JPH02115069A - Coating dryer - Google Patents
Coating dryerInfo
- Publication number
- JPH02115069A JPH02115069A JP26683688A JP26683688A JPH02115069A JP H02115069 A JPH02115069 A JP H02115069A JP 26683688 A JP26683688 A JP 26683688A JP 26683688 A JP26683688 A JP 26683688A JP H02115069 A JPH02115069 A JP H02115069A
- Authority
- JP
- Japan
- Prior art keywords
- air outlet
- thin plate
- hot air
- suction port
- ports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 title description 6
- 238000000576 coating method Methods 0.000 title description 6
- 238000007664 blowing Methods 0.000 claims abstract description 12
- 238000007667 floating Methods 0.000 claims description 19
- 238000001035 drying Methods 0.000 claims description 14
- 239000003973 paint Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- 230000032258 transport Effects 0.000 description 4
- 238000005452 bending Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、種々の用途に用いる薄板を、塗装後、浮遊状
態で搬送して塗装乾燥処理する塗装乾燥装置に関し、詳
しくは、搬送過程にある塗装乾燥対象の薄板をその下面
に対する気体吹付けにより浮遊状態に保つ吹出口を前記
薄板の搬送経路に分散配置し、浮遊状態にある前記薄板
の下方から気体を下向きに吸引排気する吸込口を前記吹
出口どうしの間に配置した塗装乾燥装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a coating drying device that transports thin plates used for various purposes in a floating state after coating and performs coating drying. Air outlets for keeping a thin plate to be painted and dried in a floating state by blowing gas against its lower surface are distributed in the transport path of the thin plate, and suction ports are provided for sucking and exhausting gas downward from below the thin plate in a floating state. The present invention relates to a paint drying device disposed between the air outlets.
従来、上記の如き塗装乾燥装置においては、第8図及び
第9図に示すように、薄板(A)の搬送経路(1)に分
散配置した吹出口(2)どうしの間の中央箇所に吸込口
(3)を配置していた(例えば特公昭60−42139
号公報参照)。Conventionally, in the above-mentioned paint drying equipment, as shown in FIGS. 8 and 9, suction is drawn into a central location between the air outlets (2) distributed in the conveyance path (1) of the thin plate (A). The mouth (3) was placed (for example, Special Publication No. 60-42139
(see publication).
しかし、本来、吸込口(3)は薄板(A)の下面に吹付
けた気体を浮遊状態にある薄板(A)の下方からすみや
かに排出することにより薄板(A)の浮遊状態を安定化
するために設けるものであるが、上述の従来塗装乾燥装
置では、吹出口(2)からの気体吹付けと吸込口(3)
からの気体吸弓のために、浮遊状態にある薄板(A)が
第8図に破線で示す如く波状に変形して製送移動に伴い
波動し、そのために搬送トラブルを招く問題が派生した
。However, originally, the suction port (3) stabilizes the floating state of the thin plate (A) by quickly discharging the gas blown onto the lower surface of the thin plate (A) from below the floating thin plate (A). However, in the conventional paint drying equipment described above, gas is blown from the air outlet (2) and air is blown from the air inlet (3).
Due to the gas absorption, the thin plate (A) in a floating state is deformed into a wavy shape as shown by the broken line in FIG. 8, and undulates as the product is transported, which causes problems in transportation.
又、この型式の塗装乾燥装置では、同第8図に示すよう
に、浮遊状態にある薄板(A)の上面に対して押え用の
気体を吹付ける上部吹出口(4)を設けることが多いが
、この場合、吸込口(3)からの気体吸引と上部吹出口
(4)からの気体吹付けとのために波状変形が増長され
、上述の波動が一層顕著に発生した。Additionally, in this type of paint drying equipment, as shown in Figure 8, an upper air outlet (4) is often provided to spray presser gas onto the upper surface of the thin plate (A) in a floating state. However, in this case, the wave-like deformation was increased due to the gas suction from the suction port (3) and the gas blowing from the upper blow-off port (4), and the above-mentioned wave motion was generated even more significantly.
