させるよう
にした受光素子部品において、上記受光面を上記レンズ
による集束光線束の光軸に垂直な面に対して傾斜させ、
上記受光面での反射光線束の光軸上に副受光素子チップ
を設け、該副受光素子チップの受光面にふける上記反射
光線束の拡がりが上記副受光素子チップの受光領域にほ
ぼ一致するようにして構成する。[Detailed Description of the Invention] Overview Regarding the light-receiving element components used to convert optical signals into electrical signals, there is no risk of reflected feedback light to the transmitting side, and positional deviation in the direction perpendicular to the optical axis is avoided. The purpose of providing a light-receiving element component that can be easily confirmed is a light-receiving element component in which the light to be received is focused by a lens and incident on the light-receiving surface of a light-receiving element chip. tilted with respect to a plane perpendicular to the optical axis of the focused ray bundle,
A sub light receiving element chip is provided on the optical axis of the reflected light beam on the light receiving surface, so that the spread of the reflected light beam on the light receiving surface of the sub light receiving element chip almost coincides with the light receiving area of the sub light receiving element chip. and configure it.
産業上の利用分野
本発明は光信号を電気信号に変換するために使用する受
光素子部品に関する。INDUSTRIAL APPLICATION FIELD The present invention relates to a light receiving element component used for converting an optical signal into an electrical signal.
一般的な光伝送システムは、送信側では半導体レーザ等
の発光素子を発光させて信号光を光伝送路(光ファイバ
)に送出し、受信側では光伝送路により伝送された信号
光を受光素子により光−電気変換して情報再生を行うよ
うにしている。受光素子の受光面では、入射した光エネ
ルギーが全て吸収されるわけではなく、一部反射して送
信側に帰還し、発光素子の駆動に悪影響を及ぼすことが
あるので、反射帰還光が生じないような構造の受光素子
6品が要望されている。又、受光素子部品を用いて構成
される受光モジュール等の装置にあっては、高い受光効
率を長期間安定に維持できることが要望されている。In a typical optical transmission system, on the transmitting side, a light emitting element such as a semiconductor laser emits light to send signal light to an optical transmission line (optical fiber), and on the receiving side, the signal light transmitted through the optical transmission line is sent to a light receiving element. The information is reproduced through optical-to-electrical conversion. The light-receiving surface of the light-receiving element does not absorb all of the incident light energy, but some of it is reflected back to the transmitting side, which may have a negative effect on the driving of the light-emitting element, so reflected feedback light is not generated. There is a demand for six light-receiving elements with such a structure. Furthermore, in devices such as light-receiving modules constructed using light-receiving element components, it is desired that high light-receiving efficiency can be maintained stably for a long period of time.
従来の技術 第6図は従来の一般的な受光素子部品の断面図である。Conventional technology FIG. 6 is a sectional view of a conventional general light receiving element component.
この受光素子部品10は、受光素子チップ12が載置固
定されるチップマウント14と、チップマウント14及
び信号取り出し用の電極端子16.18が固定される台
座20と、台座20の受光素子チップ12側を密閉封止
するキャップ22とから構成されており、キャップ22
における受光光軸が貫通する部分には透明窓24が取り
付けられている。図示しない光フアイバ出射端から放射
され、あるいは、光フアイバ出射端からの放射光が図示
しない別のレンズによりコリメートされた光は、レンズ
26により集束されて受光素子チップ12の受光面に入
射するようになっている。このようにレンズにより受光
光の集束を行っているのは、受光効率を高めるためであ
り、又、第7図に示すように受光スポットを受光面の受
光領域と比較して十分小さくしておくことによって、機
械的変動に起因する受光効率の低下を防止するためであ
る。This light-receiving element component 10 includes a chip mount 14 on which a light-receiving element chip 12 is placed and fixed, a pedestal 20 on which the chip mount 14 and electrode terminals 16 and 18 for signal extraction are fixed, and a pedestal 20 on which the light-receiving element chip 12 is mounted and fixed. It is composed of a cap 22 that hermetically seals the side, and the cap 22
A transparent window 24 is attached to the portion through which the light-receiving optical axis passes through. Light emitted from the output end of an optical fiber (not shown), or light emitted from the output end of the optical fiber that is collimated by another lens (not shown), is focused by the lens 26 and incident on the light receiving surface of the light receiving element chip 12. It has become. The reason why the received light is focused by the lens in this way is to increase the light receiving efficiency.Also, as shown in Figure 7, the light receiving spot is made sufficiently small compared to the light receiving area of the light receiving surface. This is to prevent the light receiving efficiency from decreasing due to mechanical fluctuations.
