JPH02110876U - - Google Patents
Info
- Publication number
- JPH02110876U JPH02110876U JP1969289U JP1969289U JPH02110876U JP H02110876 U JPH02110876 U JP H02110876U JP 1969289 U JP1969289 U JP 1969289U JP 1969289 U JP1969289 U JP 1969289U JP H02110876 U JPH02110876 U JP H02110876U
- Authority
- JP
- Japan
- Prior art keywords
- hole
- probe needle
- insulating
- probe
- leaf spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Description
第１図ａは本考案の実施例１を示す平面図、ｂ
は同正面図、第２図ａは本考案の実施例２を示す
平面図、ｂは同側面図である。
１，２……板バネ、１ａ，２ａ……電極、１ｂ
，２ｂ……ネジ孔、１ｃ，２ｃ……プローブニー
ドル用孔、１ｄ，２ｄ……ネジ、３……ベース、
４……長孔、５……ニードルガイド、５ａ，５ｂ
……プローブニードル用ガイド孔、６ａ，６ｂ…
…プローブニードル、７……表面が曲面のベース
、８……表面が曲面のニードルガイド、８ａ……
プローブニードル用ガイド孔。
Figure 1a is a plan view showing Embodiment 1 of the present invention, b
2 is a front view of the same, FIG. 2 a is a plan view showing a second embodiment of the present invention, and FIG. 2 b is a side view of the same. 1, 2...Plate spring, 1a, 2a...Electrode, 1b
, 2b...screw hole, 1c, 2c...probe needle hole, 1d, 2d...screw, 3...base,
4...Long hole, 5...Needle guide, 5a, 5b
...Probe needle guide hole, 6a, 6b...
...Probe needle, 7...Base with curved surface, 8...Needle guide with curved surface, 8a...
Guide hole for probe needle.
Claims (1)
整用孔並びに電極を有する導電性の２枚の板バネ
と、プローブニードル用ガイド孔を有する絶縁性
ニードルガイドと、中心に板バネ位置調整用長孔
を有する絶縁性ベースとを含むことを特徴とする
半導体用プローブヘツド。 Two conductive leaf springs with a probe needle hole, a probe needle adjustment hole, and an electrode, an insulating needle guide with a probe needle guide hole, and an insulating leaf spring with a long hole in the center for adjusting the leaf spring position. A semiconductor probe head comprising a base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969289U JPH0622218Y2 (en) | 1989-02-22 | 1989-02-22 | Semiconductor probe head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969289U JPH0622218Y2 (en) | 1989-02-22 | 1989-02-22 | Semiconductor probe head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02110876U true JPH02110876U (en) | 1990-09-05 |
| JPH0622218Y2 JPH0622218Y2 (en) | 1994-06-08 |
Family
ID=31235427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1969289U Expired - Lifetime JPH0622218Y2 (en) | 1989-02-22 | 1989-02-22 | Semiconductor probe head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622218Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002354A (en) * | 2008-06-23 | 2010-01-07 | Yokogawa Electric Corp | Probe accessory |
-
1989
- 1989-02-22 JP JP1969289U patent/JPH0622218Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010002354A (en) * | 2008-06-23 | 2010-01-07 | Yokogawa Electric Corp | Probe accessory |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0622218Y2 (en) | 1994-06-08 |