JPH02113143U - - Google Patents

Info

Publication number
JPH02113143U
JPH02113143U JP2160889U JP2160889U JPH02113143U JP H02113143 U JPH02113143 U JP H02113143U JP 2160889 U JP2160889 U JP 2160889U JP 2160889 U JP2160889 U JP 2160889U JP H02113143 U JPH02113143 U JP H02113143U
Authority
JP
Japan
Prior art keywords
corrosion
resistant
corrosive gas
shaped pipe
introduction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2160889U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2160889U priority Critical patent/JPH02113143U/ja
Publication of JPH02113143U publication Critical patent/JPH02113143U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Description

【図面の簡単な説明】
第1図は本考案の実施例1を示す構成図、第2
図は本考案の実施例2を示す構成図、第3図は本
考案の実施例3を示す構成図、第4図は従来例を
示す構成図である。 1…半導体圧力センサ、1a…圧力導入ポート
部、2…U字形圧力測定パイプ、3…油液、5a
,5b…フロート、6…小径部、7a…フランジ

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体圧力センサの圧力導入ポート部と被測定
    物である腐蝕性ガスが存在するチヤンバーとを連
    結する耐蝕性U字形パイプを備え、該U字形パイ
    プの底部に耐蝕性と流動性のあるシリコンオイル
    等の油液を有することを特徴とする腐蝕性ガスの
    圧力測定パイプ。
JP2160889U 1989-02-27 1989-02-27 Pending JPH02113143U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2160889U JPH02113143U (ja) 1989-02-27 1989-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2160889U JPH02113143U (ja) 1989-02-27 1989-02-27

Publications (1)

Publication Number Publication Date
JPH02113143U true JPH02113143U (ja) 1990-09-11

Family

ID=31238996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2160889U Pending JPH02113143U (ja) 1989-02-27 1989-02-27

Country Status (1)

Country Link
JP (1) JPH02113143U (ja)

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