JPH02122597U - - Google Patents

Info

Publication number
JPH02122597U
JPH02122597U JP2963689U JP2963689U JPH02122597U JP H02122597 U JPH02122597 U JP H02122597U JP 2963689 U JP2963689 U JP 2963689U JP 2963689 U JP2963689 U JP 2963689U JP H02122597 U JPH02122597 U JP H02122597U
Authority
JP
Japan
Prior art keywords
electrostatic adsorption
electrostatic
power source
adsorption electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2963689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH076718Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2963689U priority Critical patent/JPH076718Y2/ja
Publication of JPH02122597U publication Critical patent/JPH02122597U/ja
Application granted granted Critical
Publication of JPH076718Y2 publication Critical patent/JPH076718Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
JP2963689U 1989-03-15 1989-03-15 静電吸着装置 Expired - Lifetime JPH076718Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2963689U JPH076718Y2 (ja) 1989-03-15 1989-03-15 静電吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2963689U JPH076718Y2 (ja) 1989-03-15 1989-03-15 静電吸着装置

Publications (2)

Publication Number Publication Date
JPH02122597U true JPH02122597U (ko) 1990-10-08
JPH076718Y2 JPH076718Y2 (ja) 1995-02-15

Family

ID=31254017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2963689U Expired - Lifetime JPH076718Y2 (ja) 1989-03-15 1989-03-15 静電吸着装置

Country Status (1)

Country Link
JP (1) JPH076718Y2 (ko)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267864A (ja) * 1993-03-15 1994-09-22 Toshiba Mach Co Ltd 気相成長装置
JP2007150351A (ja) * 2007-02-15 2007-06-14 Toto Ltd 静電チャック
JP2009170509A (ja) * 2008-01-11 2009-07-30 Hitachi High-Technologies Corp ヒータ内蔵静電チャックを備えたプラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06267864A (ja) * 1993-03-15 1994-09-22 Toshiba Mach Co Ltd 気相成長装置
JP2007150351A (ja) * 2007-02-15 2007-06-14 Toto Ltd 静電チャック
JP2009170509A (ja) * 2008-01-11 2009-07-30 Hitachi High-Technologies Corp ヒータ内蔵静電チャックを備えたプラズマ処理装置

Also Published As

Publication number Publication date
JPH076718Y2 (ja) 1995-02-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term