JPH02113331U - - Google Patents
Info
- Publication number
- JPH02113331U JPH02113331U JP1989021645U JP2164589U JPH02113331U JP H02113331 U JPH02113331 U JP H02113331U JP 1989021645 U JP1989021645 U JP 1989021645U JP 2164589 U JP2164589 U JP 2164589U JP H02113331 U JPH02113331 U JP H02113331U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- support frame
- wafer
- holding
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H10P72/15—
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/068—Substrate holders
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/14—Substrate holders or susceptors
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- H10P72/0404—
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- H10P72/0416—
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- H10P72/76—
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989021645U JPH02113331U (cg-RX-API-DMAC10.html) | 1989-02-27 | 1989-02-27 | |
| DE4005542A DE4005542A1 (de) | 1989-02-27 | 1990-02-22 | Tragrahmen fuer einen traeger zur aufnahme von halbleiter-wafer |
| US07/485,540 US5012935A (en) | 1989-02-27 | 1990-02-27 | Support frame for supporting a semiconductor wafer carrier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989021645U JPH02113331U (cg-RX-API-DMAC10.html) | 1989-02-27 | 1989-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02113331U true JPH02113331U (cg-RX-API-DMAC10.html) | 1990-09-11 |
Family
ID=12060794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989021645U Pending JPH02113331U (cg-RX-API-DMAC10.html) | 1989-02-27 | 1989-02-27 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5012935A (cg-RX-API-DMAC10.html) |
| JP (1) | JPH02113331U (cg-RX-API-DMAC10.html) |
| DE (1) | DE4005542A1 (cg-RX-API-DMAC10.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003077880A (ja) * | 2001-09-03 | 2003-03-14 | Sumitomo Electric Ind Ltd | ウエハの洗浄搬送方法とウエハ洗浄搬送用治具 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06103720B2 (ja) * | 1989-10-09 | 1994-12-14 | 株式会社東芝 | 半導体ウェハ支持キャリア |
| DE4103084A1 (de) * | 1991-02-01 | 1992-08-13 | Wacker Chemitronic | Magazin zur halterung von scheibenfoermigen werkstuecken, insbesondere halbleiterscheiben, bei der nasschemischen oberflaechenbehandlung in fluessigkeitsbaedern |
| US6286688B1 (en) * | 1996-04-03 | 2001-09-11 | Scp Global Technologies, Inc. | Compliant silicon wafer handling system |
| DE19654903C2 (de) * | 1996-04-24 | 1998-09-24 | Steag Micro Tech Gmbh | Vorrichtung zum Behandeln von Substraten in einem Fluid-Behälter |
| JP5563318B2 (ja) * | 2009-03-02 | 2014-07-30 | キヤノンアネルバ株式会社 | 基板支持装置、基板処理装置、基板支持方法、基板支持装置の制御プログラム及び記録媒体 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3850296A (en) * | 1971-07-21 | 1974-11-26 | Shinetsu Handotai Kk | Device and method for accommodating semiconductor wafers |
| DE3419866C2 (de) * | 1984-05-28 | 1986-06-26 | Heraeus Quarzschmelze Gmbh, 6450 Hanau | Trägerhorde aus Quarzglas für scheibenförmige Substrate |
| US4672509A (en) * | 1986-08-07 | 1987-06-09 | Ncr Corporation | Air cooling assembly in an electronic system enclosure |
| US4949848A (en) * | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
-
1989
- 1989-02-27 JP JP1989021645U patent/JPH02113331U/ja active Pending
-
1990
- 1990-02-22 DE DE4005542A patent/DE4005542A1/de not_active Withdrawn
- 1990-02-27 US US07/485,540 patent/US5012935A/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003077880A (ja) * | 2001-09-03 | 2003-03-14 | Sumitomo Electric Ind Ltd | ウエハの洗浄搬送方法とウエハ洗浄搬送用治具 |
Also Published As
| Publication number | Publication date |
|---|---|
| US5012935A (en) | 1991-05-07 |
| DE4005542A1 (de) | 1990-08-30 |