JPH02106535U - - Google Patents

Info

Publication number
JPH02106535U
JPH02106535U JP1424689U JP1424689U JPH02106535U JP H02106535 U JPH02106535 U JP H02106535U JP 1424689 U JP1424689 U JP 1424689U JP 1424689 U JP1424689 U JP 1424689U JP H02106535 U JPH02106535 U JP H02106535U
Authority
JP
Japan
Prior art keywords
exhaust
filtered air
supply
clean bench
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1424689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1424689U priority Critical patent/JPH02106535U/ja
Publication of JPH02106535U publication Critical patent/JPH02106535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1424689U 1989-02-09 1989-02-09 Pending JPH02106535U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1424689U JPH02106535U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1424689U JPH02106535U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Publications (1)

Publication Number Publication Date
JPH02106535U true JPH02106535U (enrdf_load_stackoverflow) 1990-08-24

Family

ID=31225274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1424689U Pending JPH02106535U (enrdf_load_stackoverflow) 1989-02-09 1989-02-09

Country Status (1)

Country Link
JP (1) JPH02106535U (enrdf_load_stackoverflow)

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