JPH02129533A - Robot for inspecting clean room - Google Patents

Abstract

PURPOSE:To facilitate the traveling of a robot in the case that a machine, etc., is set in a clean room by providing a terminal and a probe. CONSTITUTION:A measuring instrument is mounted in a space for mounting the measuring instrument and data necessary for inspecting filter leak is inputted in a conversational system from a terminal 9 by a user. Next, the robot for inspecting a user clean room is stopped in a fixed range with respect to a dust protective filter. By depressing a start button for inspecting the filter leak from the terminal 9, the robot for inspecting the clean room automatically recognizes the position and the size of the dust protective filter by moving the probe 16 and sensing a filter surface and a filter mounting part so as to perform the inspection of the filter leak. Since the robot for inspecting the clean room is moved by hand, the traveling thereof in the case that the machine is set in the clean room may be facilitated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a clean room inspection robot for inspecting a clean room.

[Conventional technology]

In factories that manufacture precision parts such as semiconductor devices, dust filters are installed on the ceiling to prevent dust and other particles from entering the parts and deteriorating their performance. A clean room is installed in which the entire room is kept at an extremely high level of cleanliness by blowing in air, and precision parts such as those mentioned above are manufactured in this clean room.

However, if pinholes or other small holes occur in the dust filter, the dustproof performance will be significantly reduced, making it impossible to maintain the cleanliness of the entire room.

Therefore, when constructing a clean room or during periodic inspections, an inspection robot is brought into the clean room and the number of particles contained in the air discharged from the dust filter is inspected using the particle counting means of this inspection robot. Ta.

Conventional clean room inspection robots are self-driving types, and are equipped with measuring instruments used for inspections as standard.

In addition, clean room inspection robots use an X-Y table as a manipulator necessary to move the probe.

[Problem to be solved by the invention]

As mentioned above, since the clean room inspection robot is of an automatic traveling type, it is difficult to travel if machines etc. are installed in the clean room, and the fffl is heavy and inconvenient to carry.

In addition, clean room inspection robots are equipped with
Since the measuring instruments used for inspection are included as standard, they are expensive, and the measuring instruments owned by users are wasted.

Further, if the manipulator required to move the probe is an X-Y table, increasing the operating range of the manipulator increases the size of the X-Y table, making it inconvenient for the robot to move. Furthermore, in the case of multi-joint manipulators, the arms are short, the range of motion is narrow, and the manipulators cannot accommodate high ceilings.

Furthermore, with conventional clean room inspection robots, accurate information on the position and size of the filter must be obtained through user teaching or an expensive visual device when performing filter leak inspection.

The present invention has been made in view of the above-mentioned circumstances, and its purpose is to facilitate the running of machines etc. installed in a clean room, and to facilitate the running of machines etc.
One machine can be used, the probe is moved by a manipulator, has a wide range of movement, and can handle high ceilings.In addition, the robot has a wide range of stopping positions for the trolley, making it easy to set the stopping position. It is about providing.

[Means to solve the problem]

In order to achieve the above object, the present invention provides a cart that can be moved by hand, a measuring device installation space provided on the cart and necessary for mounting a measuring device, and a filter surface of a dust filter and a filter mounting space. A probe having a sensor that detects the frame, a manipulator mounted on a trolley to move the probe, a controller mounted on the trolley to control the manipulator, and a controller mounted on the trolley and housed in a measuring device mounting space. The configuration includes an interface for connecting the measuring device and the controller, and a terminal provided on the trolley.

[For production]

A measuring device is mounted on the measuring device mounting space, and the user inputs the data necessary for filter leak inspection in a conversational manner from the terminal.Then, the user moves the clean room inspection robot against the dust filter and performs a certain set of tests. By stopping within the range and pressing the start button for filter leak inspection from the terminal, the clean room inspection robot automatically moves the probe to the position and size of the dust filter and senses the filter surface and filter mounting frame. and perform a filter leak check.

〔Example〕

Embodiments of the present invention will be described below based on the drawings.

Figure 1 shows a clean room inspection robot A according to the present invention.
1 is a trolley, and this trolley 1
A measuring instrument storage section 2, which is a space for mounting a measuring instrument, is provided. This measuring instrument storage part 2 has an opening on the left side and an entrance 3.
A handle 4 for pushing by hand is attached to the upper side of the rear surface of the instrument housing section 2.

In addition, there is a controller 5 on the front of the 11P machine storage compartment 2.
, software 6 and an interface 7 necessary for the controller 5 are installed, and a terminal 9 is mounted on a sloped portion 8 on the front side of the top surface of the measuring instrument storage section 2.

A manipulator 10 is attached to the upper surface of the measuring instrument storage section 2.

This manipulator 10 has a first arm 11, a second arm 12, and a third arm 13, the first arm 11 is connected to a first arm motor 14, and the second arm 12 is connected to a second arm motor 15, respectively. The third arm 13 is driven so that its posture is always maintained perpendicular to the filter surface 19' of the dust-proof filter 19, and the probe 16 and the dust-proof filter surface are attached to the tip of the third arm 13. The upper sensor 17 that detects the filter mounting frame 19 and the surrounding sensor 18 that detects the filter mounting frame 20 are attached.

Further, the base 21 that supports the fA1 arm 11 is configured to be able to rotate by a rotation motor (not shown) in a plane parallel to the filter surface 19'.

The controller 5 controls the movement of the manipulator 10 necessary for the inspection based on data input by the user and information from the measuring device 22.

The terminal 9 also has functions for inputting user data and displaying messages from the inspection robot.

Therefore, the controller 5, interface 7, terminal 9, manipulator 10, upper sensor 17, surrounding sensor 18, and measuring device 22 have a connection relationship as shown in FIG.

Next, the operation will be explained.

(1) The user inputs the data necessary for the filter leak test in a conversational manner from the terminal 9.

(Example 1) (1)-1 Data input method Enter the necessary data for the inspection.

Display 1 ■Display 1 is 1. Choose.

Operation Rolo ■The following display 2 screen will appear.

Display 2 Please press the button before entering the file number again.

■The following display 4 screen will appear.

Display 4 or make changes.

Display 3 ↓ *If you make a mistake in entering the file number, press the date 1, then Fi.
lter Height Height from the floor to the filter surface.

2. Filter C1earance This is the distance from the filter surface to the probe during filter clearance inspection. Please enter 25.

3. Filter 5ize 5hort This is the length of the filter in the short side direction. (Does not include filter frame.

) 4. Filter 5ize Long This is the length of the filter in the long side direction. (Does not include filter frame.) 5. Probe 5peed Scanning speed of the probe.

6.5can Pitch This is the amount of folding of the probe during filter leak inspection.

■Select the data you want to enter or change, and
Enter using the number keys.

Repeat the above steps to enter or change data.

*If you select an item by mistake, press the date again on the spot. The data will be displayed as before.

There are two screens in the evening. Press - again to return to the previous screen.

*If you want to change the value while entering data, please hold your mouth.

Display 7 1. Probe Length This is the length of the probe to be used. (400,800,10
00) 2. Measuring Height-1 Height from the ground to the lowest measurement point during cleanliness measurement.

3. Measuring Height-2 Height from the ground to the second measuring point when measuring cleanliness.

4. Measuring Height-3 Cleanliness 1
ULL Height from the ground to the third measurement point.

5. Measuring Time A total of 11 hours when measuring cleanliness or wind speed.

6.File No.

File N for saving currently displayed data
o.

1 to 5 according to ■■. Please manually generate the data.

■Once you have finished entering the data, save the data. On the screen of display 7, enter item 11116. Select the file number,
Enter the.

■The next screen shown in Display 8 will appear.

Display 8 If you want to change the file number, press the date.

*Up to 99 files can be created.

*The data in the file is all 0 at the time of shipment, so please create the files in order from number 1.

*If you want to create a file with only part of the data changed, you can easily do this by calling up the already created file, changing the data you want to change, and entering a different file number using ■.

*Files are saved by the battery built into the operation/display panel. All files will be lost when the battery is discharged, so be sure to turn off the switch when not in use.

