JPH02112993A - Manufacture of thick film circuit board and mesh mask for manufacture - Google Patents

Manufacture of thick film circuit board and mesh mask for manufacture

Info

Publication number
JPH02112993A
JPH02112993A JP26698388A JP26698388A JPH02112993A JP H02112993 A JPH02112993 A JP H02112993A JP 26698388 A JP26698388 A JP 26698388A JP 26698388 A JP26698388 A JP 26698388A JP H02112993 A JPH02112993 A JP H02112993A
Authority
JP
Japan
Prior art keywords
thick film
opening
mask
circuit board
mesh
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26698388A
Other languages
Japanese (ja)
Inventor
Nobuo Tanakadate
田中館 信夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP26698388A priority Critical patent/JPH02112993A/en
Publication of JPH02112993A publication Critical patent/JPH02112993A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate an irregularity in the quantity of paste and to maintain the paste to be coated in a suitable shape by reducing in thickness a layer of nonopening around an opening thinner than the nonopening of the other part, and employing a mesh mask having a space to be engaged with the protrusion of a thick film pattern on a circuit board. CONSTITUTION:A resistor 4 is printed from the protrusion (conductor 5) of a circuit board having a protrusion conductor pattern 5 on a board 3 over the protrusion (conductor 5). A mesh mask is formed with an enlarged space having an opening area larger than that of an opening 1 at the board side of the opening, and the thickness of the nonopening of the periphery of the opening is reduced. The vertical wall face of the enlarged space is so composed as to be brought into contact with the vertical face of the outer periphery of the conductor 5. Accordingly, the protrusion (conductor 5) on the face of the board is formed in shape to be engaged within the enlarged space. Thus, the contact state of the mask with the board face is stabilized, and easy wear of the edge of a pattern hole of a conventional mesh mask is eliminated.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、既に厚膜パターンか形成された基板面上に、
誘電体、抵抗等のペーストを該厚膜パターンの一部に重
なるようにスクリーン印刷する工程を何する厚膜回路基
板の製造方法及びその製造に用いるメツシュマスクに関
する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for applying a method to a substrate on which a thick film pattern has already been formed.
The present invention relates to a method for manufacturing a thick film circuit board that includes a step of screen printing a paste such as a dielectric or a resistor so as to partially overlap the thick film pattern, and a mesh mask used in the manufacturing.

[従来の技術] 厚膜混成集積回路を生産する方法には、アルミナ等のセ
ラミックM[2の上に導体を印刷し、これを焼成しく導
体が交差する場合には、クロスガラスを印刷し、焼成し
)、誘電体を印刷し、これを焼成し、抵抗を印刷し、こ
れを焼成し、半田ペーストを印刷し、表面実装部品をマ
ウントし、半田フローする等多くの工程が含まれている
[Prior Art] A method for producing a thick film hybrid integrated circuit includes printing a conductor on a ceramic M[2 such as alumina, firing it, and printing a cross glass when the conductors cross each other. It includes many steps such as printing the dielectric, baking it, printing the resistor, baking it, printing the solder paste, mounting the surface mount component, and flowing the solder. .

通常、厚膜の印刷は、製版されたスクリーン上にペース
トをおき、それをスキージでパターンを通して押し出し
、基板上に転写させることからなるスクリーン印刷法に
よって行なわれている。こマスクとマスク層に開口パタ
ーンを形成したメツシュマスクとがあるか、電極パター
ン、誘電体パターン、抵抗パターン等を形成するときに
は、印刷精度、密召度等を考慮し、メツシュマスクが一
般に用いられている。
Usually, thick film printing is carried out by a screen printing method, which consists of placing a paste on a stencil-made screen, extruding it through a pattern with a squeegee, and transferring it onto a substrate. There is a mesh mask in which an opening pattern is formed in the mask layer.When forming electrode patterns, dielectric patterns, resistance patterns, etc., mesh masks are generally used in consideration of printing accuracy, density, etc.