本発明の目的は、吹出口と吸込口と配置関係に対する合
理的な改良により上述波動を効果的に抑制する点にある
。An object of the present invention is to effectively suppress the above-mentioned waves by rationally improving the arrangement relationship between the air outlet and the air inlet.
本発明による塗装乾燥装置の特徴構成は、搬送過程にあ
る塗装乾燥対象の薄板をその下面に対する気体吹付けに
より浮遊状態に保つ吹出口を前記薄板の搬送経路に分散
配置し、浮遊状態にある前記薄板の下方から気体を下向
きに吸引排気する吸込口を前記吹出口どうしの間に配置
する構成において、前記吸込口を前記吹出口どうしの間
の中央箇所よりも前記吹出口側に寄せて前記吹出口に対
し隣接配置し、前記吹出口と前記吸込口との隣接配置対
を前記薄板の搬送経路に分散配置したことにあり、その
作用・効果は次の通りである。The characteristic configuration of the paint drying apparatus according to the present invention is that air outlets are distributed in the conveyance path of the thin plate to keep the thin plate to be coated and dried in a floating state by blowing gas against the lower surface of the thin plate during the conveyance process, and In a configuration in which an inlet for sucking and exhausting gas downward from below the thin plate is arranged between the outlets, the inlet is moved closer to the outlet than the center between the outlets. This is because the air outlet is arranged adjacent to the outlet, and the adjoining pairs of the blower outlet and the suction port are distributed in the transport path of the thin plate, and the functions and effects thereof are as follows.
つまり、上述構成によれば、偶力的に作用する吹出口か
らの気体吹付力と吸込口からの気体吸引力とにより薄板
の各部で生じる曲げモーメントが、吹出口と吸込口との
接近のために従来に比して小さくなり、そして、その曲
げモーメントの減少により相対的に薄板の剛性が高くな
って、薄板の波状変形、ひいては、その波状変形に起因
した搬送に伴う波動が効果的に抑制される。In other words, according to the above configuration, the bending moment generated in each part of the thin plate due to the gas blowing force from the air outlet and the gas suction force from the air inlet, which act as a couple, is due to the proximity of the air outlet and air inlet. This reduces the bending moment and increases the stiffness of the thin plate, effectively suppressing the wavy deformation of the thin plate and the wave motion caused by the conveyance caused by the wavy deformation. be done.
その結果、薄板の搬送が円滑かつ安定的になり、この種
の塗装乾燥装置の信頼性、実用性、並びに、処理能率を
大巾に向上し得るに至った。As a result, the conveyance of the thin plate has become smooth and stable, and the reliability, practicality, and processing efficiency of this type of coating drying apparatus have been greatly improved.
次に実施例を説明する。 Next, an example will be described.
第1図ないし第3図において、(1)は塗装後の金属薄
板(A)を所定間隔で炉長手刀向に連続搬送するトンネ
ル状の炉内搬送経路であり、この搬送経路(1)の底部
には、搬送過程の金属薄板(A)をその下面に対する熱
風吹付けにより浮遊状態に保つ吹出口(2)、及び、浮
遊状態にある金属薄板(A)の下方から炉内熱風を下向
きに吸引排気して金属薄板(A)の浮遊状態を安定化す
る吸込口(3)の夫々を搬送方向に並設してある。In Figures 1 to 3, (1) is a tunnel-shaped in-furnace conveyance path that continuously conveys coated metal sheets (A) in the longitudinal direction of the furnace at predetermined intervals; At the bottom, there is an air outlet (2) that keeps the thin metal plate (A) in a floating state by blowing hot air against the lower surface of the thin metal plate (A) during the conveyance process, and a blower outlet (2) that directs the hot air inside the furnace downward from below the thin metal plate (A) in the floating state. Suction ports (3) for stabilizing the floating state of the thin metal plate (A) by suction and exhaust are arranged in parallel in the conveying direction.
