JPH02118935U - - Google Patents
Info
- Publication number
- JPH02118935U JPH02118935U JP2797489U JP2797489U JPH02118935U JP H02118935 U JPH02118935 U JP H02118935U JP 2797489 U JP2797489 U JP 2797489U JP 2797489 U JP2797489 U JP 2797489U JP H02118935 U JPH02118935 U JP H02118935U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- wafer
- mounting table
- carrier mounting
- carriers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000969 carrier Substances 0.000 claims 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Description
第１図は本考案に係るウエハキヤリアの保管装
置の実施例を示す正面図、第２図は第１図のＸ−
Ｘ線断面図、第３図は第１図の要部の拡大断面図
、第４図は第１図の他の要部（ウエハキヤリア載
置台）の平面図、第５図は第４図の一部切欠側面
図である。
１……収納部、１５……受台、２……ウエハキ
ヤリア載置台、Ｃ……ウエハキヤリア。
FIG. 1 is a front view showing an embodiment of the wafer carrier storage device according to the present invention, and FIG.
3 is an enlarged sectional view of the main part of Fig. 1, Fig. 4 is a plan view of the other main part (wafer carrier mounting table) of Fig. 1, and Fig. 5 is an enlarged sectional view of the main part of Fig. 1. It is a partially cutaway side view. 1... Storage section, 15... pedestal, 2... wafer carrier mounting stand, C... wafer carrier.
Claims (1)
能なウエハキヤリア載置台と、このウエハキヤリ
ア載置台を収納する収納部とからなり、収納部は
ウエハキヤリア載置台を載せる受台を一定方向へ
一定角度毎に回転自在に立体的に支持してなるウ
エハキヤリアの保管装置。 It consists of a wafer carrier mounting table on which multiple wafer carriers can be placed in parallel, and a storage section that stores the wafer carrier mounting table. A storage device for wafer carriers that supports each wafer carrier three-dimensionally so that it can rotate freely.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797489U JPH02118935U (en) | 1989-03-09 | 1989-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2797489U JPH02118935U (en) | 1989-03-09 | 1989-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118935U true JPH02118935U (en) | 1990-09-25 |
Family
ID=31250942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2797489U Pending JPH02118935U (en) | 1989-03-09 | 1989-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118935U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61155107A (en) * | 1984-12-28 | 1986-07-14 | Mitsubishi Electric Corp | Substrate containing apparatus |
| JPS62121112A (en) * | 1985-11-18 | 1987-06-02 | Teru Saamuko Kk | Storage device |
-
1989
- 1989-03-09 JP JP2797489U patent/JPH02118935U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61155107A (en) * | 1984-12-28 | 1986-07-14 | Mitsubishi Electric Corp | Substrate containing apparatus |
| JPS62121112A (en) * | 1985-11-18 | 1987-06-02 | Teru Saamuko Kk | Storage device |