メソシュマスクは、詳細には以ドのような構造になって
いる。すなわち、金属製の枠(メタルフレーム)にステ
ンレスワイヤ製の、またはナイロン等の樹脂繊維製のメ
ツシュか張り付けられており、そのメツシュに、エマル
ジンヨンを塗布し、そのエマルジョンを硬化させること
によりパターンが作られているか、あるいは、エマルジ
ョンを塗布したマイラフィルムにパターンを焼き付けて
現像し、これをメツシュ上に圧着することによりパター
ンが作られている。メツシュマスクの断面は第1b図及
び第2b図に示す通りであり、非開口部2のスキージ側
の而と基板側の而とは甲・行になっている。すなわち非
開口部の厚さは均一であり、パターンホール(開口部)
1は、この面に対して垂直に設けられている。
The detailed structure of the mesh mask is as follows. In other words, a mesh made of stainless steel wire or resin fiber such as nylon is attached to a metal frame, and a pattern is created by applying an emulsion to the mesh and curing the emulsion. Alternatively, the pattern is made by printing a pattern on a Mylar film coated with an emulsion, developing it, and pressing it onto the mesh. The cross section of the mesh mask is as shown in FIGS. 1b and 2b, and the squeegee side and the substrate side of the non-opening portion 2 are in the opposite direction. In other words, the thickness of the non-opening area is uniform, and the thickness of the pattern hole (opening area) is uniform.
1 is provided perpendicularly to this plane.

[発明が解決しようとする問題点] しかしながら、元来スクリーン印刷用マスクは接触させ
る面が平面であることを前提としてつくられたものであ
るため、厚膜パターンの凸部上の一部に重ねるように印
刷する場合には、スキージがマスク上面を擦るとき、基
板上の厚膜パターンの凸部によって、マスク層か磨耗し
てしまっていた。特にマスクの開口周縁部はその傾向が
著しかった。
[Problems to be solved by the invention] However, since the screen printing mask was originally created on the assumption that the surface to be contacted was flat, it overlapped with a part of the convex part of the thick film pattern. When printing in this way, when the squeegee scrapes the top surface of the mask, the mask layer is abraded by the protrusions of the thick film pattern on the substrate. This tendency was particularly noticeable at the periphery of the opening of the mask.

スクリーンの開口の周縁部が磨耗してくると、印刷によ
り塗布されるペーストの塗布される量のばらつき、いわ
ゆるダレ・カスレが生し、抵抗値がばらついたり、電極
う・rンが断線したりしてしまう。
When the periphery of the screen opening becomes worn, variations in the amount of paste applied during printing, so-called sagging and smearing, occur, resulting in variations in resistance and disconnection of electrode wires. Resulting in.

そこで、本発明の目的は、厚膜パターンが形成された基
板上の厚膜パターンの一部に印刷する場合でも、メツシ
ュマスクの接触面か基板上のパターンに適応して密若し
、ペースト量のばらつきか生ぜず、塗布されるペースト
の形状か適切な形状に維持され得るj1膜回路基板の製
造方法を提供しようとするものである。
Therefore, it is an object of the present invention to print on a part of a thick film pattern on a substrate on which a thick film pattern has been formed, by adjusting the contact surface of the mesh mask or the pattern on the substrate to reduce the amount of paste. It is an object of the present invention to provide a method for manufacturing a J1 film circuit board in which the shape of the applied paste can be maintained in an appropriate shape without causing variations.

[問題点を解決するための手段] 本発明は、以下のような方法を採ることによって、上記
目的を達成しようとするものである。すなわち、厚膜パ
ターンが形成された基板上に、さらに該パターンの一部
に重なるようにメツシュマスクによりスクリーン印刷を
行なうことによって厚膜パターンを形成する工程を持つ
厚膜回路基板製造方法のスクリーン印刷上程において、
特殊な構造を持つメツシュマスクを用いることを特徴と
する敗訴された厚膜回路基数の製造方法を採用する。こ
こに、特殊な構造のメソシュマスクとは、回路基板面上
の凸部に応じてメツシュマスクの開口部周辺の、IU開
口部の層の厚さを他の部分の非開口部より薄く構成する
ことによってメツシュマスクの回路基板側に回路基板面
上の厚膜パターンの凸部を嵌入せしめる空間を構成した
構造を持つメツシュマスクである。
[Means for Solving the Problems] The present invention attempts to achieve the above object by adopting the following method. That is, the screen printing step of a thick film circuit board manufacturing method includes a step of forming a thick film pattern by performing screen printing using a mesh mask on a substrate on which a thick film pattern is formed so as to overlap a part of the pattern. In,
Adopts a failed method of manufacturing thick film circuit boards, which is characterized by the use of a mesh mask with a special structure. Here, a mesh mask with a special structure is defined by configuring the thickness of the IU opening layer around the opening of the mesh mask to be thinner than other non-opening areas, depending on the convex portion on the circuit board surface. This mesh mask has a structure in which a space is formed on the circuit board side of the mesh mask into which a convex part of a thick film pattern on the circuit board surface is inserted.

