JPH0212085A - Positioning device - Google Patents

Abstract

PURPOSE:To perform a highly accurate positioning operation at a high speed by providing a rough rotation driving mechanism and a vertically driving mechanism constituted by combining a pulse motor and gears, and fine rotation driving mechanism and a vertically driving mechanism using laminated piezo-electric element. CONSTITUTION:An object to be processed is brought onto a table 1 by suction of a vacuum pump. The positional deviation of the object in its rotating direction is first adjusted with relatively rough accuracy by moving a rotary plate 14 against a roof plate 23 by means of a rough rotation driving mechanism composed of a pulse motor and gears 37, 40, 41, etc. Then the table 1 is positioned by moving the table 1 with relative rough accuracy in the vertical direction against the roof plate 23 by means of a vertically moving mechanism composed of a pulse motor 27 and gears 31, 34, etc. Thereafter, the table 1 is highly accurately positioned in the rotating direction through a plate spring member 63 by giving a command voltage to a laminated piezo-electric element 69. Finally, the table 1 is accurately positioned in the vertical and oblique direction by giving a command voltage to a laminated piezo-electric element for vertical drive and moving the plate spring member 63 in the vertical and oblique directions.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a positioning device for positioning an object to be processed at high speed and with high accuracy in various measuring machines or exposure/printing devices used in semiconductor lithography processes. .

[Prior Art] Conventionally, in various measuring machines or exposure and printing apparatuses used in semiconductor lithography processes, devices for positioning a workpiece (object to be processed) with respect to a certain reference plane have been designed to roll in a rotational direction, an up-down direction, or an inclination direction. A device having a guide and using a pulse motor or the like as a driving source is known. Also,
For the purpose of more accurate positioning, there is a device that uses an elastic body such as a leaf spring as a guide and a laminated piezoelectric element such as a piezo element as a drive source.

[Problem to be solved by the invention] However, according to the above conventional example, in the case of a device using a rolling guide and a pulse motor, (1) highly accurate positioning is not possible due to stick-slip and hysteresis due to rolling friction; (2) Due to guide accuracy, there is no means to correct errors in other components even if they occur. (3) Means to correct even if deviations occur when locked in the direction of movement by the locking mechanism. (4) Since the drive source is a pulse motor or the like, there are drawbacks such as heat generation. Furthermore, when a piezoelectric element such as a piezo element is used, there is a drawback that (5) higher-speed positioning is not possible due to residual vibration of the moving body during piezo drive.

SUMMARY OF THE INVENTION In view of the drawbacks of the prior art, an object of the present invention is to provide a positioning device that can perform positioning with higher precision and at high speed.

[Means for Solving the Problems] In order to achieve the above object, the present invention includes a table to hold and position a processed object, a lifting drive means for vertically moving the table, and a rotating movement for moving the table. Rotation l111! I] A positioning device equipped with a tilting drive means for tilting the table, further comprising a high-precision micro-rotation drive means, the tilting drive means having high precision capable of being displaced also in the vertical direction, After relatively rough positioning by the lifting drive means and the rotation drive means (coarse rotation drive means), the table, the lift drive means and the rotation drive means are integrally rotated with even higher accuracy by the fine rotation drive means and the tilt drive means. ,
It is designed to be raised, lowered and tilted.

As a drive source for the elevation drive means and coarse rotation drive means,
For example, a pulse motor can be used. A laminated piezoelectric element can be used as the driving source for the fine rotation driving means and the tilting driving means, and it is preferable that the guiding means in the driving direction be guided through an elastic body. Further, it is preferable that the driving source measures the driving amount using a displacement detecting means and performs feedback control. In order to further improve accuracy, we have developed a locking mechanism that fixes the results of relatively coarse precision using the lifting drive means and rough rotation drive means, a damper that absorbs the vibration of the laminated piezoelectric element, and an X-axis and y-axis for length measurement. It is preferable to include an interferometer mirror for axis reference. This reference mirror for laser length measurement has a parallel spring structure with an elastic hinge that absorbs deformation in the longitudinal direction, and the height direction position of the optical axis of the reference mirror for length measurement and the height direction of the table top surface are It is preferable that the mirror attachment part and the mirror are made into an integral structure.

It is preferable to use quenched aluminum alloy powder for parts that have a relatively large proportion of the weight of the entire device and require rigidity.

