JPH02106455U - - Google Patents
Info
- Publication number
- JPH02106455U JPH02106455U JP1326289U JP1326289U JPH02106455U JP H02106455 U JPH02106455 U JP H02106455U JP 1326289 U JP1326289 U JP 1326289U JP 1326289 U JP1326289 U JP 1326289U JP H02106455 U JPH02106455 U JP H02106455U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- vacuum
- vacuum vessel
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326289U JPH02106455U (cs) | 1989-02-07 | 1989-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326289U JPH02106455U (cs) | 1989-02-07 | 1989-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106455U true JPH02106455U (cs) | 1990-08-23 |
Family
ID=31223419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1326289U Pending JPH02106455U (cs) | 1989-02-07 | 1989-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106455U (cs) |
-
1989
- 1989-02-07 JP JP1326289U patent/JPH02106455U/ja active Pending
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