JPH02106456U - - Google Patents
Info
- Publication number
- JPH02106456U JPH02106456U JP1368389U JP1368389U JPH02106456U JP H02106456 U JPH02106456 U JP H02106456U JP 1368389 U JP1368389 U JP 1368389U JP 1368389 U JP1368389 U JP 1368389U JP H02106456 U JPH02106456 U JP H02106456U
- Authority
- JP
- Japan
- Prior art keywords
- trolley
- transport
- wheel
- main body
- forming apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000725 suspension Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989013683U JPH0754284Y2 (ja) | 1989-02-08 | 1989-02-08 | 搬送型スパッタリング成膜装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989013683U JPH0754284Y2 (ja) | 1989-02-08 | 1989-02-08 | 搬送型スパッタリング成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02106456U true JPH02106456U (US20030157376A1-20030821-M00001.png) | 1990-08-23 |
JPH0754284Y2 JPH0754284Y2 (ja) | 1995-12-18 |
Family
ID=31224199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989013683U Expired - Lifetime JPH0754284Y2 (ja) | 1989-02-08 | 1989-02-08 | 搬送型スパッタリング成膜装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0754284Y2 (US20030157376A1-20030821-M00001.png) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62105768A (ja) * | 1985-11-01 | 1987-05-16 | ボンバーディア・コーポレーション | 鉄道車両用の積み重ねられた一対のスプリング |
JPS637165U (US20030157376A1-20030821-M00001.png) * | 1986-06-25 | 1988-01-18 | ||
JPS6313307U (US20030157376A1-20030821-M00001.png) * | 1986-07-14 | 1988-01-28 | ||
JPS6339161U (US20030157376A1-20030821-M00001.png) * | 1986-08-26 | 1988-03-14 |
-
1989
- 1989-02-08 JP JP1989013683U patent/JPH0754284Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62105768A (ja) * | 1985-11-01 | 1987-05-16 | ボンバーディア・コーポレーション | 鉄道車両用の積み重ねられた一対のスプリング |
JPS637165U (US20030157376A1-20030821-M00001.png) * | 1986-06-25 | 1988-01-18 | ||
JPS6313307U (US20030157376A1-20030821-M00001.png) * | 1986-07-14 | 1988-01-28 | ||
JPS6339161U (US20030157376A1-20030821-M00001.png) * | 1986-08-26 | 1988-03-14 |
Also Published As
Publication number | Publication date |
---|---|
JPH0754284Y2 (ja) | 1995-12-18 |