■Return to Display 2 screen. This completes data input and file creation. Press ESC to display 1
You will return to the screen.

Operation Ward Engineering n (1)-2 Cleanliness measurement (C1ean Te5t) ■Select 2 on display 1.

Operation Roro* display 1 r2. Data transmission
nJ calls a file containing the data necessary for inspection or measurement and transfers that file to the main unit.

■The next screen shown in Display 9 will appear.

Display 9 The screen returns to display 9.

*Regardless of whether the cleanliness level is n1 constant or not, if you perform the operations from ■ to ■ once, you can omit the operations from ■ to ■ during the same measurement, other inspections, and CI regular intervals as long as there is no change in the data ■Next, run ESC. Press to return to Display 1 screen and select 3°.

Operation mouth ■The following display 11 screen will appear, so 1. Choose.

Display 11 It will be shown ■Press RUN to execute.

Operation Ward factory entrance *Cleanliness measurement is done at the rear of the trolley, so please
After pressing , immediately move away from the trolley.

(1)-3 Filter leak inspection (Leak Te5
t) ■(1)-2 Perform operations from ■ to ■.

Not limited to this filter leak test, once you perform the operations from ■ to ■, the same test and
Operations from ■ to ■ can be omitted when performing other measurements.

■Next, the screen will return to display 11, so select 2.

Operation Taguchi ■Filter Specify R or L.

Filter R: When the trolley is parked to the left of the dust filter.

Filter L: When the trolley is parked on the right side of the dust filter.

■Next, press RUN to execute the inspection.

*If you want to perform repeated inspections, please perform the operations from ■ to ■.

*If the probe touches the filter frame while scanning the first side, scan in the opposite direction after completing the scan for that side. (1)-4 Wind speed measurement (Wi
nd Te5t)■(1)-2 Perform operations from ■ to ■. This can be omitted if the operation has already been performed and there are no changes to the data.

■Next, the screen will return to display 11, so select 3.

Operation low ■Specify WindR or L.

WindR: When the trolley is parked on the left side of the dust filter.

WindL: When the trolley is parked on the right side of the dust filter.

■Next, press RUN to execute the measurement.

*When performing repeated measurements, please perform operations from ■ to ■.

(2) Next, the user stops the clean room inspection robot within a predetermined range relative to the pest control filter.

That is, to set the position of the trolley 1, as shown in FIG.
9 in the longitudinal direction. Also, align the left end of the trolley 1 with the right end of the dust filter 19.

(3) Next, the user presses the start button for the filter leak test using the terminal 9.

(4) Next, the clean room inspection robot A automatically checks the position and size of the dust filter 19 with the probe 16.
Move the filter surface 19' and filter mounting frame 2.
It is recognized by sensing 0 and then automatically performs a filter leak check.

That is, first, the probe 16 is moved to a reference position PO for exploring the side of the filter mounting frame 20 in the X-axis direction, as shown in FIG. If detected, the probe 16 is moved in the -Y force direction, and as a result, if the surrounding sensor 18 detects the side of the filter mounting frame 20 in the X-axis direction, the position P1 at that time is recorded.

Next, the probe 16 is moved in the -X direction, and when the surrounding sensor 18 detects the side of the filter mounting frame 20 in the Y-axis direction, the probe 16 is moved in the -Y force direction, and the surrounding sensor 18 detects the side of the filter mounting frame 20 in the Y-axis direction. When the side of the frame 20 in the X-axis direction is detected, the position P at that time is recorded.

Next, the probe 16 is moved to a reference point P2 in the X-axis direction, and the position P2 where the side in the X-axis direction exists is detected and recorded in the same manner as the detection of the position P1.

Next, move the probe 16 in the extension direction of positions P, P2, and position P3 of the side in the Y-axis direction that intersects the side in the X-axis direction.
is detected, then the probe 16 is moved to the reference point P4 in the Y-axis direction, and here the probe is moved in the X-axis direction, and the
A position P4 where an axial side exists is detected. moreover,
The probe 16 is moved in the extension direction of positions P3 and P4, and a position P5 of another side in the X-axis direction that intersects the side in the Y-axis direction is detected. With this, the filter mounting frame 2
The direction vector D of the side in the X-axis direction of 0 is set to positions P3 and P5.
It can be determined from the coordinate values of . And i&P,
' From the coordinate values of P3, the actual length g of the filter mounting frame 20 per dust filter 19 in the X-axis direction,
Also, from the coordinate values of positions P3 and P5, the dust filter 19-
The actual length fIY of each filter mounting frame 20 in the Y-axis direction can be determined.

