JPH02129470A - On-off device for vacuum vessel - Google Patents

Abstract

PURPOSE:To prevent wear and damage to a seal part as well as to make a vacuum vessel possible to be sealed up or opened at optional time and pressure by constituting a shielding plate with a shielding door set up with a seal member, closely attached to the vicinity of an opening of the vacuum vessel, and a shielding frame provided with a pressing means in a gap with this shielding door. CONSTITUTION:When a workpiece is carried into a vacuum vessel 1, a cylinder 6 attached to the vicinity of a vacuum vessel opening 2 is operated and a shielding plate 3 is moved in making it after a shielding plate support guide 4. A seal (O-ring) 18 being installed in a shielding door 3b will not come into contact with a sealing surface of the vacuum vessel opening 2 till the shielding plate hits on a stopper 14. After the shielding plate 3 has hit this stopper 14, a spring 16 of a spring housing 19 and a roller 11 of a shielding frame 3a press the shielding door 3b so that the O-ring 18 of the shielding door 3b can be set up in the sealing surface of the vacuum vessel opening 2. With this operation reversely performed, the shielding door 3b is shiftable in the state that the O-ring 18 is separated from the sealing surface, thus the vacuum vessel 1 can be opened without wearing the O-ring 18 to an undue extent.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an opening/closing device for a vacuum container that uses a shielding plate to open and close an opening through which a workpiece is carried in and carried out.

(Prior Art) Conventionally, a linear/traveling method is often used for the opening/closing operation of a shielding plate in an opening/closing device for a vacuum container.

These shielding plates are provided with a sealing portion such as an O-ring, and the shielding plate closes the entrance of the vacuum container to keep the vacuum container in an airtight state.

(Problem to be Solved by the Invention) However, as mentioned above, since the shielding plate is of the linear/traveling type, the O-ring of the sealing part is excessively worn or an unbalanced load is applied when the shielding plate is opened/closed. . For this reason, defects in the sealing portion often occur due to long-term use.

In addition, a separate mechanism for pressing the shielding plate with a predetermined pressure is required in order to seal the inside of the vacuum chamber, and therefore, it is also necessary to adjust this suppression mechanism.

Therefore, in order to solve the above problems, the present invention has a structure that allows the shielding plate to be installed at equal pressure at the opening of the vacuum container, prevents wear and damage to the sealing part, and simplifies the operating structure of the shielding plate. The object of the present invention is to provide an opening/closing device for an inter-page container.

[Structure of the invention]

(Means and Effects for Solving the Problems) In order to achieve the above object, the present invention provides an opening/closing device for opening and closing an opening of a vacuum container into which workpieces are carried in and out by temporarily closing the opening. The vacuum container is composed of a shielding door provided with a sealing member that is brought into close contact with the vacuum vessel, and a shielding frame that is provided with a pressing means and engages between the shielding door and the shielding plate installed in the vacuum container. Provided is an opening/closing device for a vacuum container that is moved by an actuator along a guide.

(Function) When the actuator is driven in the vacuum container opening/closing device configured as described above, the shielding plate moves along the guide and rises until it hits the stopper provided on the guide.
This instant closing plate is the position that closes the opening of the vacuum container. Further, as the cylinder rod rises, a suppressing means, such as a roller provided on the cylinder rod, pushes a slope provided on the shielding plate, so that the shielding plate closes the opening of the vacuum container with a predetermined pressure. When opening the vacuum container opening to carry in a workpiece, the cylinder rod of the actuator is lowered. In other words, the roller provided on the cylinder rod is installed on the shielding plate and moves away from the ramp. Through this action, the aforementioned shielding plate releases the pressure from the state in which the opening of the vacuum vessel was closed at a predetermined pressure. do. Further, as the cylinder rod descends, the shielding plate follows the guide and descends to a position where an opening for carrying the workpiece into the vacuum container is created.

The above operation allows the opening of the vacuum container to be opened and closed smoothly.

(Embodiment) An embodiment of the vacuum container opening/closing device according to the present invention will be described with reference to FIGS. 1 and 2. Reference numeral 2 denotes an opening formed in the vacuum container 1 for carrying in and out a workpiece, and a shielding plate support guide 4 fastened to the vacuum container 1 is installed near the opening 2. This shielding plate support guide 4
A housing 17 connected by a support 5 is installed at the bottom of the housing 17, and this housing 17 is provided with a cylinder 6. Further, a cylinder rod 7 that slides inside the cylinder 6 is connected to a shielding plate 3 that closes off the opening 2. Furthermore, a spring housing 19 is fastened to the lower part of the shielding plate 3 so as to surround the cylinder rod 7.

The shielding plate 3 includes a shielding frame 3a and a guide pin 9 on the shielding frame 3a. It is comprised of a blocking door 3b that is engaged with a guide pin 13. This shielding frame 3a is directly connected to the cylinder rod 7 by a piece 20 and a rod connecting pin 21, and as the cylinder 6 moves, it is attached to the shielding frame 3a in a groove formed in the shielding plate support guide 4. The roller 8 moves up and down accordingly.

In addition, the mutual action of the rollers 11 and 12 provided on the blocking frame 3a and the ramp 15 provided on the blocking door 3b presses the blocking door 3b, and the sealing material disposed on the vacuum container side of the blocking door 3b is pressed. The structure allows the O-ring 18 to be brought into close contact with the vacuum vessel 1.

A roller 1 is attached to the housing 19 which is fastened to the shielding plate 3.
A spring 16 is built in so as to always press 1 in one direction.

Next, the effect will be explained.

When carrying the workpiece into the vacuum container 1, open the vacuum container opening 2.
, actuate the cylinder 6 installed nearby and move the shielding plate 3 along the guide 4 to the shielding plate support to the position where the vacuum chamber cavity 2 opens. Next, place the workpiece in the vacuum chamber 1. Transport using equipment. The subsequent operation of the shielding plate 3 will be explained.

The shielding plate 3 is connected to the vacuum container opening 2. actuating the cylinder 6 and moving the cylinder rod 7 so as to move in the closing direction;
The shielding plate 3 moves via rollers 8 provided on the shielding plate 3 following the grooves of the shielding plate support guide 4 .
It moves until it hits the stopper 14 provided in the.

As described above, the shielding plate 3 is composed of the shielding frame 3a and the shielding i3b, which are connected via the guide pin 9, the spring IO, and the guide pin 13. The blocking door 3-2 is fastened by a guide pin 9 and a spring 10, and the force of the spring 10 always causes the blocking door 3b to move in the direction of the blocking frame 3a. Therefore, until the shielding plate 3 hits the stopper 14, the shielding door 3/lt
The seal (O-ring) 18 provided in [Co., Ltd.] does not contact the vacuum container opening 2 and the sealing surface.

After the shielding plate 3 hits the stopper 14, when input is continued to the cylinder 6, the spring 16 of the spring housing 19 directly connected to the shielding plate 3 and the roller 11 of the shielding frame 3a move to the inclined base 15 of the shielding door 3b. The O-ring 18 of the closing door 3b can be installed on the vacuum vessel opening 2 and the sealing surface with a predetermined pressure by pressing the closing door 3b.

Furthermore, in order to open the opening 2, by performing the above-mentioned operation in reverse, the blocking door 3b can be moved with the O-ring 18 separated from the sealing surface, and the vacuum container can be opened without excessively wearing out the O-ring 18. I can do it.

〔Effect of the invention〕

According to the present invention, the opening and closing of the opening of the vacuum container can be smoothly carried out without wear of the sealing member, and the shielding plate 3 can be sealed and opened at a predetermined pressure in the vacuum container 1. You can.

[Brief explanation of drawings]

FIG. 1(a) is a front view showing an embodiment of a vacuum container opening/closing device according to the present invention, and FIG. 1(b) is a
B sectional view, FIG. 2 is a side sectional view of FIG. 1(a). FIG. 3 is a side sectional view showing the opening state of FIG. 1(a). 1...Vacuum container 3...Blocking plate 3b...Blocking door 6...Cylinder 9.13...Guide bin I4...Stopper 18...0 ring 2...Opening part 3a ...Closing frame 4...Blocking plate support guide 7...Cylinder rod 11.12...Roller 15...Slope 19...Housing agent Patent attorney Nori Chika Ken Yudo Daiko Ken MaruFigure 1Figure 2Figure 3

Claims (1)

[Claims] In an opening/closing device that uses a shielding plate to open and close an opening of a vacuum container into which workpieces are carried in and out, between the shielding door and the shielding door provided with a sealing member that brings the shielding plate into close contact with the vicinity of the opening. 1. An opening/closing device for a vacuum container, comprising: a closing frame which is provided with a pressing means and engages; the closing plate is moved by an actuator along a guide installed in the vacuum container.