JPH02105583U - - Google Patents

Info

Publication number
JPH02105583U
JPH02105583U JP13593389U JP13593389U JPH02105583U JP H02105583 U JPH02105583 U JP H02105583U JP 13593389 U JP13593389 U JP 13593389U JP 13593389 U JP13593389 U JP 13593389U JP H02105583 U JPH02105583 U JP H02105583U
Authority
JP
Japan
Prior art keywords
section
refrigerator
cryopump
power source
compressor section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13593389U
Other languages
English (en)
Other versions
JPH032715Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13593389U priority Critical patent/JPH032715Y2/ja
Publication of JPH02105583U publication Critical patent/JPH02105583U/ja
Application granted granted Critical
Publication of JPH032715Y2 publication Critical patent/JPH032715Y2/ja
Expired legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は従来のクライオポンプの運転装置の説
明図、第２図は本考案の実施例の説明図、第３図
は本考案の装置の冷凍能力を示す線図である。 １……クライオポンプ、３……冷凍機、４……
冷凍機部、５……圧縮機部、７，１２……電動機
、１３……電源、１４……周波数変換器。

Claims (1)

    【実用新案登録請求の範囲】
  1. クライオポンプのヘリウム冷凍機を冷凍機部と
    圧縮機部とに分離構成し、該冷凍機部と圧縮機部
    の夫々を駆動する電動機として５０Ｈｚ及び６０
    Ｈｚの商用周波数の電源に対応し得る電動機を備
    え且つ該圧縮機部を該冷凍機部が必要とするヘリ
    ウムガス量よりも多量のヘリウムガスを供給する
    ように構成したものに於いて、該圧縮機部の電動
    機を直接５０Ｈｚの電源に接続し、該冷凍機部を
    ５０Ｈｚから６０Ｈｚに周波数を変換する周波数
    変換器を介して該５０Ｈｚの電源に接続したこと
    を特徴とするクライオポンプの駆動装置。
JP13593389U 1989-11-22 1989-11-22 Expired JPH032715Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13593389U JPH032715Y2 (ja) 1989-11-22 1989-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13593389U JPH032715Y2 (ja) 1989-11-22 1989-11-22

Publications (2)

Publication Number Publication Date
JPH02105583U true JPH02105583U (ja) 1990-08-22
JPH032715Y2 JPH032715Y2 (ja) 1991-01-24

Family

ID=31395978

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13593389U Expired JPH032715Y2 (ja) 1989-11-22 1989-11-22

Country Status (1)

Country Link
JP (1) JPH032715Y2 (ja)

Also Published As

Publication number Publication date
JPH032715Y2 (ja) 1991-01-24

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