JPH02114937U - - Google Patents
Info
- Publication number
- JPH02114937U JPH02114937U JP1989024010U JP2401089U JPH02114937U JP H02114937 U JPH02114937 U JP H02114937U JP 1989024010 U JP1989024010 U JP 1989024010U JP 2401089 U JP2401089 U JP 2401089U JP H02114937 U JPH02114937 U JP H02114937U
- Authority
- JP
- Japan
- Prior art keywords
- wire
- plate
- hot plate
- type wafer
- wafer baking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024010U JPH02114937U (enExample) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989024010U JPH02114937U (enExample) | 1989-03-02 | 1989-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02114937U true JPH02114937U (enExample) | 1990-09-14 |
Family
ID=31243491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989024010U Pending JPH02114937U (enExample) | 1989-03-02 | 1989-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02114937U (enExample) |
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1989
- 1989-03-02 JP JP1989024010U patent/JPH02114937U/ja active Pending