又、搬送経路(1)の天井部には金属薄板(A)の上面
に熱風を吹付けて浮遊状態にある金属薄板(A) に対
し押え作用する上部吹出口(4)を同じく搬送方向(F
)に並設してある。Also, on the ceiling of the conveyance path (1), there is an upper air outlet (4) which blows hot air onto the upper surface of the thin metal plate (A) and presses down the thin metal plate (A) in a floating state. F
) are arranged in parallel.
尚、金属薄板(A) は上下の吹出口(2)、 (4)
からの熱風吹付けにより塗装乾燥処理される。Note that the thin metal plate (A) has upper and lower air outlets (2) and (4).
Painting is dried by blowing hot air from
(5)は金属薄板(A)の後端縁に当接させる係止具で
あり、又、(6)は係止具(5)を所定速度で搬送方向
(F)の下手側へ移動させるコンベア装置であり、浮遊
状態の金属薄板(A)はこの係止具(5)により押され
て搬送される。(5) is a locking tool that is brought into contact with the rear edge of the thin metal plate (A), and (6) is a locking tool that moves the locking tool (5) at a predetermined speed toward the lower side in the conveying direction (F). This is a conveyor device, and the metal sheet (A) in a floating state is pushed and conveyed by this locking tool (5).
上下の吹出口(2)、 (4)、及び、吸込口(3)は
倣送経路(1)のほぼ金山にわたるスリット状に形成し
てあり、上下の吹出口(2)、 (4)は夫々、所定の
間隔(dl)、(d2)で搬送方向(F) に並べであ
る。The upper and lower air outlets (2), (4), and the suction port (3) are formed in the shape of a slit that almost spans the contour feeding path (1), and the upper and lower air outlets (2), (4) They are arranged in the transport direction (F) at predetermined intervals (dl) and (d2), respectively.
又、スリット状の吸込口(3)は、下部の吹出口(2)
どうしの間の中央箇所よりも吹出口(2)側に寄せて吹
出口(2)の両側に隣接配置してあり、全体としてはス
リット状吹出口(2)とその両側に位置するスリット状
吸込口(3)との隣接配置対を所定間@(dl)で搬送
方向(F) に並べた構造としてある。Also, the slit-shaped suction port (3) is connected to the lower air outlet (2).
It is arranged adjacent to both sides of the air outlet (2) closer to the air outlet (2) than the center point between them, and as a whole, it consists of a slit-shaped air outlet (2) and a slit-shaped suction located on both sides of the air outlet (2). It has a structure in which adjacent pairs with the opening (3) are arranged in the conveying direction (F) with a predetermined distance @ (dl).
つまり、偶力的に作用する吹出口(2)からの熱風吹付
力と吸込口(3)からの熱風吸引力とにより生じる金属
薄板(A)の波状変形(第8図に破線で示す如き変形)
、並びに、その波状変形に起因して索道に伴い生じる金
属薄板(A)の波動を、上述の如き吹出口(2)と吸込
口(3)との隣接配置構造により抑制し、それによって
、金属薄板(A)をより一層安定的に、かつ、円滑に浮
遊状態で炉内搬送できるようにしてある。In other words, the wavy deformation of the thin metal plate (A) caused by the hot air blowing force from the outlet (2) and the hot air suction force from the suction port (3) acting in a couple (deformation as shown by the broken line in FIG. 8) )
, and the wave motion of the thin metal plate (A) that occurs along the cableway due to its wavy deformation is suppressed by the above-mentioned structure in which the air outlet (2) and the suction port (3) are arranged adjacent to each other. The thin plate (A) can be more stably and smoothly transported inside the furnace in a floating state.