The entire device may be mounted on an XY stage,
This allows for movement between predetermined positions when transferring or processing objects to be processed.

[Operation] In this configuration, the object to be processed (
When a workpiece) is fed onto the table, this device first
The object to be processed is held on the table by vacuum suction or the like.

At this time, the object to be processed is in a prealigned state.

Next, the rough rotation driving means corrects the deviation in the rotational direction of the object to be processed during supply, and the lifting driving means moves the object to a predetermined position in the vertical direction to perform relatively rough positioning.Here, the lifting driving means The lock mechanisms of the coarse rotation drive means and the coarse rotation drive means lock the movement in the vertical direction and the rotation direction. This makes it possible to reduce the voltage applied to the pulse motors of each of the lifting drive means and the rough rotation drive means to zero, thereby reducing the heat generated by the pulse motors.

Further, for example, by applying a command voltage from an external controller to the micro-rotation drive means, the micro-rotation drive means moves in the rotation direction and performs highly accurate positioning in the rotation direction. At this time, based on the movement amount detection result by the displacement detection means, the laminated voltage element
Feedback controlled. Furthermore, highly accurate positioning is similarly performed in the vertical direction and rotational direction by the lifting/lowering driving means.

In this high-precision positioning, other components associated with rolling guide accuracy in coarse positioning and deviations during locking are also corrected, but if the guidance of the fine rotation drive means and the elevation drive means uses an elastic body, Highly accurate correction is performed without causing stick-slip caused by rolling friction or deterioration in positioning accuracy due to hysteresis as in the conventional example. Further, a damper made of vibration damping rubber or the like quickly absorbs the residual vibration of the driven body caused by the laminated piezoelectric element, so that positioning can be performed in a shorter time than conventionally.

[Example] Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 1 is a partially cutaway perspective view showing the exterior and interior of a positioning device according to an embodiment of the present invention.

In the figure, 1 is a table for chucking a workpiece (object to be processed), and 2 is a support plate for supporting the table 1. Reference numeral 3 indicates a positioning bin for positioning the table 1, and 4 indicates a rotation regulation bin for regulating displacement of the table 1 in the rotational direction, and each is fixed to the support plate 2 with screws or press-fit caps.

Figure 2 shows a longitudinal section of the table 1 and the support plate 2.
Reference numeral 5 in the figure represents a groove provided in the table 1, which communicates with a groove 7 in the support plate 2 through a hole 6.

The grooves 5 and 7 may be shaped like a lattice or concentric circles, and if they are concentric, a groove (not shown) connecting the multiple grooves is provided. A conduit 8 is provided in the support plate 2 and communicates with the groove 7 through a hole 9.

Returning to FIG. 1, reference numeral 10 denotes an inner cylinder constituting a ball bush guide that guides the table 1 in the vertical direction, and the support plate 2
It is screwed to (not shown). 11 is a steel ball of the ball bushing guide, 12 is a retainer for holding the steel ball 11, and 13 is an outer cylinder constituting the ball bushing guide.

The outer cylinder 13 is screwed to the rotating plate 14 (not shown).

15 is a feed screw for raising and lowering the support plate 2, and is in contact with the support plate 2 via a steel ball 16.

17 is a nut, 18 is a nut fixing plate for fixing the nut 17, the nut fixing plate 17 is screwed to the outer cylinder 13 (not shown), and 19 is an upper side constituting an axial guide for rotational direction guidance. Transfer plane, rotating plate 1
It is fixed at 4.

20 is a steel ball, 21 is a retainer that holds the steel ball 20, and 22 is a lower transfer surface that constitutes an axial guide for rotational direction guidance. The lower transfer surface 22 is fixed to the top plate 23. 24 is a ball bearing, which is fixed to the top plate 23 by a shaft 25 and a holding member 26. The ball bearings 24 are provided on the top plate 23 at positions where the side surface of the upper transfer surface 19 is equally divided into three in the circumferential direction, and regulate the radial direction of the upper transfer surface 19. However, in FIG. 1, one ball bearing 24 is not shown.

