JPH02106468U - - Google Patents

Info

Publication number

JPH02106468U

JPH02106468U JP1553889U JP1553889U JPH02106468U JP H02106468 U JPH02106468 U JP H02106468U JP 1553889 U JP1553889 U JP 1553889U JP 1553889 U JP1553889 U JP 1553889U JP H02106468 U JPH02106468 U JP H02106468U

Authority

JP

Japan

Prior art keywords

susceptor

vapor phase

phase growth

protection plate

silicon

Prior art date

1989-02-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
• 229910052710 silicon Inorganic materials 0.000 claims 4
• 239000010703 silicon Substances 0.000 claims 4
• 238000001947 vapour-phase growth Methods 0.000 claims 3
• 125000002524 organometallic group Chemical group 0.000 claims 2
• 150000001875 compounds Chemical class 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 229920001296 polysiloxane Polymers 0.000 description 1