発明が解決しようとする課題
従来の受光素子部品の構造であると、受光素子チップの
受光面が入射光軸に対して垂直に配置されているので、
受光面についての入射光軸及び反射光軸が一致し、反射
光が再び光フアイバ中に導入されてしまう。光伝送路に
おいてこのような反射帰還光が生じると、特に送信側光
源が半導体レーザである場合に、そのレーザ発振状態が
影響を受け、伝送品質が劣化することがある。Problems to be Solved by the Invention In the structure of conventional light-receiving element components, the light-receiving surface of the light-receiving element chip is arranged perpendicular to the incident optical axis.
The incident optical axis and the reflected optical axis of the light-receiving surface coincide, and the reflected light is introduced into the optical fiber again. When such reflected feedback light occurs in the optical transmission path, the laser oscillation state may be affected and the transmission quality may deteriorate, especially when the transmitting side light source is a semiconductor laser.
そこで、本発明は送信側への反射帰還光が生じるおそれ
がない受光素子部品の提供を目的としている。Therefore, an object of the present invention is to provide a light-receiving element component that is free from the possibility of reflected light returning to the transmitting side.
又、従来の構成であると、レンズを用いることにより、
受光面におけるビーム系が受光系と比較して小さくなる
ようにしているので、原理的には高い受光効率を得るこ
とができるものの、外部からの機械的衝撃等により光軸
ずれを起こした場合、つまり、受光面における照射ビー
ムと受光面との相対的な位置関係が経時的に又は突発的
に変化した場合、これを確認することができないという
不都合があった。例えば、製造当初受光面の中央部にあ
った受光ビームが機械的変動により受光面の縁部に移動
した場合、受光効率の変動は認められないが、新たな機
械的変動等に対して信頼性が著しく低下する。Also, in the conventional configuration, by using a lens,
Since the beam system at the light receiving surface is made smaller than the light receiving system, in principle it is possible to obtain high light receiving efficiency, but if the optical axis is misaligned due to external mechanical shock, etc. In other words, if the relative positional relationship between the irradiation beam and the light-receiving surface changes over time or suddenly, there is a problem in that it is impossible to confirm this change. For example, if the light receiving beam that was at the center of the light receiving surface at the time of manufacture moves to the edge of the light receiving surface due to mechanical fluctuations, no change in light receiving efficiency will be observed, but reliability will be affected by new mechanical fluctuations, etc. decreases significantly.
そこで、本発明は光軸に垂直な方向への位置ずれを容易
に確認することができる受光素子部品の提供を目的とし
ている。SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a light-receiving element component that allows easy confirmation of positional deviation in a direction perpendicular to the optical axis.
課題を解決するための手段 第1図は本発明の原理図である。Means to solve problems FIG. 1 is a diagram showing the principle of the present invention.
1は受光すべき光を集束するレンズ、2は受光素子チッ
プ、2aはその受光面であり、受光面2aは、レンズ1
による集束光線束3の光軸4に垂直な面に対して傾斜し
ている。1 is a lens that focuses the light to be received, 2 is a light receiving element chip, 2a is its light receiving surface, and the light receiving surface 2a is the lens 1
is inclined with respect to a plane perpendicular to the optical axis 4 of the focused beam 3.
受光面2aでの反射光線束5の光軸6上には、副受光素
子チップ7が設けられており、副受光素子チップ7の受
光面7aにおける反射光線束5の拡がりは、副受光素子
チップ7の受光領域にほぼ一致するようにされている。A sub light receiving element chip 7 is provided on the optical axis 6 of the reflected light beam 5 on the light receiving surface 2a, and the spread of the reflected light beam 5 on the light receiving surface 7a of the sub light receiving element chip 7 is It is arranged to almost coincide with the light receiving area No. 7.
作 用
本発明の構成によれば、受光素子チップの受光面をレン
ズによる集束光線束の光軸に垂直な面に対して傾斜させ
ているので、受光面での反射光線束の光軸が上記集束光
線束、即ち入射光線束の光軸と一致することがな(、従
って、反射帰還光を抑制しあるいは防止することができ
る。According to the configuration of the present invention, the light-receiving surface of the light-receiving element chip is inclined with respect to a plane perpendicular to the optical axis of the beam of light focused by the lens, so that the optical axis of the beam of light reflected on the light-receiving surface is aligned with the above-mentioned direction. The focused ray bundle, ie the optical axis of the incident ray bundle, does not coincide with the optical axis (therefore, reflected return light can be suppressed or prevented).
