JPH0211713Y2 - - Google Patents
Info
- Publication number
- JPH0211713Y2 JPH0211713Y2 JP1905884U JP1905884U JPH0211713Y2 JP H0211713 Y2 JPH0211713 Y2 JP H0211713Y2 JP 1905884 U JP1905884 U JP 1905884U JP 1905884 U JP1905884 U JP 1905884U JP H0211713 Y2 JPH0211713 Y2 JP H0211713Y2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- filament
- wehnelt electrode
- base portion
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 6
- 238000001816 cooling Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000000155 melt Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
【考案の詳細な説明】
本考案は熱電子放出型電子銃のウエーネルト電
極の冷却効果を向上した装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a device that improves the cooling effect of the Wehnelt electrode of a thermionic emission electron gun.
従来から使用されている熱電子放出型電子銃の
要部の概略図を第１図に示す。図中１は例えばタ
ングステンで形成されたフイラメント陰極であ
り、２は該フイラメント陰極１に対向して設けら
れ該フイラメント陰極１から放出される電子の放
出量を制御するためのウエーネルト電極である。
３はウエーネルト電極２をリング状ナツト４によ
り支持する支持部材である。５ａ，５ｂはフイラ
メント陰極１を保持するステムであり、該ステム
は例えば絶縁碍子で形成されたフイラメント保持
板６及び固定金具７を介してウエーネルト電極１
に固定されている。 FIG. 1 shows a schematic diagram of the main parts of a conventionally used thermionic emission type electron gun. In the figure, 1 is a filament cathode made of, for example, tungsten, and 2 is a Wehnelt electrode provided opposite to the filament cathode 1 for controlling the amount of electrons emitted from the filament cathode 1.
Reference numeral 3 denotes a support member that supports the Wehnelt electrode 2 with a ring-shaped nut 4. 5a and 5b are stems that hold the filament cathode 1, and the stems are connected to the Wehnelt electrode 1 via a filament holding plate 6 made of, for example, insulator and a fixture 7.
is fixed.
ところで、この様に構成された熱電子放出型電
子銃では、フイラメント陰極１は図示しない電源
によつて例えば2500℃程度の高温に加熱されるた
め、フイラメント陰極１からの熱放射によつてウ
エーネルト電極２のフイラメント電極１の近傍は
1000℃程度まで加熱される。そのため、一般に
は、ウエーネルト電極２の材質としては融点が高
くアウトガスが少なく、しかも加工性が良く安価
であるとの理由によりステンレス鋼が使用されて
いる。 By the way, in the thermionic emission type electron gun configured in this way, the filament cathode 1 is heated to a high temperature of, for example, about 2500°C by a power source (not shown), so that the Wehnelt electrode is heated by heat radiation from the filament cathode 1. The vicinity of filament electrode 1 in No. 2 is
It is heated to about 1000℃. Therefore, stainless steel is generally used as the material for the Wehnelt electrode 2 because it has a high melting point, produces little outgassing, has good workability and is inexpensive.
しかし乍ら、ステンレス鋼は熱伝導率は例えば
銅（320Kcal／mh℃）に比較して低いため、一
旦加熱された場合はその熱が支持部材３側に伝達
されにくく、ウエーネルト電極の冷却に時間を要
し、短時間内に電子銃室内を大気圧に戻したりす
るとウエネルト電極１が酸化して劣化してしま
う。又、熱のためにフイラメント交換時にもウエ
ーネルト電極が充分に冷却されるまで時間を必要
としフイラメント交換に時間を要するという欠点
があつた。 However, since stainless steel has a lower thermal conductivity than, for example, copper (320Kcal/mh℃), once heated, the heat is difficult to transfer to the support member 3 side, and it takes time to cool down the Wehnelt electrode. If the electron gun chamber is returned to atmospheric pressure within a short period of time, the Wehnelt electrode 1 will be oxidized and deteriorated. Furthermore, due to the heat, it takes time for the Wehnelt electrode to be sufficiently cooled down even when the filament is replaced, resulting in a drawback that it takes time to replace the filament.
本考案は以上の点に鑑みなされたもので、電子
を放出する陰極と、該陰極と対向するよう配置さ
れ前記陰極から取り出される電子線を制御するウ
エーネルト電極とからなる電子銃において、該ウ
エーネルト電極を熱伝導率の異なる複数の部材で
形成すると共に前記陰極から放射される熱を遮蔽
する放射熱遮蔽手段を備えたことを特徴としてい
る。 The present invention has been devised in view of the above points, and includes an electron gun that includes a cathode that emits electrons and a Wehnelt electrode that is arranged to face the cathode and controls the electron beam taken out from the cathode. The cathode is formed of a plurality of members having different thermal conductivities, and is characterized by comprising radiation heat shielding means for shielding heat radiated from the cathode.