(7)は上部吹出口(4)に熱風を供給する上部給気チ
ャンバー、(8)は下部の吹出口(2)に熱風を供給す
る下部給気チャンバー、(9)は吸込口(3)からの吸
引排気熱風を受入れる排気チャンバーであり、上部給気
チャンバー(7)及び下部給気チャンバー(8)の夫々
には、給気ファン(10)、 (11)を介装した給気
ダクト(12)、 (13)を介して熱風発生装置く図
示せず)から熱風が加圧供給され、又、排気チャンバー
(9)からは、排気ファン(14)を介装した排気ダク
ト(15)を介して熱風が吸引排気され、その吸引排気
熱風は熱風発生装置に還気される。(7) is an upper air supply chamber that supplies hot air to the upper outlet (4), (8) is a lower air supply chamber that supplies hot air to the lower outlet (2), and (9) is an inlet (3). The upper air supply chamber (7) and the lower air supply chamber (8) each have an air supply duct (10) and (11) interposed therein. 12) and (13), hot air is supplied under pressure from a hot air generator (not shown), and an exhaust duct (15) with an exhaust fan (14) is connected from the exhaust chamber (9). Hot air is sucked and exhausted through the hot air generator, and the hot air is returned to the hot air generator.
下部のスリット状吹出口(2)とその両側に隣接するス
リット状吸込口(3)との形成構造ついては、下部給気
チャンバー(8)からスリット状の熱風吹出ノズル(1
6)を上向きに立設して、その熱風吹出ノズル(16)
の上端噴出口をスリット状吹出口(2)とし、一方、ス
リット状吹出口(2)どうしの間に設けた搬送経路底板
(17)、熱風吹出ノズル(16)を形成する縦板(1
6a) 、並びに、下部給気チャンバー(8)の天板(
8a)により囲まれる制限空間を排気チャンバー(9)
として、搬送経路底板(17)の両端縁夫々と熱風吹出
ノズル形成縦板(16a) との間に形成した隙間をス
リット状吸込口(3)としてある。Regarding the formation structure of the lower slit-shaped outlet (2) and the slit-shaped suction ports (3) adjacent to both sides thereof, the slit-shaped hot air outlet nozzle (1) is connected from the lower air supply chamber (8) to the slit-shaped hot air outlet (1).
6) upright and its hot air blowing nozzle (16)
The upper end of the outlet is a slit-shaped outlet (2), and the conveyor path bottom plate (17) is provided between the slit-shaped outlets (2), and the vertical plate (1) forming the hot air outlet nozzle (16).
6a), as well as the top plate of the lower air supply chamber (8) (
The restricted space surrounded by the exhaust chamber (9)
A slit-shaped suction port (3) is formed in the gap formed between each end edge of the conveyance path bottom plate (17) and the hot air blowing nozzle forming vertical plate (16a).
つまり、スリット状吹出口(2)とスリット状吸込口(
3)とは、熱風吹出ノズル形成用縦板(16a)を隔壁
として仕切った隣接構造としてある。In other words, the slit-like outlet (2) and the slit-like suction port (
3) is an adjacent structure partitioned by a vertical plate (16a) for forming a hot air blowing nozzle as a partition wall.
(18)は、各吹出口(2)に対する熱風供給量を均等
化するためのパンチング板である。(18) is a punching plate for equalizing the amount of hot air supplied to each outlet (2).
又、上述の如き吸込口形成構造において吹出口(2)か
らの熱風吹出量と吸込口(3)からの熱風吸引量との比
を適宜調整することにより、浮遊状態にある金属薄板(
A) と搬送経路底板(17)との間に、金属薄板(
A)の下面に吹付けられた熱風の一部が入り込むことに
より形成される適度な正圧域が生じるようにしてあり、
これによって金属薄板(A)の浮遊状態をより一層安定
化するようにしてある。In addition, in the suction port forming structure as described above, by appropriately adjusting the ratio of the amount of hot air blown out from the outlet (2) and the amount of hot air suctioned from the suction port (3), the thin metal plate (
A thin metal plate (
A) A moderate positive pressure area is created when a portion of the hot air blown onto the lower surface enters.
This further stabilizes the floating state of the thin metal plate (A).
次に別実施例を列記する。 Next, another example will be listed.
