JPH02118935U - - Google Patents

Info

Publication number
JPH02118935U
JPH02118935U JP2797489U JP2797489U JPH02118935U JP H02118935 U JPH02118935 U JP H02118935U JP 2797489 U JP2797489 U JP 2797489U JP 2797489 U JP2797489 U JP 2797489U JP H02118935 U JPH02118935 U JP H02118935U
Authority
JP
Japan
Prior art keywords
wafer carrier
wafer
mounting table
carrier mounting
carriers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2797489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2797489U priority Critical patent/JPH02118935U/ja
Publication of JPH02118935U publication Critical patent/JPH02118935U/ja
Pending legal-status Critical Current

Links

JP2797489U 1989-03-09 1989-03-09 Pending JPH02118935U (US07579456-20090825-P00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2797489U JPH02118935U (US07579456-20090825-P00002.png) 1989-03-09 1989-03-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2797489U JPH02118935U (US07579456-20090825-P00002.png) 1989-03-09 1989-03-09

Publications (1)

Publication Number Publication Date
JPH02118935U true JPH02118935U (US07579456-20090825-P00002.png) 1990-09-25

Family

ID=31250942

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2797489U Pending JPH02118935U (US07579456-20090825-P00002.png) 1989-03-09 1989-03-09

Country Status (1)

Country Link
JP (1) JPH02118935U (US07579456-20090825-P00002.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155107A (ja) * 1984-12-28 1986-07-14 Mitsubishi Electric Corp 基板収納装置
JPS62121112A (ja) * 1985-11-18 1987-06-02 Teru Saamuko Kk 保管装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61155107A (ja) * 1984-12-28 1986-07-14 Mitsubishi Electric Corp 基板収納装置
JPS62121112A (ja) * 1985-11-18 1987-06-02 Teru Saamuko Kk 保管装置

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