JPH02108775U - - Google Patents
Info
- Publication number
- JPH02108775U JPH02108775U JP1513389U JP1513389U JPH02108775U JP H02108775 U JPH02108775 U JP H02108775U JP 1513389 U JP1513389 U JP 1513389U JP 1513389 U JP1513389 U JP 1513389U JP H02108775 U JPH02108775 U JP H02108775U
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- carrier
- sealing
- holding
- molecules
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 4
- 239000007789 gas Substances 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1513389U JPH02108775U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1513389U JPH02108775U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108775U true JPH02108775U (enrdf_load_stackoverflow) | 1990-08-29 |
Family
ID=31226922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1513389U Pending JPH02108775U (enrdf_load_stackoverflow) | 1989-02-10 | 1989-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108775U (enrdf_load_stackoverflow) |
-
1989
- 1989-02-10 JP JP1513389U patent/JPH02108775U/ja active Pending
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