又、上記反射光線束の光軸上に副受光素子チッブを設け
、この副受光素子チップの受光面における照射ビーム拡
がりを、副受光素子チップの受光領域とほぼ一致するよ
うにしているので、副受光素子チップの受光レベルの変
動を検出することによって、機械的な衝撃、経時的変形
等に起因する僅かな光軸ずれを確認することができる。In addition, a sub-light receiving element chip is provided on the optical axis of the reflected light beam, and the spread of the irradiation beam on the light receiving surface of this sub-light receiving element chip is made to almost match the light receiving area of the sub-light receiving element chip. By detecting fluctuations in the level of light received by the light receiving element chip, it is possible to confirm slight optical axis deviations caused by mechanical shock, deformation over time, and the like.
実施例 以下本発明の実施例を図面に基づいて説明する。Example Embodiments of the present invention will be described below based on the drawings.
第2図は本発明の実施例を示す受光素子部品の断面図で
ある。32は台座38に固定されたチップマウントであ
り、例えばセラミックスから形成されている。チップマ
ウント32の上部には7字溝が形成されており、この7
字溝の一方の壁面32aにはホトダイオード等の受光素
子チップ34が固着されている。又、7字溝の他方の壁
面32bには受光素子チップ34の受光径よりも小さな
受光径を有する副受光素子チップ36が固着されている
。40.42は台座38から下方に突出する電極端子で
あり、これらは電気的に副受光素子チップ36に接続さ
れている。44.46は同じく台座38から下方に突出
する電極端子であり、これらは受光素子チップ34に電
気的に接続されている。48は受光素子チップ34及び
副受光素子チップ36を密閉封止するためのケースであ
り、このケース48は、例えばバット溶接により台座3
8の縁部に固定されている。50はケース48における
受光光軸貫通部分に設けられた透明窓であり、例えばサ
ファイアから形成されている。FIG. 2 is a sectional view of a light receiving element component showing an embodiment of the present invention. A chip mount 32 is fixed to the base 38 and is made of ceramics, for example. A 7-shaped groove is formed in the upper part of the chip mount 32.
A light receiving element chip 34 such as a photodiode is fixed to one wall surface 32a of the groove. Further, a sub light receiving element chip 36 having a smaller light receiving diameter than the light receiving diameter of the light receiving element chip 34 is fixed to the other wall surface 32b of the 7-shaped groove. Reference numerals 40 and 42 designate electrode terminals protruding downward from the base 38, and these are electrically connected to the sub-light receiving element chip 36. 44 and 46 are electrode terminals that similarly protrude downward from the pedestal 38, and these are electrically connected to the light receiving element chip 34. 48 is a case for hermetically sealing the light receiving element chip 34 and the sub light receiving element chip 36, and this case 48 is attached to the base 3 by, for example, butt welding.
It is fixed to the edge of 8. Reference numeral 50 denotes a transparent window provided in a portion of the case 48 through which the light-receiving optical axis passes, and is made of, for example, sapphire.
第3図は第2図に示される受光素子部品30を用いて構
成される受光モジュールの断面図である。FIG. 3 is a sectional view of a light receiving module constructed using the light receiving element component 30 shown in FIG.
レンズ52はレンズホルダ54に例えば正大固定されて
おり、レンズホルダ54はハウジング56の内部に固定
されている。ハウジング56には挿入孔56aが形成さ
れており、この挿入孔56aに図示しないプラグ側光コ
ネクタのフェルールを装着することによって光結合がな
されるようになっている。受光素子部品30は、そのケ
ース48がレンズホルダ54に当接した状態で台座38
の側からネジ部材58により締めつけることによってハ
ウジング56の内部に固定されている。56bはハウジ
ング56の側面に貫通する孔であり、この孔56bを介
して受光素子部品30の光軸に垂直な面内における位置
の調整を行うことができるようになっている。即ち、受
光素子部品30がネジ部材58及びレンズホルダ54に
対して摺動可能となる程度にネジ部材58を緩め、丸ビ
ンの先端部等を用いることによって、ハウジング56の
外部から受光素子部品30の位置調整を行うことができ
る。The lens 52 is fixed to a lens holder 54, for example, in the correct size, and the lens holder 54 is fixed inside a housing 56. An insertion hole 56a is formed in the housing 56, and optical coupling is achieved by fitting a ferrule of a plug-side optical connector (not shown) into the insertion hole 56a. The light receiving element component 30 is mounted on the pedestal 38 with its case 48 in contact with the lens holder 54.
