JPH02116738U - - Google Patents
Info
- Publication number
- JPH02116738U JPH02116738U JP2625289U JP2625289U JPH02116738U JP H02116738 U JPH02116738 U JP H02116738U JP 2625289 U JP2625289 U JP 2625289U JP 2625289 U JP2625289 U JP 2625289U JP H02116738 U JPH02116738 U JP H02116738U
- Authority
- JP
- Japan
- Prior art keywords
- wafer cassette
- detecting
- test object
- rocking lever
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2625289U JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2625289U JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02116738U true JPH02116738U (enExample) | 1990-09-19 |
| JPH0713222Y2 JPH0713222Y2 (ja) | 1995-03-29 |
Family
ID=31247714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2625289U Expired - Lifetime JPH0713222Y2 (ja) | 1989-03-07 | 1989-03-07 | ウエハカセットの位置決め検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0713222Y2 (enExample) |
-
1989
- 1989-03-07 JP JP2625289U patent/JPH0713222Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0713222Y2 (ja) | 1995-03-29 |