JPH02113353U - - Google Patents

Info

Publication number
JPH02113353U
JPH02113353U JP2150589U JP2150589U JPH02113353U JP H02113353 U JPH02113353 U JP H02113353U JP 2150589 U JP2150589 U JP 2150589U JP 2150589 U JP2150589 U JP 2150589U JP H02113353 U JPH02113353 U JP H02113353U
Authority
JP
Japan
Prior art keywords
chamber
main electrode
wall
main
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2150589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2150589U priority Critical patent/JPH02113353U/ja
Publication of JPH02113353U publication Critical patent/JPH02113353U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP2150589U 1989-02-28 1989-02-28 Pending JPH02113353U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2150589U JPH02113353U (US20100223739A1-20100909-C00005.png) 1989-02-28 1989-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2150589U JPH02113353U (US20100223739A1-20100909-C00005.png) 1989-02-28 1989-02-28

Publications (1)

Publication Number Publication Date
JPH02113353U true JPH02113353U (US20100223739A1-20100909-C00005.png) 1990-09-11

Family

ID=31238803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2150589U Pending JPH02113353U (US20100223739A1-20100909-C00005.png) 1989-02-28 1989-02-28

Country Status (1)

Country Link
JP (1) JPH02113353U (US20100223739A1-20100909-C00005.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150288A (ja) * 1984-12-24 1986-07-08 Shibuya Kogyo Co Ltd 竪型炭酸ガスレ−ザ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61150288A (ja) * 1984-12-24 1986-07-08 Shibuya Kogyo Co Ltd 竪型炭酸ガスレ−ザ装置

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