JPH02119042A - Discharge lamp - Google Patents
Discharge lampInfo
- Publication number
- JPH02119042A JPH02119042A JP1232828A JP23282889A JPH02119042A JP H02119042 A JPH02119042 A JP H02119042A JP 1232828 A JP1232828 A JP 1232828A JP 23282889 A JP23282889 A JP 23282889A JP H02119042 A JPH02119042 A JP H02119042A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- coil
- discharge lamp
- glass tube
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 claims abstract description 16
- 239000011521 glass Substances 0.000 abstract description 21
- 229910000679 solder Inorganic materials 0.000 abstract description 6
- 238000005476 soldering Methods 0.000 abstract description 4
- 238000004804 winding Methods 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract 1
- 238000009434 installation Methods 0.000 abstract 1
- 239000003822 epoxy resin Substances 0.000 description 6
- 229920000647 polyepoxide Polymers 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
本発明は露光装置の光源として用いられる放電灯に関す
るものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a discharge lamp used as a light source of an exposure apparatus.
集積回路やカラー受像管の製造において、微細なパター
ン加工を光学的に行なうが、このとき使用さ九る露光装
置の光源としては安定に発光する放電灯が、例えば水冷
構造のもとで用いられる。In the manufacture of integrated circuits and color picture tubes, fine pattern processing is performed optically, and the light source of the exposure equipment used at this time is a discharge lamp that emits stable light, for example under a water-cooled structure. .
第１図は露光装置に用いられる従来の発光装置の一例の
平面断面図、第２図は第１図のｍｌ −ＩＩ断面図であ
る６図において、１はランプハウス台で。FIG. 1 is a plan sectional view of an example of a conventional light emitting device used in an exposure apparatus, and FIG. 2 is a ml-II sectional view of FIG. 1. In FIG. 6, 1 is a lamp house stand.
ガイドピン２ａ、２ｂ、２ｃによって位置決めされ、固
定部３ａ、３ｂを締めつけることにより基台上にセツテ
ィングされる。ランプハウス台１には、上面から凹んで
円孤状の管収容部１ａ、その両端の電極収容部１ｂ、ｌ
ｃおよび電極収容部１ｂ、ｌｃから斜め下方に貫通して
入路１ｄ、出路１ｅがそれぞれ形成され、さらに入路１
ｄ、出路１ｅの各開口端には流入管４ａ、流出管４ｂが
それぞれ接合されている。また、ランプハウス台１の下
面からは先端が電極収容部１ｂ、ｌｃ内に配置されるよ
うに電力供給端子５ａ、５ｂがねじ込まれ、気密性を保
持するためにエポキシレジンで固定されている。放電部
が円孤状に形成された放電灯は、ガラス、セラミック等
からなる透明絶縁管（以下ガラス管という）とその両端
に固定されたステム７ａ、７ｂからなり、ステム７ａ、
７ｂをロケータ９に固定された取付板８ａ、８ｂにはん
だ付けして固定することによりロケータ９に取付けられ
る。ロケータ９は両端にピン孔１０ａ。It is positioned by the guide pins 2a, 2b, 2c, and set on the base by tightening the fixing parts 3a, 3b. The lamp house stand 1 includes a circular arc-shaped tube housing part 1a recessed from the top surface, and electrode housing parts 1b and l at both ends of the tube housing part 1a.
An inlet path 1d and an outlet path 1e are formed diagonally downward from the electrode accommodating portions 1b and lc, and an inlet path 1d and an outlet path 1e are formed, respectively.
d, an inflow pipe 4a and an outflow pipe 4b are connected to each open end of the outlet path 1e. Further, power supply terminals 5a and 5b are screwed into the lower surface of the lamp house stand 1 so that their tips are disposed within the electrode accommodating portions 1b and lc, and are fixed with epoxy resin to maintain airtightness. A discharge lamp whose discharge part is formed in the shape of a circular arc consists of a transparent insulating tube (hereinafter referred to as a glass tube) made of glass, ceramic, etc. and stems 7a and 7b fixed to both ends of the tube.
7b is attached to the locator 9 by soldering and fixing it to the attachment plates 8a and 8b fixed to the locator 9. The locator 9 has pin holes 10a at both ends.
１０ｂを有し、ランプハウス台１の上面に植設されたガ
イドピンｌｌａ、ｌｌｂにピン孔１０ａ。10b, and pin holes 10a in guide pins lla and llb planted on the upper surface of the lamp house stand 1.
