JPH02123050U - - Google Patents
Info
- Publication number
- JPH02123050U JPH02123050U JP3119789U JP3119789U JPH02123050U JP H02123050 U JPH02123050 U JP H02123050U JP 3119789 U JP3119789 U JP 3119789U JP 3119789 U JP3119789 U JP 3119789U JP H02123050 U JPH02123050 U JP H02123050U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- window
- ion
- plasma
- plasma generation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 6
- 150000002500 ions Chemical class 0.000 claims 8
- 239000000284 extract Substances 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3119789U JPH0719079Y2 (ja) | 1989-03-17 | 1989-03-17 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3119789U JPH0719079Y2 (ja) | 1989-03-17 | 1989-03-17 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02123050U true JPH02123050U (ru) | 1990-10-09 |
| JPH0719079Y2 JPH0719079Y2 (ja) | 1995-05-01 |
Family
ID=31256884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3119789U Expired - Lifetime JPH0719079Y2 (ja) | 1989-03-17 | 1989-03-17 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719079Y2 (ru) |
-
1989
- 1989-03-17 JP JP3119789U patent/JPH0719079Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719079Y2 (ja) | 1995-05-01 |