JPH02126111U - - Google Patents
Info
- Publication number
- JPH02126111U JPH02126111U JP3454189U JP3454189U JPH02126111U JP H02126111 U JPH02126111 U JP H02126111U JP 3454189 U JP3454189 U JP 3454189U JP 3454189 U JP3454189 U JP 3454189U JP H02126111 U JPH02126111 U JP H02126111U
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- light receiving
- light beam
- optical path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3454189U JPH089697Y2 (ja) | 1989-03-27 | 1989-03-27 | 顕微鏡のオートフオーカス装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3454189U JPH089697Y2 (ja) | 1989-03-27 | 1989-03-27 | 顕微鏡のオートフオーカス装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02126111U true JPH02126111U (fr) | 1990-10-17 |
| JPH089697Y2 JPH089697Y2 (ja) | 1996-03-21 |
Family
ID=31539102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3454189U Expired - Fee Related JPH089697Y2 (ja) | 1989-03-27 | 1989-03-27 | 顕微鏡のオートフオーカス装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH089697Y2 (fr) |
-
1989
- 1989-03-27 JP JP3454189U patent/JPH089697Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH089697Y2 (ja) | 1996-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6220522B2 (fr) | ||
| FI883280A (fi) | Optinen järjestelmä kohteen kaarevuuden muutoksen määrittämiseksi mitoiltaan pienellä alueella | |
| JPH02126111U (fr) | ||
| JPS6123572B2 (fr) | ||
| JPS6331858B2 (fr) | ||
| JPH0397608U (fr) | ||
| JPH0558483B2 (fr) | ||
| JPH0291908U (fr) | ||
| JPH0316630U (fr) | ||
| JPH01154516U (fr) | ||
| JPS61132530U (fr) | ||
| JPH0756444B2 (ja) | 位置検出装置 | |
| JPH0236813U (fr) | ||
| JPH0465615A (ja) | 光学式表面粗さ測定装置 | |
| JPH0654232B2 (ja) | 変位検出装置 | |
| JPH0175209U (fr) | ||
| JPH0552550A (ja) | 距離検出装置 | |
| JPS61178522U (fr) | ||
| JPH01138622A (ja) | 光学ヘッド構造 | |
| JPH0675169A (ja) | レーザ顕微鏡 | |
| JPH01138625A (ja) | 光学ヘッド構造 | |
| JPH02110813U (fr) | ||
| JPS59109009A (ja) | 焦点ずれ検出方法 | |
| JPH02110814U (fr) | ||
| JPS6351308U (fr) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |