JPH0212190U - - Google Patents
Info
- Publication number
- JPH0212190U JPH0212190U JP8886388U JP8886388U JPH0212190U JP H0212190 U JPH0212190 U JP H0212190U JP 8886388 U JP8886388 U JP 8886388U JP 8886388 U JP8886388 U JP 8886388U JP H0212190 U JPH0212190 U JP H0212190U
- Authority
- JP
- Japan
- Prior art keywords
- far
- film
- induction plasma
- copper
- copper film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 3
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8886388U JPH0451437Y2 (de) | 1988-07-04 | 1988-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8886388U JPH0451437Y2 (de) | 1988-07-04 | 1988-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0212190U true JPH0212190U (de) | 1990-01-25 |
| JPH0451437Y2 JPH0451437Y2 (de) | 1992-12-03 |
Family
ID=31313420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8886388U Expired JPH0451437Y2 (de) | 1988-07-04 | 1988-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0451437Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010034058A (ja) * | 2008-07-25 | 2010-02-12 | Qinghua Univ | 面熱源 |
-
1988
- 1988-07-04 JP JP8886388U patent/JPH0451437Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010034058A (ja) * | 2008-07-25 | 2010-02-12 | Qinghua Univ | 面熱源 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0451437Y2 (de) | 1992-12-03 |
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