[作  用コ このようなスクリーン印刷用マスクは、以下のような作
用をする。
[Function] This kind of screen printing mask works as follows.

本発明のスクリーン印刷用マスクには、厚膜回路基板上
の厚膜パターンの各凸部に対応する位置に前記各凸部に
対応する形状及び寸法の四部が設けられ、基板上の各凸
部の表面がスクリーンの凹んだ而により広い面積で安定
に接触するようになっているために、スキージがエマル
ジョンを押す力は分散され、スクリーン開口部周辺が局
部的に磨耗することがなくなる。そのため、複数連続し
て印刷しても容易にダレは牛しない。したがって、抵抗
値等のばらつきのない回路基板が複数製造することがで
きる。
The screen printing mask of the present invention is provided with four portions having shapes and dimensions corresponding to the respective convex portions at positions corresponding to the convex portions of the thick film pattern on the thick film circuit board, and each convex portion on the substrate. Since the surface of the emulsion is in stable contact with the concave surface of the screen over a wider area, the force of the squeegee pushing the emulsion is dispersed, and local wear around the screen openings is eliminated. Therefore, it does not easily sag even if multiple sheets are printed in succession. Therefore, a plurality of circuit boards without variations in resistance value etc. can be manufactured.

また、基板上の凸部に嵌合するようにメツシュマスクの
四部が形成されているために、メツシュマスクが位置ズ
レを起こすこともなくなる。
Further, since the four parts of the mesh mask are formed so as to fit into the convex portions on the substrate, the mesh mask does not become misaligned.

第1a図は本発明の方法により、基板3上に凸状の導体
パターン5を自゛する回路基板の凸部(導体5)から凸
部(導体5)にまたがって、抵抗体4を印刷する状態を
示す概略図である。第1b図は従来の方法によって同様
に抵抗体を印刷する場合を示している。両図の対比によ
りわかるように、本発明で用いるメツシュマスクは、開
口部の基板側に、開口部1の開口面積よりも大きい開口
面積を持つ拡大空間が形成されており、開口部周辺部分
の非開口部の肉厚が汚くされている。拡大空間部の垂直
壁面は導体5の外周垂直面に接するように構成されてお
り、したがって基板面上の凸部(導体5)は、拡大空間
内に嵌入される形となるので、メツシュマスクと基板面
との接触状態が安定となり、従来のメツシュマスクを用
いた場合のように、パターンホールのエツジ部が特に磨
耗しやすいということがなくなる。
FIG. 1a shows that, by the method of the present invention, a resistor 4 is printed across a circuit board having a convex conductor pattern 5 on a substrate 3 from convex part (conductor 5) to convex part (conductor 5). It is a schematic diagram showing a state. FIG. 1b shows the printing of resistors in a conventional manner as well. As can be seen from the comparison between the two figures, the mesh mask used in the present invention has an enlarged space on the substrate side of the opening, which has an opening area larger than that of opening 1, and the mesh mask used in the present invention has an enlarged space with an opening area larger than the opening area of opening 1. The wall thickness of the opening is dirty. The vertical wall surface of the expanded space is configured to be in contact with the outer circumferential vertical surface of the conductor 5, and therefore the convex portion (conductor 5) on the board surface is fitted into the expanded space, so that the mesh mask and the board The state of contact with the surface becomes stable, and the edge portions of the pattern holes are not particularly prone to wear, which is the case when conventional mesh masks are used.

