JPH02125330U - - Google Patents
Info
- Publication number
- JPH02125330U JPH02125330U JP3307889U JP3307889U JPH02125330U JP H02125330 U JPH02125330 U JP H02125330U JP 3307889 U JP3307889 U JP 3307889U JP 3307889 U JP3307889 U JP 3307889U JP H02125330 U JPH02125330 U JP H02125330U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- plasma
- ashing device
- plasma ashing
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004380 ashing Methods 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989033078U JPH0737314Y2 (ja) | 1989-03-22 | 1989-03-22 | プラズマアッシング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989033078U JPH0737314Y2 (ja) | 1989-03-22 | 1989-03-22 | プラズマアッシング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02125330U true JPH02125330U (es) | 1990-10-16 |
| JPH0737314Y2 JPH0737314Y2 (ja) | 1995-08-23 |
Family
ID=31536447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989033078U Expired - Lifetime JPH0737314Y2 (ja) | 1989-03-22 | 1989-03-22 | プラズマアッシング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737314Y2 (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02188916A (ja) * | 1989-01-17 | 1990-07-25 | Dainippon Screen Mfg Co Ltd | 乾式表面処理装置 |
-
1989
- 1989-03-22 JP JP1989033078U patent/JPH0737314Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02188916A (ja) * | 1989-01-17 | 1990-07-25 | Dainippon Screen Mfg Co Ltd | 乾式表面処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737314Y2 (ja) | 1995-08-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |