JPH02126113U - - Google Patents
Info
- Publication number
- JPH02126113U JPH02126113U JP3517189U JP3517189U JPH02126113U JP H02126113 U JPH02126113 U JP H02126113U JP 3517189 U JP3517189 U JP 3517189U JP 3517189 U JP3517189 U JP 3517189U JP H02126113 U JPH02126113 U JP H02126113U
- Authority
- JP
- Japan
- Prior art keywords
- main body
- outlet
- air
- transport mechanism
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 230000007723 transport mechanism Effects 0.000 claims description 4
- 239000000428 dust Substances 0.000 claims 2
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Liquid Crystal (AREA)
- Cleaning In General (AREA)
Description
図はこの考案の一実施例を示し、第１図は要部
の正面図、第２図は同じく側面図、第３図は全体
の側面図である。
１……本体、２……入口、３……出口、４……
成膜装置（基板処理装置）、５……コンベア（搬
送機構）、６……カート（搬送機構）、９……エ
アノズル、１０……ブローフアン、１４，１５…
…シヤワーノズル、１８……排気口。
The drawings show an embodiment of this invention, with FIG. 1 being a front view of the main parts, FIG. 2 being a side view, and FIG. 3 being a side view of the whole. 1...Body, 2...Inlet, 3...Exit, 4...
Film forming device (substrate processing device), 5... conveyor (transport mechanism), 6... cart (transport mechanism), 9... air nozzle, 10... blow fan, 14, 15...
...Shower nozzle, 18...Exhaust port.
Claims (1)
この本体の出口に接続された基板処理装置と、前
記本体内および前記基板処理装置内に順に基板を
搬送する搬送機構と、前記本体の入口および出口
にエアを噴出してこれら入口および出口にエアカ
ーテンを形成するエアノズルと、前記本体の天井
部分からその下方に向けて層流のエアを送風する
ブローフアンと、前記本体の内側の両側部に設け
られ該本体内に送り込まれた基板の両側の表面に
ダスト除去用の気体を噴射するシヤワーノズルと
、前記本体の下部に設けられた排気口とを具備す
ることを特徴とする基板のダスト除去装置。 a tunnel-like body having an inlet and an outlet;
A substrate processing device connected to the outlet of the main body, a transport mechanism that sequentially transports substrates into the main body and the substrate processing device, and a transport mechanism that blows air to the inlet and outlet of the main body to supply air to these inlets and outlets. an air nozzle that forms a curtain; a blow fan that blows laminar air downward from the ceiling of the main body; A dust removal device for a substrate, comprising: a shower nozzle that injects dust removal gas onto the surface; and an exhaust port provided at the bottom of the main body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3517189U JPH02126113U (en) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3517189U JPH02126113U (en) | 1989-03-28 | 1989-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02126113U true JPH02126113U (en) | 1990-10-17 |
Family
ID=31540296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3517189U Pending JPH02126113U (en) | 1989-03-28 | 1989-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02126113U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006022993A (en) * | 2004-07-07 | 2006-01-26 | Sanki Eng Co Ltd | Foreign matter intrusion prevention facility |
-
1989
- 1989-03-28 JP JP3517189U patent/JPH02126113U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006022993A (en) * | 2004-07-07 | 2006-01-26 | Sanki Eng Co Ltd | Foreign matter intrusion prevention facility |
| JP4637518B2 (en) * | 2004-07-07 | 2011-02-23 | 三機工業株式会社 | Foreign matter intrusion prevention equipment |