According to the above method, the position and size of the dust filter 19 can be automatically recognized. Furthermore, during filter leakage inspection, the probe 16 moves without touching the dustproof filter 19, so the probe 16 does not come into contact with the dustproof filter 19 and cause the dust attached to the dustproof filter 19 to scatter, allowing accurate filtering. Leak inspection is possible. Further, since the position and size of the dust filter 19 are recognized by the movement of the probe 16, the user only has to stop the cart 1 so that the first moving point PO of the probe 16 is inside the dust filter 19. That is, the range of the stop positions of the trolley l is wide, and the stop positions can be easily set.

〔Effect of the invention〕

As detailed above, the clean room inspection robot according to the present invention includes a manually movable trolley, a space provided on the trolley for mounting a measuring instrument, and a dust-proof filter. a probe having a sensor that detects a filter surface and a filter mounting frame; a manipulator mounted on a trolley for moving the probe;
It is characterized by being equipped with a controller provided on the trolley to control the manipulator, an interface provided on the trolley to connect the controller to a measuring device housed in a measuring device mounting space, and a terminal provided on the trolley. That is.

Therefore, a measuring device is installed in the measuring device mounting space, the user enters the data necessary for filter leak inspection in a conversational manner from the terminal, and then the user moves the clean room inspection robot against the dust filter according to certain criteria. By stopping within the specified range and pressing the start button for filter leak inspection from the terminal, the clean room inspection robot automatically moves the probe to the position and size of the dust filter and senses the filter surface and filter mounting frame. Recognize it by doing so and perform a filter leak check.

In this way, the clean room inspection robot can be moved manually, making it easier to move when machines and the like are installed in the clean room. Furthermore, since the clean room inspection robot has a 31 side machine installation space and an interface on its trolley, the user's own measuring machine can be used.

Additionally, the probe is moved by a manipulator and has a wide range of movement, allowing it to accommodate high ceilings.

Moreover, the user inputs data such as the size of the dust filter, and the probe is equipped with a sensor that detects the filter surface and filter mounting frame, and based on the data, the probe is moved to recognize the position and size of the dust filter. Therefore, the user only has to stop the cart so that the first moving point of the probe is inside the dust filter. That is,
The range of stopping positions of the trolley is wide, making it easy to set the stopping position.

[Brief explanation of drawings]

Fig. 1 is a perspective view of the overall structure of an embodiment of the present invention, Fig. 2 is a perspective view of the probe, Fig. 3 is a perspective view of a clean room and a clean room inspection robot, and Fig. 4 is a system block of the probe control system. Fig. 5 is a plan view showing the relationship between the dustproof filter and the trolley, Fig. 6 is a plan view for explaining the scanning method of the dustproof filter, and Fig. 7 is a plan view for explaining the method for searching the position of the filter mounting frame. It is an explanatory diagram. 1 is a trolley, 2 is a measuring device storage area, 3 is an entrance/exit, 4 is a handle, 5 is a controller, 7 is an interface, 9 is a terminal, 10 is a manipulator, 16 is a probe, 1
7 is an upper sensor, 18 is a surrounding sensor, 19 is a dust filter, and 20 is a filter mounting frame.

Claims (1)

[Claims] A cart that can be moved by hand, a measuring device mounting space provided on the cart necessary for mounting a measuring device, a probe having a sensor that detects the filter surface of the dust filter and the filter mounting frame, and a manipulator mounted on the tower for moving the probe; a controller provided on the trolley for controlling the manipulator; and an interface for connecting the controller to a measuring instrument installed on the trolley and housed in the measuring instrument mounting space; A clean room inspection robot characterized by being equipped with a terminal provided on a trolley.