One of the three ball bearings 24 is pressed against the side surface of the upper transfer surface 19 with a constant force by, for example, a tension coil spring (not shown). 27 is a pulse motor, for example, and the mounting plate 2
It is fixed at 8. The mounting plate 28 is fixed to the rotating plate 14 via legs 29. 30 is a gear fixed to the output shaft of the pulse motor 27. 31 is an intermediate gear that meshes with the pulley 30, and is fixed to a shaft 33 supported by a bearing 32 provided on the mounting plate 28. A gear 34 is fixed to the lower end of the feed screw 15, and rotates at an appropriate reduction ratio relative to the rotation speed of the pulse motor 27 via a gear 30 and an intermediate gear 31. A plurality of tension coil springs (not shown) are provided between a member fixed to the inner cylinder 10, such as the support plate 2, and a member fixed to the outer cylinder, such as the nut fixing plate 18. A downward force is always applied to the plate 2. Further, a rotation stopper (not shown) is provided to prevent relative rotational deviation between the support plate 2 and the rotary plate 14. 35 is a gear head, and 36 is a mounting plate for fixing the gear head 35. The mounting plate 36 is fixed to the rotating plate 14. 37 is a gear fixed to the human power shaft (not shown) of the gear head 35;
It is driven by a pulse motor (not shown in FIG. 1) fixed to the mounting plate 36. 38 is gear head 35
The other end is supported by a bearing 39 provided on the rotary plate 14. 40 is a gear fixed to the support member 38, and 41 is an internal gear fixed to the top plate 23 so as to mesh with the gear. For example, a tension coil spring (not shown) is provided between the lower transfer surface 22 and the rotating plate 14 in order to apply a preload to the rotating plate 14 in the direction of rotation.

FIG. 3 is a perspective view showing a vertical locking mechanism section not shown in FIG. 1, cut away.

In the same figure, 42 is a lock plate fixed to the support plate 2, and the rotary plate 1 passes through a hole 43 provided in the rotary plate 14.
It protrudes to the bottom of 4. 44 is a suction member for suctioning the lock plate 42; 45 is a lock plate 42 of the suction member 44;
46 is a piping joint fixed to the suction member 44. A hole (not shown) for fixing the piping joint 46 communicates with the trench 45.

A tube 47 has one end connected to the piping joint 46 and the other end connected to an external vacuum pump (not shown). Reference numeral 48 denotes a leaf spring that holds the suction member 44, and its both ends are attached to the holding plate 5 against the suction member 44 and the support member 49, respectively.
It is fixed by a bolt 51 via the bolt 51. Support member 49
is fixed to the rotating plate 14. The third part of such a configuration
The locking mechanism shown in the figure is provided at two positions facing each other with respect to the center of rotation.

FIG. 4 is a cutaway perspective view of a locking mechanism in the rotational direction that is not shown in FIG. 1.

In the figure, 52 is a lock base fixed to the lower transfer surface 22, 53 is a piping joint fixed to the lock base 52, and 55 is a lock base fixed to the lower transfer surface 22.
is a hole provided in the upper surface 54 of the lock stand 52. The hole for fixing the piping joint 53 communicates with the hole 55. 56 is a tube connected to the piping joint 53 and an external vacuum pump (not shown). 57 is a suction member for suctioning the lock stand S2, and 58 is a groove provided on the side facing the upper surface 54 of the lock stand 52. Hole 55 is drilled 5
Located within the range of 8. Reference numeral 59 denotes a leaf spring that holds the suction member 57, and both ends thereof are fixed to the suction member 57 and the support member 60 by bolts 62 via a presser plate 61, respectively. The support member 60 is fixed to the rotating plate 14.

The locking mechanism shown in FIG. 4 having such a configuration is provided at two positions facing each other with respect to the center of rotation.

In this embodiment, a photoswitch (not shown) is further provided, and the stroke end and intermediate position in the vertical direction and rotational direction can be detected.

Referring again to FIG. 1, reference numeral 63 is a leaf spring member, which is provided with grooves 64 penetrating in the thickness direction at equal positions in the circumferential direction, and radial grooves 64 at equal positions in the circumferential direction. A plate spring portion 65 is formed. 66 is an actuator holder, one end of which is connected to the groove 6 of the leaf spring member 63 by a bolt 67.
4, and the other end is fixed to the inner side of the groove 64 of the old leaf spring part 63 by a bolt 68.

