JPH02118751U - - Google Patents

Info

Publication number
JPH02118751U
JPH02118751U JP2701789U JP2701789U JPH02118751U JP H02118751 U JPH02118751 U JP H02118751U JP 2701789 U JP2701789 U JP 2701789U JP 2701789 U JP2701789 U JP 2701789U JP H02118751 U JPH02118751 U JP H02118751U
Authority
JP
Japan
Prior art keywords
target
yoke
face
contact
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2701789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0734923Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989027017U priority Critical patent/JPH0734923Y2/ja
Publication of JPH02118751U publication Critical patent/JPH02118751U/ja
Application granted granted Critical
Publication of JPH0734923Y2 publication Critical patent/JPH0734923Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1989027017U 1989-03-09 1989-03-09 マグネトロンスパッタ装置 Expired - Lifetime JPH0734923Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989027017U JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989027017U JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Publications (2)

Publication Number Publication Date
JPH02118751U true JPH02118751U (US07345094-20080318-C00003.png) 1990-09-25
JPH0734923Y2 JPH0734923Y2 (ja) 1995-08-09

Family

ID=31249160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989027017U Expired - Lifetime JPH0734923Y2 (ja) 1989-03-09 1989-03-09 マグネトロンスパッタ装置

Country Status (1)

Country Link
JP (1) JPH0734923Y2 (US07345094-20080318-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112739848A (zh) * 2018-09-27 2021-04-30 株式会社爱发科 磁控管溅射装置用磁铁单元

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917896U (ja) * 1982-07-27 1984-02-03 三菱重工業株式会社 高速増殖炉の炉心構成要素
JPS6338576A (ja) * 1986-08-01 1988-02-19 Anelva Corp スパツタリング装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917896U (ja) * 1982-07-27 1984-02-03 三菱重工業株式会社 高速増殖炉の炉心構成要素
JPS6338576A (ja) * 1986-08-01 1988-02-19 Anelva Corp スパツタリング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112739848A (zh) * 2018-09-27 2021-04-30 株式会社爱发科 磁控管溅射装置用磁铁单元

Also Published As

Publication number Publication date
JPH0734923Y2 (ja) 1995-08-09

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