JPH0211766A - Construction of heating roll, which heats and conveys long material under vacuum and inner part thereof is the air atmosphere - Google Patents

Abstract

PURPOSE:To obtain a roll having perfect sealing by integratedly assembling both ends of a cylindrical roll barrel part and disk type roll end face members with sealing faces alternately arranging triangle shaped projections to each facing face through metal-made gasket. CONSTITUTION:The disk type roll end face members 2, 4 are integratedly assembled with both ends of the cylindrical roll barrel part 3 and roll shafts 1, 7 are fitted and a heater 6 is arranged in the space 5 of the barrel part, to obtain the heating roll, which heats and conveys a long material under vacuum and is the air atmosphere in the inner part thereof. In the above roll construction, the barrel part 3 and the end face member 2 are integratedly assembled through annular metal-made gasket 14. Further, the projections 13a-13c having the triangle shape at the tip part and parallel arranging to the outer circumference of the barrel part, are arranged to the facing faces of the barrel part 3 and the end face member 2 so as to alternately shift at least by one piece at one side and two pieces at the other side. By sandwiching the gasket 14 from front and back thereof with the tip parts of the projections 13a..., the sealing is formed. By this method, the sealing is perfectly executed and the roll having little deterioration even in many heat cycles, is obtd.

Description

[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a heating roll structure whose interior is at atmospheric pressure for heating and conveying a long object in a vacuum. Tightening of the intervening sealing gasket is a matter of structural improvement.

<Prior Art> Techniques for forming thin films on various materials by vapor deposition or ion blating to modify their surfaces have been extremely widely used in recent years. For example, other types of ceramic coating on glass surfaces, TiN, TiC on drills, bits, etc.
Typical examples include coating and zinc deposition on steel sheets.

These techniques are based on processing in a vacuum, and the adhesion with the film is improved by heating the substrate to a predetermined temperature before vapor deposition. As shown in the above example of zinc evaporation, it has recently become possible to continuously evaporate long objects such as metal strips in a vacuum, so long objects can be transported in a vacuum and adhere to the coating. In order to improve properties, it is necessary to maintain the temperature at a predetermined temperature higher than room temperature.

To do this, a roll (herein referred to as a heating roll) that rotates in a vacuum at a predetermined temperature above room temperature must be installed in the vacuum apparatus. Usually, the structure of the heating roll used is as shown in FIG. In FIG. 2, 1 is one roll shaft, the end of which is brought out to the atmosphere by a means called a Wilson seal or a vacuum seal using a rubber O-ring, and is held by a hair ring.

The structure of the Wilson seal will be explained based on FIG.

In FIG.
extends into the vacuum chamber through the wall 19 of the vacuum chamber. The gap between the vacuum chamber 19 and the shaft 15 is sealed by a rubber gasket 18 that is disc-shaped and has a circular hole in the center that is slightly smaller than the diameter of the shaft. The rubber gasket 8 is held down by a gasket holder 17, and the gasket holder 17 is further fixed from the outside with a jig 16. With this structure, vacuum sealing up to about 10-6 Torr is possible.

In FIG. 2, 7 is the other roll shaft, which is exposed to the atmosphere through the same vacuum sealing means as described above. 2 and 4 are roll end members, each having a disk shape. 3 is a cylindrical roll body, and the roll end member 2.4 and the roll body 3 are a continuous body. 6 is a heater built into the roll body.

8, 9, and 10 are sliding rings made of graphite or the like, and are connected to a non-rotating pipe 11 and a heating roll shaft 1.
．． It is inserted between 7. A lead wire is introduced from the pipe 11 and a heater 6 is installed inside the roll body 3.
Connect to. Note that the atmosphere enters the space 5 in the roll body 3 through the gap between the heating roll shaft 7 and the pipe 11. The pipe 11 and the heater 6 are supported by the pipe 11 in a non-rotating manner, and the roll shafts 1, 7. The roll end pieces 2 and 4 and the roll body 3 rotate in a vacuum.

The reason why the inside of the roll is kept in the atmosphere is that if the atmosphere is introduced into the inside of the roll, heat conduction is good and the temperature of the roll surface increases quickly. If the inside of the roll is in a vacuum, the temperature of the roll body 3 is increased only by radiation from the heater, and therefore it takes an extremely long time to reach a predetermined temperature. Note that the heater 6 will break if operated for a long period of time, so it will be necessary to replace it as appropriate.In this case, the structure should be such that the roll end face member 2.4 and the roll body 3 shown in FIG. 2 can be removed. This makes it possible to separate the end members 2, 4 and the body 3 and replace the internal heater.