１０ｂをはめ込むことにより、ロケータ９はランプハウ
ス台１上に正しく位置決めして取付けられる。このとき
、ガラス管６．ステム７ａ、７ｂは管収容部１ａ、電極
収容部１ｂ、ｌｃ内にそれぞれ収容される。また、１２
ａ、１２ｂはリード線で、一端は取付板８ａ、８ｂには
んだ付けされ。10b, the locator 9 is correctly positioned and mounted on the lamp house base 1. At this time, the glass tube 6. The stems 7a and 7b are accommodated in the tube accommodating portion 1a and the electrode accommodating portions 1b and lc, respectively. Also, 12
A and 12b are lead wires, one end of which is soldered to the mounting plates 8a and 8b.
他端は止めねじ１３ａ、１３ｂによって電力供給端子５
ａ、５ｂにねじ止めされている。The other end is connected to the power supply terminal 5 by means of set screws 13a and 13b.
It is screwed to a and 5b.
一方ランプハウス台１の上面にはガラスからなるフェー
スプレート１４、およびフェースプレート１４上に開口
Ｌ５ａを有する蓋１５が設けられ、蓋１５はＯリング１
６ａ、１６ｂを介してランプハウス台１に圧接されてい
る。したがって、管収容部１ａ、電極収容部１ｂ、ｌｃ
は気密に保持される。On the other hand, a face plate 14 made of glass is provided on the upper surface of the lamp house base 1, and a lid 15 having an opening L5a on the face plate 14 is provided.
It is pressed into contact with the lamp house stand 1 via 6a and 16b. Therefore, the tube accommodating part 1a, the electrode accommodating part 1b, lc
is kept airtight.
このような構成で、流入管４ａから冷却水を流入させる
と、矢印に示すように、水は入路１ｄ。With such a configuration, when cooling water is allowed to flow in from the inflow pipe 4a, the water flows through the inlet path 1d as shown by the arrow.
電極収容部１ｂ、管収容部１ａ、電極収容部１ｃ。Electrode accommodating part 1b, tube accommodating part 1a, electrode accommodating part 1c.
出路１ｅを経て流出管４ｂから流出される。この水によ
って放電灯は水冷される。そして、′ｉｔｔ力供給端子
５ａ、５ｂを電源に接続するとガラス管６の中心部は発
光し、この光はフェースプレート１４、開口１５ａを経
て放射される。It flows out from the outflow pipe 4b via the outlet path 1e. This water cools the discharge lamp. When the power supply terminals 5a and 5b are connected to a power source, the center of the glass tube 6 emits light, and this light is emitted through the face plate 14 and the opening 15a.
この場合、ステムは放電灯の電極に接続されているので
高電圧部分が水中に露出するという問題がある。In this case, since the stem is connected to the electrodes of the discharge lamp, there is a problem that the high voltage part is exposed in the water.
第３図は前述したような装置に用いられる放電灯の電極
部の断面図である。ガラス管６の先端の電極部には水銀
１８が収容され、さらにこの水銀１８の面から管内に先
端部が突き出した例えばタングステン等からなる電極１
９が封着されている。FIG. 3 is a sectional view of an electrode portion of a discharge lamp used in the above-described device. Mercury 18 is housed in an electrode portion at the tip of the glass tube 6, and an electrode 1 made of, for example, tungsten, has a tip protruding from the surface of the mercury 18 into the tube.
9 is sealed.
電極１９の他方の端はガラス管６の外に引出され。The other end of the electrode 19 is drawn out of the glass tube 6.
この部分で外部引出導体、この例では裸導線のリード１
ｉＡ２０と溶接のような手段で接合されている。At this part, the external lead conductor, in this example, lead 1 of the bare conductor.
It is joined to iA20 by means such as welding.
ガラス管６の外周面には電極１９とリード１ｉＡ２０の
溶接部分を覆うようにステム７ａ（７ｂ）がかぶされ、
その間にはエポキシレジン２１が充填され互いに固定さ
れている。そして、ステム７ａ（７ｂ）の端には封止金
属２２がはめ込まれ、さらに、ステム７ａ （７ｂ）と
リード線２０の間がはんだ２３によって接続されている
。A stem 7a (7b) is placed over the outer peripheral surface of the glass tube 6 so as to cover the welded portion between the electrode 19 and the lead 1iA20.
The space between them is filled with epoxy resin 21 and fixed to each other. A sealing metal 22 is fitted into the end of the stem 7a (7b), and further, the stem 7a (7b) and the lead wire 20 are connected by solder 23.
