JPH02108355U - - Google Patents
Info
- Publication number
- JPH02108355U JPH02108355U JP1708289U JP1708289U JPH02108355U JP H02108355 U JPH02108355 U JP H02108355U JP 1708289 U JP1708289 U JP 1708289U JP 1708289 U JP1708289 U JP 1708289U JP H02108355 U JPH02108355 U JP H02108355U
- Authority
- JP
- Japan
- Prior art keywords
- shim
- shims
- ceramic actuator
- thickness
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1708289U JPH02108355U (es) | 1989-02-16 | 1989-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1708289U JPH02108355U (es) | 1989-02-16 | 1989-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108355U true JPH02108355U (es) | 1990-08-29 |
Family
ID=31230567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1708289U Pending JPH02108355U (es) | 1989-02-16 | 1989-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108355U (es) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006346830A (ja) * | 2005-06-17 | 2006-12-28 | Toshiba Corp | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| WO2015083589A1 (ja) * | 2013-12-06 | 2015-06-11 | 株式会社 村田製作所 | 多連アクチュエータ |
-
1989
- 1989-02-16 JP JP1708289U patent/JPH02108355U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006346830A (ja) * | 2005-06-17 | 2006-12-28 | Toshiba Corp | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| JP4580826B2 (ja) * | 2005-06-17 | 2010-11-17 | 株式会社東芝 | マイクロメカニカルデバイス、マイクロスイッチ、容量可変キャパシタ、高周波回路及び光学スイッチ |
| WO2015083589A1 (ja) * | 2013-12-06 | 2015-06-11 | 株式会社 村田製作所 | 多連アクチュエータ |