JPH02122318U - - Google Patents
Info
- Publication number
- JPH02122318U JPH02122318U JP3099189U JP3099189U JPH02122318U JP H02122318 U JPH02122318 U JP H02122318U JP 3099189 U JP3099189 U JP 3099189U JP 3099189 U JP3099189 U JP 3099189U JP H02122318 U JPH02122318 U JP H02122318U
- Authority
- JP
- Japan
- Prior art keywords
- patterned film
- substrate
- film
- thickness
- unevenness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003746 surface roughness Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
Landscapes
- Measuring Volume Flow (AREA)
- Laminated Bodies (AREA)
- Manufacturing Of Printed Wiring (AREA)
Description
第１図及至第２図は本考案の実施例を示すもの
で、第１図は基体１の表面に対するパターン膜５
の形成状態を示す拡大断面図であり、第２図は別
の実施例を示す図であり、第３図はアンダーコー
トガラスの表面粗さＳに体する０．１ミクロンの
厚さのパターン膜５の抵抗値と温度抵抗係数の変
化を示す図である。
１……基体、２……凹部、３……凸部、４……
アンダコートガラス、５……パターン膜、６……
スクリーン、７……パターン部、８……スクリー
ン膜。
1 and 2 show an embodiment of the present invention, and FIG. 1 shows a patterned film 5 on the surface of a base 1.
FIG. 2 is a diagram showing another example, and FIG. 3 is a patterned film with a thickness of 0.1 micron corresponding to the surface roughness S of the undercoat glass. 5 is a diagram showing changes in resistance value and temperature resistance coefficient of No. 5. FIG. 1... Base body, 2... Concave portion, 3... Convex portion, 4...
Undercoat glass, 5... pattern film, 6...
Screen, 7...Pattern portion, 8...Screen film.
Claims (1)
凹凸の大きさを示す表面粗さをパターン膜の厚さ
以下としたことを特徴とするパターン膜形成基体
の表面構造。 A surface structure of a patterned film-formed substrate, characterized in that the surface roughness, which indicates the size of unevenness on the surface of the substrate on which the patterned film is formed, is less than or equal to the thickness of the patterned film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3099189U JPH02122318U (en) | 1989-03-17 | 1989-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3099189U JPH02122318U (en) | 1989-03-17 | 1989-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02122318U true JPH02122318U (en) | 1990-10-05 |
Family
ID=31256521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3099189U Pending JPH02122318U (en) | 1989-03-17 | 1989-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02122318U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62224952A (en) * | 1986-03-27 | 1987-10-02 | Toshiba Corp | Heat conductive substrate |
-
1989
- 1989-03-17 JP JP3099189U patent/JPH02122318U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62224952A (en) * | 1986-03-27 | 1987-10-02 | Toshiba Corp | Heat conductive substrate |