以下本考案の実施例を添付図面により詳述す
る。 Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
第２図は本考案の一実施例を示す概略図であ
り、第１図と同一構成部分には同一番号を付して
その説明を省略する。本考案に係る実施例装置
が、第１図の従来装置と異る第１の点は、第２図
に示す様にウエーネルト電極２の支持部材３に近
い基体部分２ａをステンレス鋼より熱伝導率の高
い例えば銅で構成し、フイラメント電極１の放射
熱の影響を受けて一番加熱される先端部２ｂをス
テンレス鋼で構成し、該基体部分２ａと該先端部
２ｂの接合を電子ビーム溶接により接合部分２Ａ
を形成して接合した点にある。ここで、電子ビー
ムによる溶接は、通常用いられている酸素溶接等
のように表面部分のみを溶解して接合するのとは
異なり、接合部２Ａは一様に溶解され、本実施例
の場合の接合部２Ａは略銅とステンレス鋼の合金
の状態を呈して接合される。又、本考案に係る実
施例装置が第１図の従来装置と異る第２の点は、
フイラメント陰極１による放射熱が直接基体部分
２ａに伝わらないように該基体部分２ａを保護す
るために、該フイラメント陰極１を囲むように例
えばタンタルで形成された筒状の放射熱遮蔽板８
を設けると共に該放射熱遮蔽板８を金具９により
前記基体部分２ａに保持する様に構成した点にあ
る。 FIG. 2 is a schematic diagram showing an embodiment of the present invention, and the same components as those in FIG. 1 are given the same numbers and their explanations will be omitted. The first point in which the apparatus according to the embodiment of the present invention differs from the conventional apparatus shown in FIG. 1 is that, as shown in FIG. The base portion 2a and the tip portion 2b are made of stainless steel, and the base portion 2a and the tip portion 2b are joined by electron beam welding. Joint part 2A
It is at the point where they are formed and joined. Here, unlike the commonly used oxygen welding, which melts and joins only the surface portion, electron beam welding uniformly melts the joint 2A, which is the case in this example. The joint portion 2A is joined in the state of an alloy of copper and stainless steel. The second point in which the embodiment device according to the present invention differs from the conventional device shown in FIG. 1 is that
In order to protect the base portion 2a so that the radiant heat from the filament cathode 1 is not directly transmitted to the base portion 2a, a cylindrical radiation heat shielding plate 8 made of tantalum, for example, is provided surrounding the filament cathode 1.
The radiant heat shielding plate 8 is configured to be held on the base portion 2a by a metal fitting 9.
以上の様に構成された装置では、フイラメント
陰極１が高温に加熱されると、熱の一部はステム
５ａ，５ｂを介して熱伝導により支持部材３等に
伝達され外部に放出されるが、放射される熱の大
部分は近傍に配置された部品に放射される。この
場合、フイラメント電極１に対向して配置された
先端部２ｂが最も加熱されるが、該先端部２ｂに
放射された熱は比較的熱伝導率の高い銅で形成さ
れた基体部分２ａに伝達され、その一部は該基体
部分２ａで外部に放出され、残り更に支持部材３
に伝達されて外部に放出される。ここで、該基体
部分２ａと先端部２ｂの接合部分２Ａは電子ビー
ム溶接により一様に接合されているための理想的
な熱接触がされており、接合部分２Ａでの熱的な
接触抵抗は無視できる。次に、放射熱遮蔽板８に
枚射された熱は、金具９を介して基体部分２ａに
伝達され前記と同様に、その一部は基体部分２ａ
で外部に放出し、残りは更に支持部材３に伝達さ
れて外部に放出する。そのため、従来装置に比較
してウエーネルト電極の熱伝導率が高くなり、電
子銃全体として熱の放出が多くなり冷却効果が著
るしく改善されるため、フイラメント交換時に速
やかに電子銃室を大気にさらしてもウエーネルト
電極が酸化して劣化させることもなく、又ウエー
ネルト電極の温度が速やかに冷却するため、フイ
ラメント陰極を交換する時にも時間を要すること
はない。 In the device configured as described above, when the filament cathode 1 is heated to a high temperature, part of the heat is transmitted to the support member 3 etc. by thermal conduction via the stems 5a and 5b and is emitted to the outside. Most of the radiated heat is radiated to nearby components. In this case, the tip 2b disposed opposite the filament electrode 1 is heated the most, but the heat radiated to the tip 2b is transferred to the base portion 2a made of copper, which has a relatively high thermal conductivity. A part of it is discharged to the outside at the base portion 2a, and the rest is further transferred to the support member 3.
is transmitted to and released to the outside. Here, the bonding portion 2A between the base portion 2a and the tip portion 2b is uniformly bonded by electron beam welding, so that an ideal thermal contact is made, and the thermal contact resistance at the bonding portion 2A is Can be ignored. Next, the heat irradiated to the radiation heat shielding plate 8 is transmitted to the base portion 2a via the metal fitting 9, and similarly to the above, a part of the heat is transmitted to the base portion 2a.
The remaining part is further transmitted to the support member 3 and released to the outside. Therefore, compared to conventional devices, the thermal conductivity of the Wehnelt electrode is higher, and the electron gun as a whole releases more heat, significantly improving the cooling effect. Therefore, the electron gun chamber can be quickly vented to the atmosphere when replacing the filament. Even if exposed, the Wehnelt electrode will not be oxidized and deteriorated, and the temperature of the Wehnelt electrode will quickly cool down, so it will not take much time to replace the filament cathode.
