JPH02118277U - - Google Patents
Info
- Publication number
- JPH02118277U JPH02118277U JP2620089U JP2620089U JPH02118277U JP H02118277 U JPH02118277 U JP H02118277U JP 2620089 U JP2620089 U JP 2620089U JP 2620089 U JP2620089 U JP 2620089U JP H02118277 U JPH02118277 U JP H02118277U
- Authority
- JP
- Japan
- Prior art keywords
- detection element
- test head
- position detection
- integrated circuit
- respect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2620089U JPH02118277U (me) | 1989-03-08 | 1989-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2620089U JPH02118277U (me) | 1989-03-08 | 1989-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02118277U true JPH02118277U (me) | 1990-09-21 |
Family
ID=31247612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2620089U Pending JPH02118277U (me) | 1989-03-08 | 1989-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02118277U (me) |
-
1989
- 1989-03-08 JP JP2620089U patent/JPH02118277U/ja active Pending
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