JPH02107846U - - Google Patents

Info

Publication number
JPH02107846U
JPH02107846U JP1566289U JP1566289U JPH02107846U JP H02107846 U JPH02107846 U JP H02107846U JP 1566289 U JP1566289 U JP 1566289U JP 1566289 U JP1566289 U JP 1566289U JP H02107846 U JPH02107846 U JP H02107846U
Authority
JP
Japan
Prior art keywords
power supply
piezoelectric element
supply circuit
control signal
fine movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1566289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1566289U priority Critical patent/JPH02107846U/ja
Publication of JPH02107846U publication Critical patent/JPH02107846U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Fluid-Damping Devices (AREA)
JP1566289U 1989-02-13 1989-02-13 Pending JPH02107846U (sl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1566289U JPH02107846U (sl) 1989-02-13 1989-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1566289U JPH02107846U (sl) 1989-02-13 1989-02-13

Publications (1)

Publication Number Publication Date
JPH02107846U true JPH02107846U (sl) 1990-08-28

Family

ID=31227901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1566289U Pending JPH02107846U (sl) 1989-02-13 1989-02-13

Country Status (1)

Country Link
JP (1) JPH02107846U (sl)

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