尚、以上は本考案の例示であり、変形が可能で
ある。第２図の実施例では基体部分２ａと、先端
部２ｂの接合部分２Ａを中間部分で形成し、基体
部分２ａを筒状の放射熱遮蔽板８により保護した
が、第３図に示すように放射熱遮蔽板８を、より
フイラメント電極１の近傍まで延長し該フイラメ
ント陰極１を被うように配置すると共に、該基体
部分２ａがフイラメント陰極の放射熱により溶解
しないように基体部分２ａと先端部２ｂの接合部
分２Ａの位置を選択する。この様に構成すること
により、熱伝導率の低い先端部２ｂを少ない容積
にすることができるため、ウエーネルト電極全体
としては冷却効果が向上する。更に、第４図に示
すように、ウエーネルト電極の例えば基体部分２
ａを銅、中間部分２ｃをステンレス鋼、先端部分
２ｂをタンタルの様に、それぞれ異つた熱伝導率
の部材で構成し、それぞれの接合部分２Ａ，２Ｂ
は前記と同様に電子ビーム溶接により接合しても
よい。この場合は、熱伝導率の低い先端部２ｂが
より少ない容積になるため冷却効果がより向上す
る。 Note that the above is an illustration of the present invention, and modifications are possible. In the embodiment shown in FIG. 2, the joint portion 2A between the base portion 2a and the tip portion 2b is formed at an intermediate portion, and the base portion 2a is protected by a cylindrical radiation heat shielding plate 8. However, as shown in FIG. The radiant heat shielding plate 8 is extended closer to the filament electrode 1 and placed so as to cover the filament cathode 1, and the base portion 2a and the tip portion are arranged so as to prevent the base portion 2a from being melted by the radiant heat of the filament cathode. Select the position of the joint portion 2A of 2b. With this configuration, the volume of the tip portion 2b with low thermal conductivity can be reduced, so that the cooling effect of the Wehnelt electrode as a whole is improved. Furthermore, as shown in FIG. 4, for example, the base portion 2 of the Wehnelt electrode
A is made of copper, the middle part 2c is made of stainless steel, and the tip part 2b is made of tantalum, each of which has a different thermal conductivity.
may be joined by electron beam welding in the same manner as described above. In this case, the volume of the tip portion 2b with low thermal conductivity becomes smaller, so that the cooling effect is further improved.
以上の様に本考案は、熱電子放出型電子銃にお
いて、ウエーネルト電極の冷却効果を向上させる
と共にフイラメント交換の時間を短縮させた電子
銃を提供する。 As described above, the present invention provides a thermionic emission type electron gun in which the cooling effect of the Wehnelt electrode is improved and the time required for replacing the filament is shortened.
第１図は従来装置の要部を示す概略図、第２図
は本考案の一実施例を示す要部の概略図、第３図
及び第４図は本考案の他の実施例を示す要部の概
略図である。
１……フイラメント電極、２……ウエーネルト
電極、３……支持部材、４……リング状ナツト、
６……フイラメント支持板、７……支持金具、８
……放射熱遮蔽板、９……金具。
Fig. 1 is a schematic diagram showing the main parts of a conventional device, Fig. 2 is a schematic diagram of main parts showing one embodiment of the present invention, and Figs. 3 and 4 are main parts showing other embodiments of the present invention. FIG. DESCRIPTION OF SYMBOLS 1... Filament electrode, 2... Wehnelt electrode, 3... Support member, 4... Ring-shaped nut,
6...Filament support plate, 7...Support metal fittings, 8
...radiant heat shielding plate, 9...metal fittings.
Claims (1)
配置され前記陰極から取り出される電子線を制御
するウエーネルト電極とからなる電子銃におい
て、該ウエーネルト電極を熱伝導率の異なる複数
の部材で形成すると共に前記陰極から放射される
熱を遮蔽する放射熱遮蔽手段を備えたことを特徴
とする電子銃。 An electron gun consisting of a cathode that emits electrons and a Wehnelt electrode that is arranged to face the cathode and controls the electron beam taken out from the cathode, in which the Wehnelt electrode is formed of a plurality of members having different thermal conductivities, and An electron gun characterized by comprising radiation heat shielding means for shielding heat radiated from the cathode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1905884U JPS60131949U (en) | 1984-02-13 | 1984-02-13 | electron gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1905884U JPS60131949U (en) | 1984-02-13 | 1984-02-13 | electron gun |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60131949U JPS60131949U (en) | 1985-09-03 |
| JPH0211713Y2 true JPH0211713Y2 (en) | 1990-03-28 |
Family
ID=30508275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1905884U Granted JPS60131949U (en) | 1984-02-13 | 1984-02-13 | electron gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60131949U (en) |
-
1984
- 1984-02-13 JP JP1905884U patent/JPS60131949U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60131949U (en) | 1985-09-03 |
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