JPH02113703U - - Google Patents

Info

Publication number

JPH02113703U

JPH02113703U JP2342089U JP2342089U JPH02113703U JP H02113703 U JPH02113703 U JP H02113703U JP 2342089 U JP2342089 U JP 2342089U JP 2342089 U JP2342089 U JP 2342089U JP H02113703 U JPH02113703 U JP H02113703U

Authority

JP

Japan

Prior art keywords

grating

protective film

light transmittance

unevenness

depositing

Prior art date

1989-03-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000011521 glass Substances 0.000 claims description 2
• 230000001681 protective effect Effects 0.000 claims description 2
• 238000002834 transmittance Methods 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
• GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims 1
• 229910052783 alkali metal Inorganic materials 0.000 claims 1
• 150000001340 alkali metals Chemical class 0.000 claims 1
• 238000000151 deposition Methods 0.000 claims 1
• ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims 1
• 229910001635 magnesium fluoride Inorganic materials 0.000 claims 1
• 230000003287 optical effect Effects 0.000 claims 1
• 238000001556 precipitation Methods 0.000 claims 1
• 239000000377 silicon dioxide Substances 0.000 claims 1
• 238000000992 sputter etching Methods 0.000 claims 1
• OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2