JPH02112326U - - Google Patents

Info

Publication number
JPH02112326U
JPH02112326U JP1918789U JP1918789U JPH02112326U JP H02112326 U JPH02112326 U JP H02112326U JP 1918789 U JP1918789 U JP 1918789U JP 1918789 U JP1918789 U JP 1918789U JP H02112326 U JPH02112326 U JP H02112326U
Authority
JP
Japan
Prior art keywords
raw material
sealed chamber
liquid
extended
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1918789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0725224Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989019187U priority Critical patent/JPH0725224Y2/ja
Publication of JPH02112326U publication Critical patent/JPH02112326U/ja
Application granted granted Critical
Publication of JPH0725224Y2 publication Critical patent/JPH0725224Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP1989019187U 1989-02-20 1989-02-20 蒸発気体定量取出装置 Expired - Lifetime JPH0725224Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989019187U JPH0725224Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989019187U JPH0725224Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Publications (2)

Publication Number Publication Date
JPH02112326U true JPH02112326U (en, 2012) 1990-09-07
JPH0725224Y2 JPH0725224Y2 (ja) 1995-06-07

Family

ID=31234479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989019187U Expired - Lifetime JPH0725224Y2 (ja) 1989-02-20 1989-02-20 蒸発気体定量取出装置

Country Status (1)

Country Link
JP (1) JPH0725224Y2 (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021130853A (ja) * 2020-02-20 2021-09-09 株式会社堀場エステック 気化システム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264047A (en) * 1975-11-21 1977-05-27 Hitachi Zosen Corp Method of heat exchange
JPS5645748U (en, 2012) * 1979-09-18 1981-04-24
JPS6044702A (ja) * 1983-08-19 1985-03-09 新菱冷熱工業株式会社 表面気化による蒸気発生方法およびその装置
JPS61254286A (ja) * 1985-05-01 1986-11-12 Seiichi Tan 純粋蒸気又は高純度蒸溜水の小型製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5264047A (en) * 1975-11-21 1977-05-27 Hitachi Zosen Corp Method of heat exchange
JPS5645748U (en, 2012) * 1979-09-18 1981-04-24
JPS6044702A (ja) * 1983-08-19 1985-03-09 新菱冷熱工業株式会社 表面気化による蒸気発生方法およびその装置
JPS61254286A (ja) * 1985-05-01 1986-11-12 Seiichi Tan 純粋蒸気又は高純度蒸溜水の小型製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021130853A (ja) * 2020-02-20 2021-09-09 株式会社堀場エステック 気化システム

Also Published As

Publication number Publication date
JPH0725224Y2 (ja) 1995-06-07

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