(イ)吹出口(2)と吸込口(3)との隣接配置対の分
散配置形態は種々の改良が可能であり、第4図ないし第
6図の夫々に示す如く分散配設しても良い。(B) Various improvements can be made to the distributed arrangement of the adjacent pairs of the air outlet (2) and the suction port (3), and even if they are arranged in a distributed manner as shown in FIGS. 4 to 6, respectively. good.
(ロ)吹出口(2)及び吸込口(3)夫々の具体的形状
、並びに形成構造は種々の改良が可能であり、例えば、
曲線状や円形状に形成しても良い。(b) The specific shapes and formation structures of the air outlet (2) and suction port (3) can be improved in various ways, for example,
It may also be formed into a curved or circular shape.
(ハ)浮遊状態にある薄板(A)を搬送するための手段
は種々の構成変更が可能であり、例えば、第7図に示す
ように、搬送経路(1)を光子がりの傾斜経路とし、搬
送経路(1)の下手側へ所定速度で移動する受止具(1
9)により薄板(A)の先端縁を受止めた状態で、浮遊
状態の薄板(A)を自重降下により搬送方向下手側へ搬
送移動させるようにしても良い。(c) The means for conveying the thin plate (A) in a floating state can be modified in various ways; for example, as shown in FIG. A catch (1) that moves at a predetermined speed toward the lower side of the conveyance path (1)
9), the thin plate (A) in a floating state may be conveyed and moved downward in the conveying direction by falling under its own weight while the leading edge of the thin plate (A) is received.
(ニ)吹出口(2)から薄板(A)の下面に吹付ける気
体には種々の気体を適用でき、又、薄板(A)の塗装乾
燥処理そのものは輻射加熱をもって行うようにしても良
い。(d) Various gases can be used as the gas blown from the outlet (2) onto the lower surface of the thin plate (A), and the coating drying process of the thin plate (A) itself may be performed using radiant heating.
(ホ)薄板(A)の材質は金属に限定されるものでは無
く、例えば、プラスチックシートやクラフトシート等々
であっても良い。(e) The material of the thin plate (A) is not limited to metal, and may be, for example, a plastic sheet or a craft sheet.
尚、特許請求の範囲の項に図面との対照を便利にする為
に符号を記すが、該記入により本発明は添付図面の構造
に限定されるものではない。Incidentally, although reference numerals are written in the claims section for convenient comparison with the drawings, the present invention is not limited to the structure shown in the accompanying drawings.
第1図ないし第3図は本発明の実施例を示し、第1図は
縦断面図、第2図は平面図、第3図は拡大断面図である
。
第4図ないし第6図は夫々本発明の別実施例を示す平面
図、第7図は本発明の他の別実施例を示す縦断面図であ
る。
第8図及び第9図は従来構造を示す縦断面図と平面図で
ある。
(1)・・・・・・搬送経路、(2)・・・・・・吹出
口、(3)・・・・・・吸込口、(16a)・・・・・
・板状隔壁、(A)・・・・・・薄板、(F)・・・・
・・搬送方向。1 to 3 show an embodiment of the present invention, in which FIG. 1 is a longitudinal sectional view, FIG. 2 is a plan view, and FIG. 3 is an enlarged sectional view. 4 to 6 are plan views showing other embodiments of the present invention, and FIG. 7 is a longitudinal sectional view showing another embodiment of the present invention. FIGS. 8 and 9 are a longitudinal sectional view and a plan view showing a conventional structure. (1)... Conveyance route, (2)... Air outlet, (3)... Suction port, (16a)...
・Plate partition wall, (A)... Thin plate, (F)...
...Conveyance direction.