69 is a laminated piezoelectric element, and actuator holder 66
It is incorporated with an appropriate seam allowance. Reference numeral 70 denotes a damper material such as vibration damping rubber, which is pressed against the end surface of the actuator holder 66 by a pressing member 72 that is fixed to the leaf spring member 63 with a bolt 71. 73 is a leaf spring for fixing the leaf spring member 63, one end is fixed to the outer part of the groove 64 of the leaf spring member 63, and the other end is fixed to the fixing plate 75 via the spacer flap 4. . The leaf springs 73 are arranged at three positions approximately equally divided into three in the circumferential direction of the leaf spring member 63. Flo is an actuator holder and is fixed to a fixing plate 75.

FIG. 5 is a longitudinal sectional view of the actuator holder 76 portion. 77 is a laminated piezoelectric element that acts as an actuator holder, one end of which has a spacer 78 adhered thereto and is connected to the actuator holder 76 by a bolt 79.
is fixed.

A hinge member 80 is bonded to the other end of the piezoelectric element 77, and the piezoelectric element 77 is fixed to the actuator holder 76 with a bolt 81 via the hinge member 80. Actuator holder 76 is connected to leaf spring member 63 by pin 82 . Here, the amount of horizontal displacement of the laminated piezoelectric element 77 is
is vertically transformed by the hinge 84, and is expanded by the ratio of the distance between the hinge 83 and the hinge 84 and the distance between the hinge 84 and the bin 82. Actuator holder 76
Similar to the leaf spring 73, the leaf spring members 63 are arranged at three positions approximately equally divided into three in the circumferential direction of the leaf spring member 63.

Reference numeral 85 in FIG. 1 is a damper stand, which is fixed to the fixed plate 75.

FIG. 6 is a sectional view of the damper stand 85 portion.

Reference numeral 86 denotes a damper material such as damping rubber, which is pressed against the leaf spring member 63 via a presser plate 87 by an adjustment screw 88 attached to the damper stand 85 .

Referring again to FIG. 1, the top plate 23 is fixed to the inner side of the groove 64 of the leaf spring member 63 via a spacer (not shown). Reference numeral 89 is an eddy current type non-contact displacement meter which is a means for measuring displacement in the vertical direction and inclination direction, for example,
It is attached to a holder 90 fixed to the top plate 23, and the tip, which is a sensor part, is arranged so as to face a part that does not move in the inclination direction, for example, the upper surface of the actuator holder 76, with an appropriate gap, and
They are placed in three locations corresponding to the

FIG. 7 shows a sectional view of, for example, a differential transformer mounting portion, which is a rotational displacement measuring means not shown in FIG. In the same figure, 91 is a coil of a differential transformer, and the groove 6 of the leaf spring member 63 is held by the holder 92.
It is fixed to the outer part of 4. Reference numeral 93 is the core of the differential transformer, and the plate spring member 6 is connected to the core by the bar 94 and the mounting base 95.
It is fixed to the inner part of the groove 64 of No. 3.

In FIG. 1, 96 is an X@ reference interferometer mirror, and 97 is a y-axis reference interferometer mirror, each of which is fixed to the upper surface of the top plate 23. FIG. 8 is a longitudinal sectional view of the fixing portions of the X-glaze reference interferometer mirror 96 and the Y-axis reference interferometer mirror 97 to the top plate 23.

In the figure, 98 is a fixing base for fixing the interferometer mirrors 96 and 97 to the top plate 23, 99 is an abutting piece fitted to the fixing base 98, and 100 is an abutting piece for fixing the interferometer mirrors 96 and 97 to the interferometer mirror 96 and the abutting piece 99. The spring 101 biasing against the spring 97 is a spring retainer for the spring 100. The spring presser 101 is a fixed base 98
is fixed. 102 is an interferometer mirror 96 and 9
7 from above, one end is fixed to a fixed base 98, and the other end is attached to interferometer mirrors 96 and 97.
is pressed against the top surface of the 103 is an adjustment piece for adjusting the positions of interferometer mirrors 96 and 97, and 104 is an adjustment screw thereof. Here, the adjustment piece 10 is adjusted by the adjustment screw 104.
By elastically deforming the hinge portion 3, the X-axis reference interferometer mirror 96 and the Y-axis reference interferometer mirror 97 can be held with appropriate pressing force. Furthermore, the heightwise position of the workpiece 107 (table 1) in FIG. 2 and the heightwise position of the optical axis of the interferometer mirrors 96 and 97 match. FIG. 9 shows the recessed part of the fixing base 98 on the top plate 23 as seen from above. Reference numeral 105 in the figure is a hinge for forming a parallel spring, so that the fixed part 106 can be attached to the X-axis reference interferometer mirror 96 or the y@reference interferometer mirror 9.
It is possible to move a small amount in parallel in the longitudinal direction of 7.