It is fixed inside the housing 56 by tightening with a screw member 58 from the side. Reference numeral 56b denotes a hole penetrating the side surface of the housing 56, through which the position of the light receiving element component 30 can be adjusted in a plane perpendicular to the optical axis. That is, by loosening the screw member 58 to the extent that the light receiving element part 30 can slide with respect to the screw member 58 and the lens holder 54, and using the tip of a round bottle, etc., the light receiving element part 30 is removed from the outside of the housing 56. The position can be adjusted.
第4図は第2図におけるチップマウント部分の拡大側面
図である。レンズにより集束された光が受光素子チフブ
34により光−電気変換され、更に受光素子チップ34
の受光面にふける反射光が副受光素子チップ36により
光−電気変換されるように各部材を配置している。そし
て、副受光素子チフプ36の受光面に入射する光のビー
ム径が副受光素子チップ36の受光径とほぼ一致するよ
うに焦点位置等が調整されている。尚、第4図及び第1
図においては、受光素子チップの受光面の光伝播方向下
流側に焦点が位置しているように図示されているが、同
上流側に位置するものであっても良い。FIG. 4 is an enlarged side view of the chip mount portion in FIG. 2. The light focused by the lens is converted into electricity by the light-receiving element chip 34, and then the light-receiving element chip 34
Each member is arranged so that the reflected light reflected on the light-receiving surface of the sub-light receiving element chip 36 is photo-electrically converted. The focal position and the like are adjusted so that the beam diameter of the light incident on the light receiving surface of the sub light receiving element chip 36 substantially matches the light receiving diameter of the sub light receiving element chip 36. Furthermore, Figure 4 and Figure 1
In the figure, the focal point is shown to be located on the downstream side of the light-receiving surface of the light-receiving element chip in the light propagation direction, but it may be located on the upstream side.
第4図に示すように受光素子チップ34を配置すること
によって、受光素子チップ34への入射光軸に垂直な面
に対して受光素子チップ34の受光面が適当な角度をも
って傾斜するから、受光面における反射光が再び光伝送
路に導入されるおそれがなくなる。この場合、傾斜角度
が大きすぎると受光素子チップ34による受光感度が低
下し、傾斜角度が小さすぎると反射帰還光の一部が光伝
送路に再び導入されるおそれがあるので、受光素子チッ
プ34の傾斜角度はこれらを考慮して設定することが望
ましい。By arranging the light-receiving element chip 34 as shown in FIG. 4, the light-receiving surface of the light-receiving element chip 34 is inclined at an appropriate angle with respect to the plane perpendicular to the axis of light incident on the light-receiving element chip 34, so that light is not received. There is no possibility that the reflected light from the surface will be introduced into the optical transmission path again. In this case, if the angle of inclination is too large, the light receiving sensitivity of the light receiving element chip 34 will decrease, and if the angle of inclination is too small, there is a risk that a part of the reflected feedback light will be reintroduced into the optical transmission path. It is desirable to set the inclination angle by taking these into consideration.
第5図は、受光素子チップ34及び副受光素子チップ3
6から出力される光電流を測定しておき、第3図に示さ
れる構成において受光素子部品30を光軸に垂直な平面
内における任意の方向に移動させたときの光電流の変化
を示すグラフである。FIG. 5 shows the light receiving element chip 34 and the sub light receiving element chip 3.
6 is a graph showing the change in photocurrent when the photocurrent outputted from 6 is measured and the photodetector component 30 is moved in an arbitrary direction in a plane perpendicular to the optical axis in the configuration shown in FIG. It is.
Aで示されるグラフは受光素子チップ34に対応してお
り、Bで示されるグラフは副受光素子チップ36に対応
している。受光素子チップ34については比較的広い範
囲において一定の光電流が測定されるので、受光素子部
品30の位置ずれを光電流値により確認することはでき
ない。これに対し副受光素子チップ36については、入
射ビームが受光領域とほぼ同一となるようにされている
ので、一定の光電流となる部分がほとんどなく、したが
って、その光電流の測定値の変化によって受光素子部品
の位置ずれを確認することができる。The graph indicated by A corresponds to the light receiving element chip 34, and the graph indicated by B corresponds to the sub light receiving element chip 36. Since a constant photocurrent is measured in a relatively wide range for the light receiving element chip 34, it is not possible to confirm the positional shift of the light receiving element component 30 from the photocurrent value. On the other hand, for the sub-photodetector chip 36, since the incident beam is made to be almost the same as the light-receiving area, there is almost no part where the photocurrent is constant, and therefore, the change in the measured value of the photocurrent Misalignment of the light-receiving element components can be confirmed.
