JPH02117857U - - Google Patents
Info
- Publication number
- JPH02117857U JPH02117857U JP2495689U JP2495689U JPH02117857U JP H02117857 U JPH02117857 U JP H02117857U JP 2495689 U JP2495689 U JP 2495689U JP 2495689 U JP2495689 U JP 2495689U JP H02117857 U JPH02117857 U JP H02117857U
- Authority
- JP
- Japan
- Prior art keywords
- polished
- holder according
- template
- protective member
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims 5
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 2
- 238000005299 abrasion Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495689U JPH02117857U (enExample) | 1989-03-03 | 1989-03-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495689U JPH02117857U (enExample) | 1989-03-03 | 1989-03-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02117857U true JPH02117857U (enExample) | 1990-09-20 |
Family
ID=31245254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2495689U Pending JPH02117857U (enExample) | 1989-03-03 | 1989-03-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02117857U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010036283A (ja) * | 2008-08-01 | 2010-02-18 | Tokyo Seimitsu Co Ltd | ウェーハ研磨装置におけるリテーナリング精度維持機構 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
-
1989
- 1989-03-03 JP JP2495689U patent/JPH02117857U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61209877A (ja) * | 1985-03-14 | 1986-09-18 | Nitto Hatsujo:Kk | ラツピングキヤリア |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010036283A (ja) * | 2008-08-01 | 2010-02-18 | Tokyo Seimitsu Co Ltd | ウェーハ研磨装置におけるリテーナリング精度維持機構 |
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