Next, the operation of this device will be explained.

In the above configuration, when a workpiece 107 that has been prealigned by, for example, an O-i-hand is supplied onto the table 1 from the outside, the conduit 8 provided on the support plate 2 in FIG.
The workpiece 107 is attracted onto the table 1 by, for example, a vacuum pump connected to the table 1 . Next, the pulse motor (not shown), the gear 37 in FIG. 1, the gear head 35, and the support member 3
8. The rotary plate 14 is moved in the rotational direction relative to the top plate 23 by a rough rotation drive means including the gear 4o, the internal gear 41, etc., and the positional deviation in the rotational direction when the workpiece 107 is supplied is relatively coarse. A pulse motor 27 for zero-order correction with precision;
The table 1 is moved with relatively rough accuracy in the vertical direction relative to the top plate 23 by a lifting drive means including a gear 30, an intermediate gear 31, a gear 34, a nut 17, a feed screw 15, etc.
Positioning is performed at a predetermined position by operating, for example, a vacuum pump connected to the tube 47 in the vertical locking mechanism shown in FIG.
The adsorption members 44 sandwich the lock plate 42 from both sides and lock the vertical movement of the table 1. Also, in the locking mechanism in the rotational direction shown in FIG. 4, the tube 56e
The suction member 57 is suctioned to the upper surface 54 of the lock stand 52 by a connected vacuum pump, for example, and the rotation direction of the rotary plate 14 is 51! Lock J. Therefore, the movement of the table 1 relative to the top plate 23 is thereby locked.

At this time, the currents of the pulse motors of the rotary drive system and the lifting drive system are cut off or reduced.

Next, by applying a command voltage from an external controller to the laminated piezoelectric element 69 shown in FIG. , and performs highly accurate positioning of the table 1 in the rotational direction. At this time, the amount of movement of the inner portion of the groove 64 of the leaf spring member 63 is detected by a differential transformer consisting of a coil 91 and a core 93 shown in FIG. 7, and the laminated piezoelectric element 69 provides feedback based on this detected value. Controlled by control.

Next, by applying a command voltage from an external controller to the laminated piezoelectric element 77 shown in FIG.
3 in the vertical direction and in the inclination direction relative to the fixed plate 75 using the leaf spring 73 as a guide, thereby positioning the table 1 with high precision in the up-down direction and in the inclination direction. At this time, the amount of movement of the leaf spring member 63 is the first
It is detected by the eddy current type non-contact displacement meter 89 shown in the figure, and the laminated piezoelectric element 77 is controlled by feedback control based on this detected value.

When reducing the weight of devices, aluminum alloys and ceramics are generally used as structural materials. However, aluminum alloys lack rigidity, ceramics are unsuitable for complex shapes, and tap hole machining requires some ingenuity. Therefore, on the Kinomi style side, for example, the top plate 23,
Rapidly solidified aluminum powder alloy is used for members such as the leaf spring member 63 and the rotating plate 14, which have a relatively large weight ratio with respect to the entire device and require rigidity. For example, this material has a Young's modulus of 1000 kgf/m@'', which is larger than a general aluminum alloy, and a linear expansion coefficient of tsxto-'/°C, which is close to that of steel. Weight reduction is achieved while minimizing deformation caused by differences in linear expansion coefficients.

FIG. 10 is a sectional view showing another example of the lifting/lowering drive mechanism of the apparatus shown in FIG. 1. In the figure, 108 is a pressure receiving member slidably fitted into a cylinder portion 109 provided in the inner cylinder 10, 110 is a piston wood, and 111 is a pressure receiving member whose upper end is sandwiched between the piston rod 110 and the pressure receiving member 108. The bellofram 112 fixed thereto is a holding member that holds and fixes the lower end of the bellofram 111 between it and the inner cylinder 10. The piston rod 110 also has a presser member 112
It is engraved and slidably fitted.