Claims (1)
面に対する気体吹付けにより浮遊状態に保つ吹出口(2
)を前記薄板(A)の搬送経路(1)に分散配置し、浮
遊状態にある前記薄板(A)の下方から気体を下向きに
吸引排気する吸込口(3)を前記吹出口(2)どうしの
間に配置した塗装乾燥装置であって、前記吸込口(3)
を前記吹出口(2)どうしの間の中央箇所よりも前記吹
出口(2)側に寄せて前記吹出口(2)に対し隣接配置
し、前記吹出口(2)と前記吸込口(3)との隣接配置
対を前記薄板(A)の搬送経路(1)に分散配置した塗
装乾燥装置。 2、前記吹出口(2)及び前記吸込口(3)の夫々をス
リット状に形成し、そのスリット状吹出口(2)を前記
薄板(A)の搬送方向(F)に所定間隔(d_1)で並
設し、前記吹出口(2)と前記吸込口(3)との隣接配
置対を、前記スリット状吹出口(2)の両側に前記スリ
ット状吸込口(3)を隣接配置したものとした請求項1
記載の塗装乾燥装置。 3、前記吹出口(2)と前記吸込口(3)との隣接配置
対において、前記吹出口(2)と前記吸込口(3)とを
板状隔壁(16a)により仕切ってある請求項1又は2
記載の塗装乾燥装置。 4、前記吹出口(2)と前記吸込口(3)との隣接配置
対を、前記搬送経路(1)の中心線に対して対称に配置
してある請求項1、2、又は3記載の塗装乾燥装置。[Claims] 1. An air outlet (2) that keeps the thin plate (A) to be coated and dried during the conveyance process in a floating state by blowing gas against its lower surface.
) are distributed in the conveyance path (1) of the thin plate (A), and a suction port (3) for sucking and exhausting gas downward from below the thin plate (A) in a floating state is connected to the blowout port (2). a paint drying device disposed between the suction port (3);
is arranged adjacent to the air outlet (2) so as to be closer to the air outlet (2) than the central location between the air outlet (2), and the air outlet (2) and the suction port (3) A paint drying apparatus in which adjacent pairs of . 2. Each of the air outlet (2) and the suction port (3) is formed in a slit shape, and the slit-shaped air outlet (2) is spaced at a predetermined interval (d_1) in the conveying direction (F) of the thin plate (A). The air outlet (2) and the suction port (3) are arranged side by side, and the slit-shaped air outlet (3) is arranged adjacently on both sides of the slit-shaped air outlet (2). Claim 1
Paint drying equipment as described. 3. In a pair of adjacently arranged air outlet (2) and said suction opening (3), said air outlet (2) and said suction opening (3) are partitioned by a plate-shaped partition (16a). or 2
Paint drying equipment as described. 4. The apparatus according to claim 1, 2, or 3, wherein a pair of adjacently arranged pairs of the blower outlet (2) and the suction port (3) are arranged symmetrically with respect to a center line of the conveyance path (1). Paint drying equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26683688A JPH02115069A (en) | 1988-10-22 | 1988-10-22 | Coating dryer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26683688A JPH02115069A (en) | 1988-10-22 | 1988-10-22 | Coating dryer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02115069A true JPH02115069A (en) | 1990-04-27 |
Family
ID=17436335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26683688A Pending JPH02115069A (en) | 1988-10-22 | 1988-10-22 | Coating dryer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02115069A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008013035A1 (en) * | 2006-07-27 | 2008-01-31 | Tokyo Electron Limited | Coating method and coater |
JP2011056335A (en) * | 2009-09-07 | 2011-03-24 | Toray Eng Co Ltd | Apparatus for pre-drying and method of pre-drying |
-
1988
- 1988-10-22 JP JP26683688A patent/JPH02115069A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008013035A1 (en) * | 2006-07-27 | 2008-01-31 | Tokyo Electron Limited | Coating method and coater |
JP2008029938A (en) * | 2006-07-27 | 2008-02-14 | Tokyo Electron Ltd | Coating method and coating device |
KR101023866B1 (en) * | 2006-07-27 | 2011-03-22 | 도쿄엘렉트론가부시키가이샤 | Coating method and coater |
US8307778B2 (en) | 2006-07-27 | 2012-11-13 | Tokyo Electron Limited | Coating method and coating unit |
JP2011056335A (en) * | 2009-09-07 | 2011-03-24 | Toray Eng Co Ltd | Apparatus for pre-drying and method of pre-drying |
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