第2a図は基板面上の導体5を覆ったクロスガラス6の
上に別の導体7を本発明のメツシュマスクを用いて印刷
する状態を示す概略図である。第2b図は、従来のメツ
シュマスクを用いて第2a図の場合と同じことを行なう
状態を示す概略図である。
FIG. 2a is a schematic diagram showing a state in which another conductor 7 is printed on the cross glass 6 covering the conductor 5 on the substrate surface using the mesh mask of the present invention. FIG. 2b is a schematic diagram illustrating the same situation as in FIG. 2a using a conventional mesh mask.

第3a図は本発明の方法によって導体5と導体5の間に
またがって抵抗体4を印刷した場合の抵抗体の形状の一
例を示す概略図である。
FIG. 3a is a schematic diagram showing an example of the shape of the resistor when the resistor 4 is printed across the conductors 5 by the method of the present invention.

第3b図は第3a図の場合と同じことを従来の方法で行
なった場合の抵抗体4の形状の一例を示す概略図である
FIG. 3b is a schematic diagram showing an example of the shape of the resistor 4 when the same thing as in FIG. 3a is performed using a conventional method.

Q4a図は、本発明の方法によりクロスガラス6の上に
導体7の印刷を行なった場合の導体の形状の一例を示す
概略図である。
Figure Q4a is a schematic diagram showing an example of the shape of the conductor when the conductor 7 is printed on the cross glass 6 by the method of the present invention.

第4b図は第4a図の場合と同じことを従来の方法で行
なった場合の導体7の形状の一例を示す概略図である。
FIG. 4b is a schematic diagram showing an example of the shape of the conductor 7 when the same thing as in FIG. 4a is performed using a conventional method.

以ド実施例により説明する。This will be explained below using examples.

実施例 1 間隔2III11で回路基板上に印刷された幅0.3關
、斥°みO,15mmの導体(Ag−Pd屯極)間に抵
抗体(幅2.Omm、厚み0.25mm)を印刷した。
Example 1 A resistor (width 2.0 mm, thickness 0.25 mm) was placed between conductors (Ag-Pd conductors) with a width of 0.3 mm and a distance of 0.15 mm printed on a circuit board with a spacing of 2III11. Printed.

電極と抵抗体の重なる部分は、0.2mmであった。The overlap between the electrode and the resistor was 0.2 mm.

従来のスクリーン(厚み20−)を用いた場合は0.1
龍のダレが生じ、さらに、 100同印刷したときには
、0.13mmのダレが生じた。
0.1 when using a conventional screen (thickness 20-)
A dragon sag occurred, and furthermore, when 100 copies were printed, a 0.13 mm sag occurred.

これに対し、メツシュマスクのMIIM側の面に凸凹の
関係が逆である以外は導体パターンと同じパターンで四
部を設けた(厚み20μs、四部の深さ15ρ)スクリ
ーンを用いた本発明による製造方法によれば、0.02
mmのダレしか生ぜず、100回印刷しても0.03m
mのダレしか生じない厚膜回路基板が製造できた。
On the other hand, in the manufacturing method according to the present invention using a screen having four parts (thickness: 20 μs, depth of the four parts: 15 ρ) with the same pattern as the conductor pattern except that the relationship between the convex and concave portions is reversed on the MIIM side surface of the mesh mask, According to 0.02
Only 0.03 mm of sag occurs even after 100 printings.
A thick film circuit board with only m sag could be manufactured.

[発明の効果] 上に説明したような印刷用マスクを用い、基板上の厚膜
パターンの凸部上に重ねて厚膜パターンを印刷してj1
膜回路基板を製造することにより、以下に述べるような
効果が得られた。すなわち、本発明で用いる印刷用マス
クは、基板上の厚膜パターンの凸部にχ・I応させて開
口部周辺のマスクの厚みを他の部分のマスクの厚みより
薄く購成し、厚11% パターンの凸部の外壁がマスク
の四部の内壁に接するように形成されているため、スキ
ージからの力がより広い範囲に分散し、多数の凹凸があ
る基板に印刷するときも、塗布される量のばらつき(い
わゆるダレ・カスレ)が生ぜず、したがって安定した特
性を持つ厚膜回路J!板を提供することかできる。さら
にマスク自体の形状保持性が良好であるため長期間同一
のマスクを使用できるので経済的である。
[Effects of the Invention] Using a printing mask as described above, a thick film pattern is printed over the convex portions of the thick film pattern on a substrate.
By manufacturing the membrane circuit board, the following effects were obtained. That is, the printing mask used in the present invention is purchased so that the thickness of the mask around the opening is thinner than that of other parts in accordance with the convex parts of the thick film pattern on the substrate, and the thickness is 11. % Since the outer walls of the convex parts of the pattern are in contact with the inner walls of the four parts of the mask, the force from the squeegee is dispersed over a wider area, making it easier to apply even when printing on a substrate with many irregularities. Thick film circuit J! that does not cause variations in quantity (so-called sagging or fading) and therefore has stable characteristics! Can you provide the board? Furthermore, since the shape retention of the mask itself is good, the same mask can be used for a long period of time, which is economical.