113 is a presser screw for fixing the presser member i12, and 114 is a support plate 2 for supplying compressed fluid to the upper surface of the pressure receiving member 108.
This is a conduit installed in the

In the above configuration, when compressed fluid is supplied into the pipe line 114, the pressure receiving member 108 tries to move downward due to the pressure.
．． - Relatively, the inner cylinder 10 and the support plate 2 move upward until the flange portion of the piston rod 110 abuts against the holding member 112. Thereafter, the feed screw 15 is rotated by a pulse motor (not shown), and the inner cylinder 10 and the support plate 2 are moved upward eight times to a predetermined position. In this way, by dividing the necessary stroke into a range where accuracy is required and a range where accuracy is not required, the positioning time can be shortened.

[Modifications of Embodiments] In general, the present invention is not limited to the above embodiments, and can be implemented with appropriate modifications.

For example, the lifting drive mechanism or rotary drive mechanism using a combination of a pulse motor and gears in the apparatus shown in FIG. 1 may be replaced by a belt drive system using a pulse motor, a pulley, and a belt.

1. The locking mechanism shown in FIGS. 3 and 4 uses a vacuum suction system, but what about the suction members 44 and 57?
It may be adsorbed by magnetic force as a t 1ift stone, or it may be mechanically clamped using an air cylinder or the like.

Furthermore, in FIG. 1, an X-axis reference interferometer mirror 96 and a Y-axis reference interferometer mirror 97 are mounted on the top plate 23, but instead of these, for example, two
The side surface may be a mirror surface, and the top plate and mirror may be integrally constructed. At this time, when the top plate is made of ceramic to reduce weight, the side surfaces to be made into mirror surfaces can be made into mirror surfaces by applying, for example, chemical nickel plating and wrapping with a plating layer. In this way, by forming the top plate and the mirror into an integral structure, deformation caused by attaching the mirror can be eliminated, and adjustment of orthogonality can also be made unnecessary.

[Effects of the Invention] As explained above, according to the present invention, the following effects can be obtained.

(1) Coarse rotation drive means and elevation drive means that perform relatively coarse positioning using a pulse motor etc. as a drive source, and fine rotation drive means and elevation drive that perform relatively precise positioning using a laminated piezoelectric element etc. as a drive source. Because of the configuration having the means, high-speed and highly accurate positioning is possible.

(2) Highly accurate positioning is possible by using a fine rotation drive means using a laminated piezoelectric element as a drive source, the lifting WJ, and the guide means using leaf springs to avoid hysteresis due to frictional force.

(3) The fine movement section using the laminated piezoelectric element as a drive source has a displacement detection means, and by using this configuration to perform feedback control, highly accurate positioning is possible.

(4) The fine movement section using the laminated piezoelectric element as a drive source has a damper made of vibration damping rubber, for example, so that the damping ability is improved and the positioning time can be shortened.

(5) The lifting drive means and rough rotation drive means that use a pulse motor as a drive source have lock mechanisms in the vertical direction and rotation direction, so that the voltage applied to the pulse motor can be set to zero after rough positioning is completed. This makes it possible to reduce the heat generated by the pulse motor.

(6) By fixing the fixing part of the mirror for laser length measurement via a parallel spring structure with an elastic hinge that can be deformed in the longitudinal direction of the mirror, the difference in thermal expansion due to the difference in material between the mirror and the mirror fixing part can be reduced. Since it can be absorbed, it becomes possible to absorb deformation due to bimetal.

(7) The position of the optical axis of the laser length measurement mirror in the height direction,
By configuring the position of the table top surface in the height direction to match, it becomes possible to perform measurement without an error, and to perform highly accurate positioning.

(8) By integrating the laser length measurement mirror and its mounting, deformation caused by mounting the mirror can be eliminated, and there is no need to adjust orthogonality, improving measurement accuracy and ease of assembly work. improvement can be achieved.

(9) By incorporating, for example, an air cylinder into the elevating drive means using a pulse motor or the like as a drive source, the elevating drive means can be structured to have two types of drive means: coarse movement and fine movement, thereby reducing the positioning time. A further reduction in can be achieved.

(10) With the structure shown in FIG. 1, a thin positioning device can be obtained.

(11) By using a rapidly solidified aluminum powder alloy for the structural member, weight reduction can be achieved while maintaining rigidity and reducing deformation caused by differences in linear expansion coefficients.