Figure 4 shows the roll end member 2 (same as 4) and the roll body 3.
The details of the structure that can be separated from the In FIG. 4, 2 is a roll end member, and 3 is a roll body. Reference numeral 12 denotes a groove in which a metal gasket 14 is inserted, which is formed in the roll end face member, and the gasket 14 placed in the groove 12 is pressed by a protrusion 13 formed in the roll body 3 and having a triangular cross-sectional tip. ing. This pressing force is generally obtained by tightening bolts in the A-8' direction and sealing between the roll end member 2 and the roll body 3. When the heater 6 is broken, the bolt is removed, the roll end member 2 and the roll body 3 are separated, the roll shaft 1.7 is pulled out, and the attached heater 6 is replaced.

The conventional method for tightening the metal gasket 14 is the sixth method.
The means shown in Figures (a) to (a) are also used.

FIG. 6(a) shows a means called a conflat (I CF flange), in which a copper gasket 4 is sandwiched between the facing surfaces of the end face member 2 and the roll body 3, and the gasket is secured by asymmetrical knives 13a and 13b. 14 is compressed volumetrically to improve sealing performance.

FIG. 6(b) shows a means called a step type.

of the surface where the end face member 2 with a step and the roll body 3 face each other.
Sandwiching the copper gasket 14 in between, step 13a+1
3b applies shearing force to the gasket 14 for sealing.

FIG. 6(c) shows a means called a knife type.

A copper gasket 4 is sandwiched between the facing surfaces of the end member 2 and the roll body 3, and the knife edge 13a13b is inserted into the gasket 14 for sealing, which can be said to be a similar method to (a) (Physical Engineering Experiment 4 Vacuum Technology) ; University of Tokyo Press, 1976).

In these methods, sealing is performed using knife edges or corners, but since there is only one point of contact with the gasket 14 on the front and back, if there is a scratch on the knife edge or corner, leakage will occur from that point, resulting in poor vacuum attainment. There is a possibility that

Further, when the temperature returns to room temperature after heating, the flange and gasket contract, and the dents on the gasket surface become a type of gap, which often deteriorates the sealing performance.

As a means similar to FIG. 6(b), the one shown in FIG. 6) has steps 13a and 13b separated from each other, opposing corner edges overlap, and the gasket 14 connects the end member 2 and the roll body 3. Sealing is achieved by surface contact (Vacuum Technology Course 4)
Constituent materials for vacuum technology; Nikkan Kogyo Shimbun, 1964)
.

In order to tighten something with such a structure, an extremely large amount of tightening force is required, and the copper gasket 14 will undergo plastic deformation, so it is difficult to achieve good sealing performance when heated at a relatively low temperature. However, as the heating temperature rises and the dimensional difference between heating, which causes thermal expansion, and cooling, which causes contraction, increases, the sealing performance deteriorates significantly.

<Problems to be Solved by the Invention> A metal (usually copper) gasket is sandwiched in the end face seal portion of the heating roll having the above structure.
When heated, the sealing performance is improved due to the thermal expansion of the gasket end face member 2 and the roll body 3, but when cooled, both contract, and the recesses caused by the protrusions and steps tend to separate from each other, degrading the sealing performance.

Repeated heating and cooling in this manner often causes the bite portion to expand, resulting in leaks due to poor sealing. In this case, since the roll is installed in a vacuum, air will flow into the vacuum chamber. Although it is conceivable to keep the roll at a predetermined temperature all the time, industrially it is impossible to keep the heating roll warm all the time, and the thermal cycle of heating and cooling is always repeated. Therefore, if the sealing performance deteriorates, it means that a vacuum state cannot be maintained, and operation becomes impossible.

The present invention solves the above-mentioned problems of the conventional technology, and provides a perfect sealing property and less deterioration of the sealing property due to thermal cycles of heating and cooling.In order to heat and convey a long object in a vacuum, the interior is at atmospheric pressure. The purpose is to provide a heated roll structure.

Means for Solving the Problems> As a result of various investigations into means for achieving the above object, good results were obtained by providing a plurality of triangular protrusions and differentiating the positions of penetration into the gasket surface on the front and back sides. This is the completed version.

The present invention provides a heating roll structure in which a long object is heated and conveyed in a vacuum in which a disc-shaped roll end member is integrally assembled at both ends of a cylindrical roll body via an annular metal gasket, and the interior is at atmospheric pressure. Protrusions each having a triangular tip and parallel to the outer periphery are provided on each opposing surface of the cylindrical roll body and the disc-shaped roll end member through the metal gasket, and the corresponding positions in the radial direction are alternately shifted at least. One on the opposing surface of one side and two on the opposing surface of the other side,
The annular metal gasket is sandwiched from both the front and back sides by protrusions with triangular tip portions arranged at alternately shifted positions corresponding to the radial direction, and the protrusions are inserted into different positions on the front and back to seal the gasket. The cylindrical roll body and the disc-shaped roll end member are integrally assembled.

Hereinafter, the configuration of the present invention will be explained in detail based on the drawings.

FIGS. 1(A) and 1(B) show the structure of the seal portion according to the present invention.

