JPH02106831U - - Google Patents

Info

Publication number
JPH02106831U
JPH02106831U JP1408989U JP1408989U JPH02106831U JP H02106831 U JPH02106831 U JP H02106831U JP 1408989 U JP1408989 U JP 1408989U JP 1408989 U JP1408989 U JP 1408989U JP H02106831 U JPH02106831 U JP H02106831U
Authority
JP
Japan
Prior art keywords
wafer
support plate
locking
wafer support
elastic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1408989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0744020Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1408989U priority Critical patent/JPH0744020Y2/ja
Publication of JPH02106831U publication Critical patent/JPH02106831U/ja
Application granted granted Critical
Publication of JPH0744020Y2 publication Critical patent/JPH0744020Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1408989U 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板 Expired - Lifetime JPH0744020Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1408989U JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1408989U JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Publications (2)

Publication Number Publication Date
JPH02106831U true JPH02106831U (enrdf_load_html_response) 1990-08-24
JPH0744020Y2 JPH0744020Y2 (ja) 1995-10-09

Family

ID=31224973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1408989U Expired - Lifetime JPH0744020Y2 (ja) 1989-02-10 1989-02-10 ウエーハ容器におけるウエーハ支持板

Country Status (1)

Country Link
JP (1) JPH0744020Y2 (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011222587A (ja) * 2010-04-05 2011-11-04 Shin Etsu Polymer Co Ltd リテーナ及び基板収納容器
JP2011233934A (ja) * 1998-07-10 2011-11-17 Entegris Inc クッション付きウェハー容器
JP2013522885A (ja) * 2010-03-11 2013-06-13 インテグリス・インコーポレーテッド 薄型ウェーハシッパー
US11101155B2 (en) 2017-04-05 2021-08-24 Miraial Co., Ltd. Board storing container

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011233934A (ja) * 1998-07-10 2011-11-17 Entegris Inc クッション付きウェハー容器
JP2013522885A (ja) * 2010-03-11 2013-06-13 インテグリス・インコーポレーテッド 薄型ウェーハシッパー
US9472431B2 (en) 2010-03-11 2016-10-18 Entegris, Inc. Thin wafer shipper
US10276414B2 (en) 2010-03-11 2019-04-30 Entegris, Inc. Thin wafer shipper
JP2011222587A (ja) * 2010-04-05 2011-11-04 Shin Etsu Polymer Co Ltd リテーナ及び基板収納容器
US11101155B2 (en) 2017-04-05 2021-08-24 Miraial Co., Ltd. Board storing container

Also Published As

Publication number Publication date
JPH0744020Y2 (ja) 1995-10-09

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term