又、副受光素子チップ36における最大光電流が得られ
ているときに丁度受光している光が受光素子チップ34
の受光面の中央部に照射されているようにしておけば、
副受光素子チップ36の光電流が最大となるようにモジ
コール組立時の光軸調整を行うことができる。又、モジ
ュール使用時に機械的変動等により光軸ずれが生じたと
きに、再度容易に光軸調整を行うことができる。Also, the light that is just being received when the maximum photocurrent is obtained in the sub-light receiving element chip 36 is the light receiving element chip 34.
If you make sure that the light is illuminated at the center of the light-receiving surface of the
The optical axis can be adjusted when assembling the module so that the photocurrent of the sub-light receiving element chip 36 is maximized. Furthermore, when optical axis misalignment occurs due to mechanical fluctuations or the like during use of the module, the optical axis can be easily adjusted again.
発明の効果
以上詳述したように、本発明の受光素子部品によれば、
送信側への反射帰還光を防止することができ、又、光軸
に垂直な方向への位置ずれを容易に確認することができ
るようになるという効果を奏する。Effects of the Invention As detailed above, according to the light receiving element component of the present invention,
It is possible to prevent reflected feedback light to the transmitting side, and it is also possible to easily confirm positional deviation in the direction perpendicular to the optical axis.
第1図は本発明の原理図、
第2図は本発明の実施例を示す受光素子部品の断面図、
第3図は第2図に示される受光素子部品を用いて構成さ
れる受光モジニールの断面図、第4図は第2図に示され
る受光素子部品のチップマウント部の拡大側面図、
第5図は光電流と移動量の関係を示すグラフ、第6図及
び第7図は従来技術を示す図である。
1.52・・・レンズ、
2.34・・・受光素子チップ、
7.36・・・副受光素子チップ。Fig. 1 is a diagram of the principle of the present invention, Fig. 2 is a sectional view of a light-receiving element component showing an embodiment of the present invention, and Fig. 3 is a light-receiving module constructed using the light-receiving element part shown in Fig. 2. 4 is an enlarged side view of the chip mount part of the light receiving element component shown in FIG. 2, FIG. 5 is a graph showing the relationship between photocurrent and movement amount, and FIGS. 6 and 7 are conventional techniques. FIG. 1.52... Lens, 2.34... Light receiving element chip, 7.36... Sub light receiving element chip.
Claims (1)
ップ(2)の受光面(2a)に入射させるようにした受
光素子部品において、 上記受光面(2a)を上記レンズ(1)による集束光線
束(3)の光軸(4)に垂直な面に対して傾斜させ、上
記受光面(2a)での反射光線束(5)の光軸(6)上
に副受光素子チップ(7)を設け、 該副受光素子チップ(7)の受光面(7a)における上
記反射光線束(5)の拡がりが上記副受光素子チップ(
7)の受光領域にほぼ一致するようにしたことを特徴と
する受光素子部品。[Scope of Claims] A light-receiving element component in which light to be received is focused by a lens (1) and incident on a light-receiving surface (2a) of a light-receiving element chip (2), wherein the light-receiving surface (2a) is It is tilted with respect to a plane perpendicular to the optical axis (4) of the bundle of rays (3) focused by the lens (1), and a secondary beam is placed on the optical axis (6) of the bundle of rays (5) reflected by the light receiving surface (2a). A light-receiving element chip (7) is provided, and the spread of the reflected light beam (5) on the light-receiving surface (7a) of the sub-light-receiving element chip (7)
7) A light-receiving element component, characterized in that the light-receiving area substantially coincides with the light-receiving area of item 7).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63283816A JPH02130507A (en) | 1988-11-11 | 1988-11-11 | Photodetecting element component |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63283816A JPH02130507A (en) | 1988-11-11 | 1988-11-11 | Photodetecting element component |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02130507A true JPH02130507A (en) | 1990-05-18 |
Family
ID=17670523
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63283816A Pending JPH02130507A (en) | 1988-11-11 | 1988-11-11 | Photodetecting element component |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02130507A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004019417A1 (en) * | 2002-07-12 | 2004-03-04 | Mitsubishi Denki Kabushiki Kaisha | Photoreceptor device module |
-
1988
- 1988-11-11 JP JP63283816A patent/JPH02130507A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004019417A1 (en) * | 2002-07-12 | 2004-03-04 | Mitsubishi Denki Kabushiki Kaisha | Photoreceptor device module |
US7209610B2 (en) | 2002-07-12 | 2007-04-24 | Mitsubishi Denki Kabushiki Kaisha | Photoreceptor device module |
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