In the first B) and (B), 2 and 3 are a disc-shaped roll end member (hereinafter referred to as an end member) and a cylindrical roll body (hereinafter referred to as a roll body), respectively. End member 2
A protrusion having a triangular tip is formed along the circumference on each surface of the roll body 3 that faces and tightens the gasket 14, but even the corresponding position in the radial direction is -1.

In the case of Fig. 1 9), there are two wooden protrusions 13a13 on the end member 2.
c is provided with one protrusion 13b arranged alternately on the roll body 3 and tightens the gasket 14. Note that the relationship between the numbers may be reversed. In the case of FIG. 1(b), two protrusions 13a and 13c are provided on the end face member 2, and two protrusions 13b and 13d are provided on the roll body 3, which are alternately staggered to tighten the gasker stitches 4.

The number of protrusions sealing both the front and back sides of the gasket 14 is at least one on one side and two on the other side, and in addition to those shown in Figures 1 (a) and (b), there are 3 unpaired 2 protrusions in number. They may be different or may have the same number of three or more, but it is important that they are located between the facing protrusions.

A suitable distance between the protrusions is 1 mm or more between the triangular tips disposed above and below the gasket. If it is narrower than 1 mm, the deflection will be insufficient, the amount of restoration upon contraction will be small, and the sealing performance will not be sufficient. If the interval is wide, the effect on sealing performance is small, but the sealing portion becomes large, which tends to cause disadvantages in terms of the device.

<For production> The present invention will be explained in detail by taking FIG. 1(a) as an example.

The gasket 14 of the end member 2 and roll body 3 is tightened by triangular protrusions 13a, 13b, 13 provided on the parts.
In the gasket 14 sandwiched between C, a convex deflection to the left occurs at the same time as the tip of the protrusion bites due to tightening. During cooling, the bite at the tip of the protrusion tends to loosen, but since the deflection becomes flat, the bite is pressed against the tip of the triangular protrusion, maintaining sealing performance.

As a comparative example similar to the present invention, a structure as shown in FIG. 5 can be considered. Triangular projections 13a to 13d are provided on the end face member 2 and the roll body 3 that sandwich the copper gasket 14, but are located at symmetrical positions. Even if a plurality of stakes are located, the same phenomenon as in the conventional system described above cannot be avoided due to the heat cycle of heating and cooling. Therefore, the sealability is inferior to that of the present invention.

<Example> Two heating rolls having the structure shown in FIG. 2 were installed in a vacuum chamber, and the method shown in FIG. The other one used the means shown in FIG. 6(c) as a comparative example. The inside of the vacuum chamber was evacuated to 1X10-'Torr by an oil diffusion pump, and a thermal cycle from room temperature to 500° C. to room temperature was repeated five times while rotating the heating roll.

The pressure inside the vacuum chamber after the final cooling is: Invention example: 9.5X10-6 Torr Comparative example: 1
．． The pressure was 3×10 −3 Torr.

<Effects of the Invention> Since the present invention has the above configuration, the sealing properties of the heating roll are maintained even when subjected to thermal cycles of heating and cooling, and the heating roll can be stably used for a long time in a vacuum.

[Brief explanation of the drawing]

FIG. 1 is a partially enlarged cross-sectional view showing a sealing structure between a roll end member and a roll body via a gasket according to the present invention;
Fig. 2 is a cross-sectional view showing a general heating roll structure, Fig. 3 is a cross-sectional view showing a conventional Wilson type shaft seal structure, and Fig. 4 is a seal structure using a gasket between the roll end face member and the roll body. 5 is a partially enlarged sectional view showing a seal structure between a roll end member and a roll body of a comparative example via a gas kent, and FIG. 6 is a partial cross sectional view showing a gas kent between a roll end member and a roll body of a conventional example. FIG. 1.7... Roll shaft, 24... Roll end member, 3... Roll body, 6... Heater, 11... Pipe, 13... Triangular projection, 14... Metal Made of gasket.

Claims (1)

[Claims] In a heating roll structure in which a long object is heated and conveyed in a vacuum, in which a disc-shaped roll end member is integrally assembled at both ends of a cylindrical roll body via an annular metal gasket, the inside is at atmospheric pressure, and the above-mentioned metal Protrusions each having a triangular tip and parallel to the outer periphery are formed on each opposing surface of the cylindrical roll body and the disc-shaped roll end member through a gasket made of plastic, and the corresponding positions in the radial direction are alternately shifted from each other on at least one side. one on the opposing surface of the other side, and two on the opposing surface of the other side, and the protrusions with triangular tips are arranged at alternately corresponding positions in the radial direction to form the annular metal gasket. A long article in a vacuum, characterized in that the cylindrical roll body and the disc-shaped roll end member are integrally assembled by sandwiching the above-mentioned protrusions from both the front and back surfaces, and sealing the protrusions at different insertion positions on the front and back sides. A heating roll structure in which the interior of the heating roller is at atmospheric pressure.