また、開口の厚みをペーストか適量塗布されるような厚
みにできるため、パターン形状の乱れが生じ難い。さら
に、基板上の凸部が嵌入されるようにスクリーン印刷用
マスクに四部が設けられているために、位置ズレを起こ
すこともなくなる。
Further, since the thickness of the opening can be set to a thickness such that an appropriate amount of paste can be applied, the pattern shape is less likely to be disturbed. Furthermore, since the screen printing mask is provided with four parts so that the convex parts on the substrate are fitted into them, there is no possibility of misalignment.

【図面の簡単な説明】[Brief explanation of the drawing]

第1a図は本発明の方法で用いられるメッシュマスクの
構造的特徴と、これを用いて基板上に突起した導体間に
抵抗体を印刷した状態を、断面形状で示した概略図であ
る。 第1b図は従来の方法で用いられてきたメツシュマスク
の構造的特徴と、それを用いて基板上に突起した導体間
に抵抗体を印刷した状態を、断面形状で示した概略図で
ある。 第2a図は本発明の方法で用いられる別のメツシュマス
クの構造的特徴と、これを用いて基板上の導体を覆って
配設されたクロスガラスの上に導体を印刷した状態を示
すための概略図である。 第2b図は従来の方法で用いられる別のメツシュマスク
の構造的な特徴と、これを用いて前記同様に配設された
クロスガラスの上に導体を印刷した状態を示すための概
略図である。 第3a図は本発明の方法で、基板上に突起状に存在する
2つの導体の間にまたがって抵抗体を印刷した状態を示
す下面図である。 第3b図は従来の方法で、基板上に突起状に存在する2
つの導体の間にまたがって抵抗体を印刷した状態を示す
概略図である。 第4a図は、本発明のh′法で、クロスガラスの上に導
体を印刷した状態を示す平皿図である。 第4b図は、従来のX法で、クロスガラスの上に導体を
印刷した状態を示す概略図である。 図中の符号は次のものをそれぞれ表わす。 1・・・メツシュマスクの開口部 2・・・メツシュマスクの非開口部 3・・・基 板       4・・・抵抗体5・・・
導 体       6・・・クロスガラス7・・・導
 体
FIG. 1a is a schematic cross-sectional view showing the structural features of a mesh mask used in the method of the present invention and a state in which a resistor is printed between conductors protruding on a substrate using the mesh mask. FIG. 1b is a schematic cross-sectional view showing the structural features of a mesh mask used in the conventional method and the state in which a resistor is printed between conductors protruding on a substrate using the mesh mask. FIG. 2a is a schematic diagram illustrating the structural features of another mesh mask used in the method of the present invention and the state in which a conductor is printed on a cross glass disposed over a conductor on a substrate using the mesh mask. It is a diagram. FIG. 2b is a schematic diagram showing the structural features of another mesh mask used in the conventional method and a state in which a conductor is printed on a cross glass arranged in the same manner as described above using this mesh mask. FIG. 3a is a bottom view showing a state in which a resistor is printed across two conductors existing in a protruding manner on a substrate by the method of the present invention. FIG. 3b shows a conventional method in which 2
FIG. 2 is a schematic diagram showing a state in which a resistor is printed across two conductors. FIG. 4a is a flat plate view showing a state in which a conductor is printed on a cloth glass by the h' method of the present invention. FIG. 4b is a schematic diagram showing a state in which a conductor is printed on a cross glass using the conventional X method. The symbols in the figure represent the following, respectively. 1... Opening of mesh mask 2... Non-opening of mesh mask 3... Substrate 4... Resistor 5...
Conductor 6...Cross glass 7...Conductor