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway perspective view showing the exterior and interior of a positioning device according to an embodiment of the present invention, FIG. 2 is a partially detailed sectional view of the device shown in FIG. 1, and FIG. FIG. 4 is a cutaway perspective view showing the locking mechanism part in the vertical direction of the device shown in FIG. 1; FIG. 5 is a perspective view showing the locking mechanism part in the rotational direction of the device shown in FIG. FIG. 6 is a vertical cross-sectional view of the damper in the tilt direction of the device shown in FIG. 1, and FIG. 7 is a longitudinal cross-sectional view of the device shown in FIG. FIG. 8 is a vertical cross-sectional view of the mirror fixing part of the device shown in FIG. 1; FIG. 9 is a shape explanatory diagram of the mirror fixing part of the device shown in FIG. 1;
FIG. 10 is a longitudinal cross-sectional view showing an elevation driving means according to another embodiment of the present invention. 1: Table, 10: Inner cylinder, 11: Steel ball, : Cage, 13: Outer cylinder, 14: Rotating plate, : Feed screw, 1
7: Nut, Upper transfer surface, 20: Steel ball, : Cage, 22; Lower transfer surface, : Top plate, 24: Ball bearing, : Pulse motor, 42: Lock plate, : Adsorption member, 48: Plate Spring, two-lock stand, 57: Adsorption member, : Leaf spring, 63: Leaf spring member, : Radial leaf spring part, 69: Laminated piezoelectric element, : Damper material,
73: Leaf spring, : Fixed plate, 77: Laminated piezoelectric element, : Damper material, : Eddy current type non-contact displacement meter, 91: Coil, : Core, 96
: x-axis reference interferometer mirror = y-axis reference interferometer mirror 105: hinge, 107: workpiece, 108: pressure receiving member, 11o: piston rond, 111:
Bellofram. Patent applicant Canon Co., Ltd.

Claims (13)

[Claims] (1) A table to hold and position the object to be processed, a lifting drive means for vertically moving the table with relatively rough precision, and a rough rotation drive means for rotationally moving the table with relatively rough precision. , a fine rotation drive means for integrally rotating the table, the elevation drive means and the coarse rotation drive means with relatively high precision; and a fine rotation drive means for integrally rotating the table, the elevation drive means and the coarse rotation drive means with relatively high precision 1. A positioning device comprising: a tilting drive means for tilting and raising/lowering the positioning device. (2) The fine rotation drive means and the tilt drive means include a laminated piezoelectric element, whereby the table, the elevation drive means, and the coarse rotation drive means are integrally rotated, tilted, and raised with relatively high precision. The positioning device according to item 1. (3) The positioning device according to claim 1, wherein the fine rotation drive means and the tilt drive means have guide means for guiding each drive direction via an elastic body. (4) The positioning device according to claim 1, wherein the elevating and lowering drive means and the rough rotation drive means each include a locking mechanism that fixes movement in the vertical direction and rotational direction. (5) Claim 1, wherein the fine rotation drive means and the tilt drive means each include a displacement measurement means for measuring the amount of drive.
The positioning device described. (6) The positioning device according to claim 1, wherein the fine rotation drive means and the tilt drive means each include a damper in the drive direction. (7) The fine rotation driving means and the tilting driving means are provided with a reference mirror for laser length measurement on the member that is finely moved by them, and the optical axis of the laser irradiated onto the reference mirror is aligned with the height position of the top surface of the table. 2. The positioning device according to claim 1. (8) The fine rotation driving means and the tilting driving means are provided with a reference mirror for laser length measurement on a member that is finely moved by them, and the reference mirror for laser length measurement has an elastic hinge that absorbs deformation in the longitudinal direction. The positioning device according to claim 1, wherein the positioning device is provided on the member via. (9) The positioning device according to claim 1, which is mounted on an XY stage. (10) The positioning device according to claim 1, wherein quenched aluminum powder alloy is used in required portions. (11) The elevating drive means and the rough rotation drive means are equipped with a pulse motor as a drive source and a locking mechanism for fixing movement in the vertical direction and rotational direction, and after positioning the table, the locking mechanism locks the table. 2. The positioning device according to claim 1, wherein the voltage applied to each pulse motor is reduced or cut off for all phases. (12) The fine rotation driving means has an elastic body that guides the movable member relative to the fixed member, and a displacement measuring means that detects the relative position between the movable member and the fixed member, and the detection value of the displacement measuring means The positioning device according to claim 1, wherein the positioning device performs position feedback based on. (13) The positioning according to claim 1, wherein the fine rotation drive means has a reference mirror for laser length measurement on the member that is finely moved by the fine rotation drive means, and feedback control is performed by angle measurement using the reference mirror. Device.