JPH02129836U - - Google Patents

Info

Publication number
JPH02129836U
JPH02129836U JP3947089U JP3947089U JPH02129836U JP H02129836 U JPH02129836 U JP H02129836U JP 3947089 U JP3947089 U JP 3947089U JP 3947089 U JP3947089 U JP 3947089U JP H02129836 U JPH02129836 U JP H02129836U
Authority
JP
Japan
Prior art keywords
diaphragm
electrode
capacitance
piezoelectric element
detection sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3947089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3947089U priority Critical patent/JPH02129836U/ja
Publication of JPH02129836U publication Critical patent/JPH02129836U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP3947089U 1989-04-03 1989-04-03 Pending JPH02129836U (US20070167544A1-20070719-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3947089U JPH02129836U (US20070167544A1-20070719-C00007.png) 1989-04-03 1989-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3947089U JPH02129836U (US20070167544A1-20070719-C00007.png) 1989-04-03 1989-04-03

Publications (1)

Publication Number Publication Date
JPH02129836U true JPH02129836U (US20070167544A1-20070719-C00007.png) 1990-10-25

Family

ID=31548404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3947089U Pending JPH02129836U (US20070167544A1-20070719-C00007.png) 1989-04-03 1989-04-03

Country Status (1)

Country Link
JP (1) JPH02129836U (US20070167544A1-20070719-C00007.png)

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