Claims (2)

【特許請求の範囲】[Claims] (1)厚膜パターンが形成された基板上に、さらに前記
厚膜パターンの凸部の一部に重ねてメッシュマスクを用
いてスクリーン印刷により厚膜パターンを形成する工程
を含む厚膜回路基板の製造方法において、前記メッシュ
マスクの開口周辺の前記基板上の厚膜パターンと接する
非開口部の肉を除去して該開口周辺非開口部の肉厚がそ
の他の部分の非開口部の肉厚よりも薄くなるように構成
することにより、基板面上の厚膜パターンの凸部を嵌入
せしめ得る拡大空間を前記回路基板側開口周辺部に形成
したメッシュマスクを使用し、これによって印刷時にお
けるマスク面と凸部を持つ回路基板面との接触を安定化
させたことを特徴とする厚膜回路基板の製造方法。
(1) A thick film circuit board including the step of forming a thick film pattern by screen printing using a mesh mask on a substrate on which a thick film pattern has been formed, and overlapping a part of the convex portion of the thick film pattern. In the manufacturing method, the thickness of the non-opening area around the opening of the mesh mask that is in contact with the thick film pattern on the substrate is removed, and the thickness of the non-opening area around the opening is greater than the thickness of the non-opening area of other parts. A mesh mask is used in which an enlarged space is formed around the opening on the circuit board side into which the convex part of the thick film pattern on the substrate surface can be inserted by configuring the mask surface to be thinner. A method for manufacturing a thick film circuit board, characterized in that contact between the surface of the circuit board and the surface of the circuit board having a convex portion is stabilized.
(2)メッシュと、開口パターンを持つマスク層とから
なるメッシュマスクであって、該メッシュマスクの開口
周辺の基板上の厚膜パターンと接する非開口部の肉を除
去して、該開口周辺非開口部の肉厚がその他の部分の非
開口部の肉厚よりも薄くなるように構成することにより
、基板面上の厚膜パターンの凸部を嵌入せしめ得る拡大
空間を前記回路基板側開口周辺部に形成したことを特徴
とするメッシュマスク。
(2) A mesh mask consisting of a mesh and a mask layer having an aperture pattern, in which the non-aperture portions in contact with the thick film pattern on the substrate around the apertures of the mesh mask are removed, and the non-aperture surrounding the apertures are removed. By configuring the opening so that the wall thickness is thinner than the wall thickness of the other non-opening parts, an enlarged space into which the convex part of the thick film pattern on the board surface can be inserted is created around the opening on the circuit board side. A mesh mask characterized by having a mesh formed in the upper part of the mask.
JP26698388A 1988-10-22 1988-10-22 Manufacture of thick film circuit board and mesh mask for manufacture Pending JPH02112993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26698388A JPH02112993A (en) 1988-10-22 1988-10-22 Manufacture of thick film circuit board and mesh mask for manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26698388A JPH02112993A (en) 1988-10-22 1988-10-22 Manufacture of thick film circuit board and mesh mask for manufacture

Publications (1)

Publication Number Publication Date
JPH02112993A true JPH02112993A (en) 1990-04-25

Family

ID=17438425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26698388A Pending JPH02112993A (en) 1988-10-22 1988-10-22 Manufacture of thick film circuit board and mesh mask for manufacture

Country Status (1)

Country Link
JP (1) JPH02112993A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6802250B2 (en) * 2002-05-20 2004-10-12 Taiwan Semiconductor Manufacturing Co., Ltd Stencil design for solder paste printing
JP2009122633A (en) * 2007-11-15 2009-06-04 Beijing Boe Optoelectronics Technology Co Ltd Photoresist masking method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6802250B2 (en) * 2002-05-20 2004-10-12 Taiwan Semiconductor Manufacturing Co., Ltd Stencil design for solder paste printing
JP2009122633A (en) * 2007-11-15 2009-06-04 Beijing Boe Optoelectronics Technology Co Ltd Photoresist masking method

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