JPH02105583U - - Google Patents
Info
- Publication number
- JPH02105583U JPH02105583U JP13593389U JP13593389U JPH02105583U JP H02105583 U JPH02105583 U JP H02105583U JP 13593389 U JP13593389 U JP 13593389U JP 13593389 U JP13593389 U JP 13593389U JP H02105583 U JPH02105583 U JP H02105583U
- Authority
- JP
- Japan
- Prior art keywords
- section
- refrigerator
- cryopump
- power source
- compressor section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000001307 helium Substances 0.000 claims 3
- 229910052734 helium Inorganic materials 0.000 claims 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 3
- 239000007789 gas Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13593389U JPH032715Y2 (https=) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13593389U JPH032715Y2 (https=) | 1989-11-22 | 1989-11-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02105583U true JPH02105583U (https=) | 1990-08-22 |
| JPH032715Y2 JPH032715Y2 (https=) | 1991-01-24 |
Family
ID=31395978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13593389U Expired JPH032715Y2 (https=) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032715Y2 (https=) |
-
1989
- 1989-11-22 JP JP13593389U patent/JPH032715Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH032715Y2 (https=) | 1991-01-24 |