このように従来の放電灯においては、ガラス管に封着さ
れた電極と外部引出導体とは溶接のような手段で接合さ
れるため、材質的な点からも溶接外れ等の発生があり、
両者の接合の信頼性が低いという問題があった。As described above, in conventional discharge lamps, the electrodes sealed in the glass tube and the external lead conductor are joined by means such as welding, so there is a risk of welding coming off due to the material.
There was a problem in that the reliability of the bond between the two was low.
本発明はこのような従来の問題を解決するために考えら
れたもので、その目的とするところは、電極と外部引出
導体との接合の信頼性の極めて高い放電灯を提供するこ
とにある。The present invention was devised to solve these conventional problems, and its purpose is to provide a discharge lamp in which the connection between the electrode and the external lead conductor is extremely reliable.
このような目的を達成するために、本発明は、電極と外
部引出導体との接合部からガラス管の端部に亘ってその
周囲にコイルを配置固定したものである。In order to achieve such an object, the present invention has a coil arranged and fixed around the glass tube from the joint between the electrode and the external conductor to the end of the glass tube.
以下１本発明を実施例にもとすいて詳細に説明する。The present invention will be described in detail below using examples.
第４図は本発明に係る放電灯の一実施例の要部断面図で
、第３図と同一部分には同一符号を付しである。図にお
いて、２５は外部引出導体で、その先端部２５ａは電極
１９の外方突出部１９ａと接合部２６で溶接接合されて
いる。２７は電極１９と先端部２５ａの接合部２６の外
周面上からガラス管６の先端部の外周面上に亘って弾力
でがん合した補強用のコイルで、このコイル２７は図示
の如く装着後に半田２８によりコイル２７の巻線相互間
を半田接合し、コイル２７が一体の剛体を呈する構成と
なっている。しかも前記コイル２７の巻線相互の半田付
け（半田上げという）により、接合部自体にも半田が流
入し、電極と外部引出導体との接合を強化する効果もあ
る。この配置及び構成とすることにより、接合部の信頼
性が向上する。２９は所定の長さに形成されたシリコン
ゴムからなる絶縁チューブで、この絶縁チューブ２９は
前記コイル２７を囲繞すると共に、一端はガラス管６の
外周面に強くがん合しており、他端は外部引出導体２５
の延在部分２５ｂと対向してこれを囲続している。そし
て、絶縁チューブ２９の内側には、ガラス管６の先端部
、電極１９の外方突出部１９ａ、外部引出導体２５の先
端部２５ａ。FIG. 4 is a sectional view of a main part of an embodiment of the discharge lamp according to the present invention, and the same parts as in FIG. 3 are given the same reference numerals. In the figure, reference numeral 25 denotes an external lead-out conductor, the tip end 25a of which is welded to the outward protrusion 19a of the electrode 19 at a joint 26. Reference numeral 27 denotes a reinforcing coil that is elastically pressed together from the outer circumferential surface of the joint 26 between the electrode 19 and the tip 25a to the outer circumferential surface of the tip of the glass tube 6. This coil 27 is attached as shown in the figure. Later, the windings of the coil 27 are soldered together using solder 28, so that the coil 27 becomes an integral rigid body. Moreover, by soldering the windings of the coil 27 to each other (referred to as soldering), the solder flows into the joint itself, which has the effect of strengthening the joint between the electrode and the external conductor. This arrangement and configuration improves the reliability of the joint. Reference numeral 29 denotes an insulating tube made of silicone rubber formed to a predetermined length. This insulating tube 29 surrounds the coil 27, and has one end firmly attached to the outer peripheral surface of the glass tube 6, and the other end. is external lead conductor 25
The extension portion 25b faces and surrounds the extended portion 25b. Inside the insulating tube 29 are the tip of the glass tube 6, the outward protrusion 19a of the electrode 19, and the tip 25a of the external conductor 25.
接合部２６を埋めるようにエポキシレジン３０が充填さ
れ、また、ステム７ａ（７ｂ）と絶縁チューブ２９との
間隙にも同じくエポキシレジン３１が充填されている。Epoxy resin 30 is filled so as to fill the joint portion 26, and the gap between the stem 7a (7b) and the insulating tube 29 is also filled with epoxy resin 31.
３２はコイルで、このコイル３２はステム７ａ （７ｂ
）とガラス管６とを接合しており、しかも前述のコイル
２７と同様に半田上げされている。なお、３３はシール
材である。32 is a coil, and this coil 32 is attached to the stem 7a (7b
) is joined to the glass tube 6, and is soldered in the same way as the coil 27 described above. Note that 33 is a sealing material.
このような構造の放電灯では、ステム自身は電極から絶
縁され、しかも外部引出導体と電極の接合部等は、絶縁
チューブで覆われ、さらにエポキシレジン等が内部に充
填されており、したがって。In a discharge lamp with such a structure, the stem itself is insulated from the electrodes, and the joints between the external conductor and the electrodes are covered with an insulating tube, and the inside is filled with epoxy resin, etc.
放電灯を水中に配置しても絶縁不良を起こしたりするよ
うなことはなくなることは勿論のこと、本発明に係る放
電灯では、電極と外部引出導体との接合部からガラス管
の端部に亘ってその周囲にコイルを配置し、このコイル
が一体の剛体として作用する構成としたことにより、前
記接合部の接合の信頼性を確保できる優れた放電灯を可
能にしたものである。Of course, even if the discharge lamp is placed in water, there will be no insulation failure, and in the discharge lamp according to the present invention, there is no possibility of insulation failure from occurring from the joint between the electrode and the external lead conductor to the end of the glass tube. By arranging a coil around the discharge lamp and configuring the coil to act as an integral rigid body, an excellent discharge lamp that can ensure the reliability of the joint at the joint portion is made possible.
なお、上述の実施例ではコイル２７を接合部２６からガ
ラス管６の端部に亘って連続して囲続して配設したが、
接合部のみ、あるいはガラス管の端部から電極の外方突
出部迄をそれぞれ単独にあるいは組合せて囲続する構成
としても良いことは勿論である。In addition, in the above-mentioned embodiment, the coil 27 was disposed in a continuous manner extending from the joint part 26 to the end of the glass tube 6.
Of course, it is also possible to surround only the joint, or from the end of the glass tube to the outward protrusion of the electrode, either singly or in combination.
このように、本発明に係る放電灯によると、電極と外部
引出導体との接合の信頼性が確保できるという優れた特
徴を有するものである。As described above, the discharge lamp according to the present invention has an excellent feature that the reliability of the connection between the electrode and the external conductor can be ensured.
第１図は発光装置の平面断面図、第２図は第１図の■−
■断面図、第３図は従来の放電灯の断面図、第４図は本
発明に係る放電灯の一実施例の断面図である。
６・・・ガラス管、７ａ、７ｂ・・・ステム、１８・・
・水銀、１９・・・電極、１９ａ・・・外方突出部、２
５・・・外部引出導体、２５ａ・・・先端部、２５ｂ・
・・延在部分、２６・・・接合部、２７・・・コイル、
２８・・・半田、２９・・・絶縁チューブ、３０．３１
・・・エポキシレジン、３２・・・コイル、３３・・・
シール材。Figure 1 is a plan cross-sectional view of the light emitting device, and Figure 2 is the - of Figure 1.
(2) Cross-sectional view, FIG. 3 is a cross-sectional view of a conventional discharge lamp, and FIG. 4 is a cross-sectional view of an embodiment of a discharge lamp according to the present invention. 6...Glass tube, 7a, 7b...Stem, 18...
・Mercury, 19... Electrode, 19a... Outward protrusion, 2
5... External drawer conductor, 25a... Tip part, 25b.
...extension part, 26...joint part, 27...coil,
28...Solder, 29...Insulating tube, 30.31
...Epoxy resin, 32...Coil, 33...
sealing material.
Claims (1)
出するようにそれぞれ電極を封着し、この電極の外方突
出部に外部引出導体の一端部を接合し、この接合部から
前記透明絶縁管の端部に亘ってその周囲にコイルを配置
固定したことを特徴とする放電灯。1. Seal electrodes on both ends of a transparent insulating tube so that one end is inside the tube and the other end projects outward, and one end of an external lead conductor is joined to the outwardly protruding part of this electrode. A discharge lamp characterized in that a coil is arranged and fixed around the end of the transparent insulating tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1232828A JPH02119042A (en) | 1989-09-11 | 1989-09-11 | Discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1232828A JPH02119042A (en) | 1989-09-11 | 1989-09-11 | Discharge lamp |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13588880A Division JPS5763758A (en) | 1980-10-01 | 1980-10-01 | Discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02119042A true JPH02119042A (en) | 1990-05-07 |
| JPH03739B2 JPH03739B2 (en) | 1991-01-08 |
Family
ID=16945423
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1232828A Granted JPH02119042A (en) | 1989-09-11 | 1989-09-11 | Discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02119042A (en) |
-
1989
- 1989-09-11 JP JP1232828A patent/JPH02119042A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03739B2 (en) | 1991-01-08 |
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